Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Logos Berlin
2017
|
| Schriftenreihe: | Research at NaMLab
5 |
| Schlagworte: | |
| Online-Zugang: | Inhaltstext |
| Beschreibung: | 171 Seiten 21 cm x 14.5 cm |
| ISBN: | 9783832544508 383254450X |
Internformat
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Datensatz im Suchindex
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| author | Döring, Stefan 1970- |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| illustrated | Not Illustrated |
| indexdate | 2024-09-10T02:16:01Z |
| institution | BVB |
| isbn | 9783832544508 383254450X |
| language | English |
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| physical | 171 Seiten 21 cm x 14.5 cm |
| publishDate | 2017 |
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| spelling | Döring, Stefan 1970- Verfasser (DE-588)129423882 aut Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization Stefan Döring Berlin Logos Berlin 2017 171 Seiten 21 cm x 14.5 cm txt rdacontent n rdamedia nc rdacarrier Research at NaMLab 5 Dissertation Technische Universität Dresden 2017 Rasterkraftmikroskopie (DE-588)4274473-8 gnd rswk-swf Ladungsträger (DE-588)4166397-4 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Dotant (DE-588)4150490-2 gnd rswk-swf Tiefenprofilmessung (DE-588)4185422-6 gnd rswk-swf SDVSRM dopant profiling failure analysis implant visualization Technische Universität Dresden (DE-588)4113937-9 Hochschulschrift gnd-content Halbleiterbauelement (DE-588)4113826-0 s Ladungsträger (DE-588)4166397-4 s Dotant (DE-588)4150490-2 s Tiefenprofilmessung (DE-588)4185422-6 s Rasterkraftmikroskopie (DE-588)4274473-8 s DE-604 Research at NaMLab 5 (DE-604)BV039853060 5 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=59e23a7927c34fdd9bb704f3f94518b8&prov=M&dok_var=1&dok_ext=htm Inhaltstext |
| spellingShingle | Döring, Stefan 1970- Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization Research at NaMLab Rasterkraftmikroskopie (DE-588)4274473-8 gnd Ladungsträger (DE-588)4166397-4 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Dotant (DE-588)4150490-2 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd |
| subject_GND | (DE-588)4274473-8 (DE-588)4166397-4 (DE-588)4113826-0 (DE-588)4150490-2 (DE-588)4185422-6 (DE-588)4113937-9 |
| title | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization |
| title_auth | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization |
| title_exact_search | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization |
| title_full | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization Stefan Döring |
| title_fullStr | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization Stefan Döring |
| title_full_unstemmed | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization Stefan Döring |
| title_short | Scanning Spreading Resistance Microscopy and its Application to Passive and Active Semiconductor Device Characterization |
| title_sort | scanning spreading resistance microscopy and its application to passive and active semiconductor device characterization |
| topic | Rasterkraftmikroskopie (DE-588)4274473-8 gnd Ladungsträger (DE-588)4166397-4 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Dotant (DE-588)4150490-2 gnd Tiefenprofilmessung (DE-588)4185422-6 gnd |
| topic_facet | Rasterkraftmikroskopie Ladungsträger Halbleiterbauelement Dotant Tiefenprofilmessung Hochschulschrift |
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| volume_link | (DE-604)BV039853060 |
| work_keys_str_mv | AT doringstefan scanningspreadingresistancemicroscopyanditsapplicationtopassiveandactivesemiconductordevicecharacterization |