Developments in surface contamination and cleaning, Volume 8: cleaning techniques
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford, England Waltham, Massachusetts
William Andrew
2015
|
| Schlagworte: | |
| Online-Zugang: | FAW01 Volltext |
| Zusammenfassung: | As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography |
| Beschreibung: | Includes bibliographical references at the end of each chapters and index |
| Beschreibung: | 1 online resource (235 pages) illustrations (some color) |
| ISBN: | 9780323312714 0323312713 9780323299619 032329961X |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV044389838 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170630s2015 |||| o||u| ||||||eng d | ||
| 020 | |a 9780323312714 |9 978-0-323-31271-4 | ||
| 020 | |a 0323312713 |9 0-323-31271-3 | ||
| 020 | |a 9780323299619 |9 978-0-323-29961-9 | ||
| 020 | |a 032329961X |9 0-323-29961-X | ||
| 035 | |a (ZDB-33-ESD)ocn899000515 | ||
| 035 | |a (OCoLC)899000515 | ||
| 035 | |a (DE-599)BVBBV044389838 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 | ||
| 082 | 0 | |a 648.5 |2 23 | |
| 245 | 1 | 0 | |a Developments in surface contamination and cleaning, Volume 8 |b cleaning techniques |c edited by Rajiv Kohli, K. L. Mittal |
| 264 | 1 | |a Oxford, England |a Waltham, Massachusetts |b William Andrew |c 2015 | |
| 264 | 4 | |c © 2015 | |
| 300 | |a 1 online resource (235 pages) |b illustrations (some color) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references at the end of each chapters and index | ||
| 520 | |a As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography | ||
| 650 | 4 | |a Cleaning | |
| 650 | 4 | |a Coatings | |
| 650 | 4 | |a Particles |x Measurement | |
| 650 | 4 | |a Surface contamination |x Prevention | |
| 650 | 4 | |a Surfaces (Technology) |x Inspection | |
| 700 | 1 | |a Kohli, Rajiv |4 edt | |
| 700 | 1 | |a Mittal, K. L. |4 edt | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |t Developments in surface contamination and cleaning. Volume 8 |d Oxford, England ; Waltham, Massachusetts : William Andrew, c2015 |h xvi, 218 pages |k Developments in Surface Contamination and Cleaning Series ; Volume 8 |z 9780323299619 |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780323299619 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029792060 | ||
| 966 | e | |u http://www.sciencedirect.com/science/book/9780323299619 |l FAW01 |p ZDB-33-ESD |q FAW_PDA_ESD |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804177661480665088 |
|---|---|
| any_adam_object | |
| author2 | Kohli, Rajiv Mittal, K. L. |
| author2_role | edt edt |
| author2_variant | r k rk k l m kl klm |
| author_facet | Kohli, Rajiv Mittal, K. L. |
| building | Verbundindex |
| bvnumber | BV044389838 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (ZDB-33-ESD)ocn899000515 (OCoLC)899000515 (DE-599)BVBBV044389838 |
| dewey-full | 648.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 648 - Housekeeping |
| dewey-raw | 648.5 |
| dewey-search | 648.5 |
| dewey-sort | 3648.5 |
| dewey-tens | 640 - Home and family management |
| discipline | Agrar-/Forst-/Ernährungs-/Haushaltswissenschaft / Gartenbau |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03241nmm a2200469zc 4500</leader><controlfield tag="001">BV044389838</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170630s2015 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780323312714</subfield><subfield code="9">978-0-323-31271-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0323312713</subfield><subfield code="9">0-323-31271-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780323299619</subfield><subfield code="9">978-0-323-29961-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">032329961X</subfield><subfield code="9">0-323-29961-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn899000515</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)899000515</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044389838</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">648.5</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Developments in surface contamination and cleaning, Volume 8</subfield><subfield code="b">cleaning techniques</subfield><subfield code="c">edited by Rajiv Kohli, K. L. Mittal</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford, England</subfield><subfield code="a">Waltham, Massachusetts</subfield><subfield code="b">William Andrew</subfield><subfield code="c">2015</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (235 pages)</subfield><subfield code="b">illustrations (some color)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references at the end of each chapters and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Cleaning</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Coatings</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Particles</subfield><subfield code="x">Measurement</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surface contamination</subfield><subfield code="x">Prevention</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces (Technology)</subfield><subfield code="x">Inspection</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kohli, Rajiv</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mittal, K. L.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="t">Developments in surface contamination and cleaning. Volume 8</subfield><subfield code="d">Oxford, England ; Waltham, Massachusetts : William Andrew, c2015</subfield><subfield code="h">xvi, 218 pages</subfield><subfield code="k">Developments in Surface Contamination and Cleaning Series ; Volume 8</subfield><subfield code="z">9780323299619</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780323299619</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029792060</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780323299619</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV044389838 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:51:37Z |
| institution | BVB |
| isbn | 9780323312714 0323312713 9780323299619 032329961X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029792060 |
| oclc_num | 899000515 |
| open_access_boolean | |
| owner | DE-1046 |
| owner_facet | DE-1046 |
| physical | 1 online resource (235 pages) illustrations (some color) |
| psigel | ZDB-33-ESD ZDB-33-EBS ZDB-33-ESD FAW_PDA_ESD |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | William Andrew |
| record_format | marc |
| spelling | Developments in surface contamination and cleaning, Volume 8 cleaning techniques edited by Rajiv Kohli, K. L. Mittal Oxford, England Waltham, Massachusetts William Andrew 2015 © 2015 1 online resource (235 pages) illustrations (some color) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references at the end of each chapters and index As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography Cleaning Coatings Particles Measurement Surface contamination Prevention Surfaces (Technology) Inspection Kohli, Rajiv edt Mittal, K. L. edt Erscheint auch als Druck-Ausgabe Developments in surface contamination and cleaning. Volume 8 Oxford, England ; Waltham, Massachusetts : William Andrew, c2015 xvi, 218 pages Developments in Surface Contamination and Cleaning Series ; Volume 8 9780323299619 http://www.sciencedirect.com/science/book/9780323299619 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Developments in surface contamination and cleaning, Volume 8 cleaning techniques Cleaning Coatings Particles Measurement Surface contamination Prevention Surfaces (Technology) Inspection |
| title | Developments in surface contamination and cleaning, Volume 8 cleaning techniques |
| title_auth | Developments in surface contamination and cleaning, Volume 8 cleaning techniques |
| title_exact_search | Developments in surface contamination and cleaning, Volume 8 cleaning techniques |
| title_full | Developments in surface contamination and cleaning, Volume 8 cleaning techniques edited by Rajiv Kohli, K. L. Mittal |
| title_fullStr | Developments in surface contamination and cleaning, Volume 8 cleaning techniques edited by Rajiv Kohli, K. L. Mittal |
| title_full_unstemmed | Developments in surface contamination and cleaning, Volume 8 cleaning techniques edited by Rajiv Kohli, K. L. Mittal |
| title_short | Developments in surface contamination and cleaning, Volume 8 |
| title_sort | developments in surface contamination and cleaning volume 8 cleaning techniques |
| title_sub | cleaning techniques |
| topic | Cleaning Coatings Particles Measurement Surface contamination Prevention Surfaces (Technology) Inspection |
| topic_facet | Cleaning Coatings Particles Measurement Surface contamination Prevention Surfaces (Technology) Inspection |
| url | http://www.sciencedirect.com/science/book/9780323299619 |
| work_keys_str_mv | AT kohlirajiv developmentsinsurfacecontaminationandcleaningvolume8cleaningtechniques AT mittalkl developmentsinsurfacecontaminationandcleaningvolume8cleaningtechniques |