Holdings: Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies:

Saved in:

Bibliographic Details
Other Authors:	Tilli, Markku (Editor)
Format:	Electronic eBook
Language:	English
Published:	London, UK William Andrew, an imprint of Elsevier 2015
Edition:	Second edition
Series:	Micro & nano technologies
Subjects:	Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems > Materials Silicon > Electric properties Silicium MEMS
Online Access:	DE-1046 DE-860 DE-188 DE-29 Volltext
Physical Description:	1 Online-Ressource Illustrationen
ISBN:	9780323312233 9780323299657

Staff View

MARC


LEADER	00000nam a2200000 c 4500
001	BV044392067
003	DE-604
005	20200127
007	cr\|uuu---uuuuu
008	170630s2015 xx a\|\|\| o\|\|\|\| 00\|\|\| eng d
020			\|a 9780323312233 \|c Online \|9 978-0-323-31223-3
020			\|a 9780323299657 \|c Online \|9 978-0-323-29965-7
024	7		\|a 10.1016/C2013-0-19270-7 \|2 doi
035			\|a (ZDB-33-ESD)ocn920564477
035			\|a (OCoLC)920564477
035			\|a (DE-599)BVBBV044392067
040			\|a DE-604 \|b ger \|e rda
041	0		\|a eng
049			\|a DE-1046 \|a DE-29 \|a DE-188 \|a DE-83
082	0		\|a 621.3815/2 \|2 23
245	1	0	\|a Handbook of silicon based MEMS materials and technologies \|c edited by Markku Tilli [und anderen]
250			\|a Second edition
264		1	\|a London, UK \|b William Andrew, an imprint of Elsevier \|c 2015
300			\|a 1 Online-Ressource \|b Illustrationen
336			\|b txt \|2 rdacontent
337			\|b c \|2 rdamedia
338			\|b cr \|2 rdacarrier
490	0		\|a Micro & nano technologies
650		7	\|a Microelectromechanical systems \|2 fast
650		7	\|a Microelectromechanical systems / Materials \|2 fast
650		7	\|a Silicon / Electric properties \|2 fast
650		7	\|a TECHNOLOGY & ENGINEERING / Mechanical \|2 bisacsh
650		4	\|a Microelectromechanical systems
650		4	\|a Microelectromechanical systems \|x Materials
650		4	\|a Silicon \|x Electric properties
650	0	7	\|a Silicium \|0 (DE-588)4077445-4 \|2 gnd \|9 rswk-swf
650	0	7	\|a MEMS \|0 (DE-588)4824724-8 \|2 gnd \|9 rswk-swf
689	0	0	\|a MEMS \|0 (DE-588)4824724-8 \|D s
689	0	1	\|a Silicium \|0 (DE-588)4077445-4 \|D s
689	0		\|5 DE-604
700	1		\|a Tilli, Markku \|4 edt
776	0	8	\|i Erscheint auch als \|n Druck-Ausgabe
856	4	0	\|u http://www.sciencedirect.com/science/book/9780323299657 \|x Verlag \|z URL des Erstveröffentlichers \|3 Volltext
912			\|a ZDB-33-ESD
912			\|a ZDB-33-EBS
943	1		\|a oai:aleph.bib-bvb.de:BVB01-029794289
966	e		\|u http://www.sciencedirect.com/science/book/9780323299657 \|l DE-1046 \|p ZDB-33-ESD \|q FAW_PDA_ESD \|x Verlag \|3 Volltext
966	e		\|u http://www.sciencedirect.com/science/book/9780323299657 \|l DE-860 \|p ZDB-33-ESD \|q FLA_PDA_ESD \|x Verlag \|3 Volltext
966	e		\|u http://www.sciencedirect.com/science/book/9780323299657 \|l DE-188 \|p ZDB-33-ESD \|q ZDB-33-ESD 2017 \|x Verlag \|3 Volltext
966	e		\|u http://www.sciencedirect.com/science/book/9780323299657 \|l DE-29 \|p ZDB-33-EBS \|q UER_PDA_EBS_Kauf \|x Verlag \|3 Volltext

