Developments in surface contamination and cleaning, Volume 7: cleanliness validation and verification
As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...
Gespeichert in:
| Weitere Verfasser: | , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Kidlington, England Waltham, Massachusetts
William Andrew
2015
|
| Ausgabe: | First edition |
| Schlagworte: | |
| Online-Zugang: | FAW01 Volltext |
| Zusammenfassung: | As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography |
| Beschreibung: | Includes bibliographical references at the end of each chapters and index |
| Beschreibung: | 1 online resource (207 pages) illustrations, tables |
| ISBN: | 9780323311458 0323311458 9780323313032 |
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| 245 | 1 | 0 | |a Developments in surface contamination and cleaning, Volume 7 |b cleanliness validation and verification |c edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others] |
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| 520 | |a As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography | ||
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| spelling | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others] First edition Kidlington, England Waltham, Massachusetts William Andrew 2015 © 2015 1 online resource (207 pages) illustrations, tables txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references at the end of each chapters and index As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography Surfaces (Technology) Surface contamination Prevention Beschichtung (DE-588)4144863-7 gnd rswk-swf Kontamination (DE-588)4032272-5 gnd rswk-swf Oberfläche (DE-588)4042907-6 gnd rswk-swf Teilchen (DE-588)4059317-4 gnd rswk-swf Reinigungsverfahren (DE-588)4391913-3 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Oberfläche (DE-588)4042907-6 s Beschichtung (DE-588)4144863-7 s Kontamination (DE-588)4032272-5 s Reinigungsverfahren (DE-588)4391913-3 s Teilchen (DE-588)4059317-4 s DE-604 Kohli, Rajiv edt Mittal, K. L. edt Albert, David E. ctb Erscheint auch als Druck-Ausgabe Developments in surface contamination and cleaning. Volume 7 First edition Kidlington, England ; Waltham, Massachusetts : William Andrew, c2015 xvi, 190 pages 9780323313032 http://www.sciencedirect.com/science/book/9780323313032 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification Surfaces (Technology) Surface contamination Prevention Beschichtung (DE-588)4144863-7 gnd Kontamination (DE-588)4032272-5 gnd Oberfläche (DE-588)4042907-6 gnd Teilchen (DE-588)4059317-4 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
| subject_GND | (DE-588)4144863-7 (DE-588)4032272-5 (DE-588)4042907-6 (DE-588)4059317-4 (DE-588)4391913-3 (DE-588)4143413-4 |
| title | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification |
| title_auth | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification |
| title_exact_search | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification |
| title_full | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others] |
| title_fullStr | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others] |
| title_full_unstemmed | Developments in surface contamination and cleaning, Volume 7 cleanliness validation and verification edited by Rajiv Kohli and K. L. Mittal ; contributors, David E. Albert [and six others] |
| title_short | Developments in surface contamination and cleaning, Volume 7 |
| title_sort | developments in surface contamination and cleaning volume 7 cleanliness validation and verification |
| title_sub | cleanliness validation and verification |
| topic | Surfaces (Technology) Surface contamination Prevention Beschichtung (DE-588)4144863-7 gnd Kontamination (DE-588)4032272-5 gnd Oberfläche (DE-588)4042907-6 gnd Teilchen (DE-588)4059317-4 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
| topic_facet | Surfaces (Technology) Surface contamination Prevention Beschichtung Kontamination Oberfläche Teilchen Reinigungsverfahren Aufsatzsammlung |
| url | http://www.sciencedirect.com/science/book/9780323313032 |
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