Record in the Search Index

_version_	1824679591674904576
adam_text
any_adam_object
author2	Tilli, Markku
author2_role	edt
author2_variant	m t mt
author_facet	Tilli, Markku
building	Verbundindex
bvnumber	BV044392067
collection	ZDB-33-ESD ZDB-33-EBS
ctrlnum	(ZDB-33-ESD)ocn920564477 (OCoLC)920564477 (DE-599)BVBBV044392067
dewey-full	621.3815/2
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.3815/2
dewey-search	621.3815/2
dewey-sort	3621.3815 12
dewey-tens	620 - Engineering and allied operations
discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
edition	Second edition
format	Electronic eBook
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV044392067</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200127</controlfield><controlfield tag="007">cr\|uuu---uuuuu</controlfield><controlfield tag="008">170630s2015 xx a\|\|\| o\|\|\|\| 00\|\|\| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780323312233</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-323-31223-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780323299657</subfield><subfield code="c">Online</subfield><subfield code="9">978-0-323-29965-7</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/C2013-0-19270-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn920564477</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)920564477</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044392067</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-29</subfield><subfield code="a">DE-188</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of silicon based MEMS materials and technologies</subfield><subfield code="c">edited by Markku Tilli [und anderen]</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Second edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London, UK</subfield><subfield code="b">William Andrew, an imprint of Elsevier</subfield><subfield code="c">2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Micro & nano technologies</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectromechanical systems</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectromechanical systems / Materials</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Silicon / Electric properties</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Mechanical</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon</subfield><subfield code="x">Electric properties</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tilli, Markku</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780323299657</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029794289</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780323299657</subfield><subfield code="l">DE-1046</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780323299657</subfield><subfield code="l">DE-860</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780323299657</subfield><subfield code="l">DE-188</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">ZDB-33-ESD 2017</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780323299657</subfield><subfield code="l">DE-29</subfield><subfield code="p">ZDB-33-EBS</subfield><subfield code="q">UER_PDA_EBS_Kauf</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection>
id	DE-604.BV044392067
illustrated	Illustrated
indexdate	2025-02-21T15:01:02Z
institution	BVB
isbn	9780323312233 9780323299657
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-029794289
oclc_num	920564477
open_access_boolean
owner	DE-1046 DE-29 DE-188 DE-83
owner_facet	DE-1046 DE-29 DE-188 DE-83
physical	1 Online-Ressource Illustrationen
psigel	ZDB-33-ESD ZDB-33-EBS ZDB-33-ESD FAW_PDA_ESD ZDB-33-ESD FLA_PDA_ESD ZDB-33-ESD ZDB-33-ESD 2017 ZDB-33-EBS UER_PDA_EBS_Kauf
publishDate	2015
publishDateSearch	2015
publishDateSort	2015
publisher	William Andrew, an imprint of Elsevier
record_format	marc
series2	Micro & nano technologies
spelling	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen] Second edition London, UK William Andrew, an imprint of Elsevier 2015 1 Online-Ressource Illustrationen txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies Microelectromechanical systems fast Microelectromechanical systems / Materials fast Silicon / Electric properties fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s DE-604 Tilli, Markku edt Erscheint auch als Druck-Ausgabe http://www.sciencedirect.com/science/book/9780323299657 Verlag URL des Erstveröffentlichers Volltext
spellingShingle	Handbook of silicon based MEMS materials and technologies Microelectromechanical systems fast Microelectromechanical systems / Materials fast Silicon / Electric properties fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd MEMS (DE-588)4824724-8 gnd
subject_GND	(DE-588)4077445-4 (DE-588)4824724-8
title	Handbook of silicon based MEMS materials and technologies
title_auth	Handbook of silicon based MEMS materials and technologies
title_exact_search	Handbook of silicon based MEMS materials and technologies
title_full	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen]
title_fullStr	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen]
title_full_unstemmed	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen]
title_short	Handbook of silicon based MEMS materials and technologies
title_sort	handbook of silicon based mems materials and technologies
topic	Microelectromechanical systems fast Microelectromechanical systems / Materials fast Silicon / Electric properties fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems Materials Silicon Electric properties Silicium MEMS
url	http://www.sciencedirect.com/science/book/9780323299657
work_keys_str_mv	AT tillimarkku handbookofsiliconbasedmemsmaterialsandtechnologies

Holdings

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection! Get full text

MARC

Record in the Search Index

There is no print copy available.

Similar Items