Beam processing technologies:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
San Diego, Calif.
Academic Press
© 1989
|
| Series: | VLSI electronics
v. 21 |
| Subjects: | |
| Online Access: | FAW01 Volltext |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | xii, 546 pages |
| ISBN: | 9780122341212 012234121X 9781483217857 148321785X |
Staff View
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| 245 | 1 | 0 | |a Beam processing technologies |c edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| 264 | 1 | |a San Diego, Calif. |b Academic Press |c © 1989 | |
| 300 | |a xii, 546 pages | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a VLSI electronics |v v. 21 | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a Electron beams |2 fast | |
| 650 | 7 | |a Integrated circuits / Very large scale integration |2 fast | |
| 650 | 7 | |a Ion bombardment |2 fast | |
| 650 | 7 | |a Molecular beam epitaxy |2 fast | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration | |
| 650 | 4 | |a Electron beams | |
| 650 | 4 | |a Ion bombardment | |
| 650 | 4 | |a Molecular beam epitaxy | |
| 700 | 1 | |a Einspruch, Norman G. |e Sonstige |0 (DE-588)1051485282 |4 oth | |
| 700 | 1 | |a Cohen, Simon S. |e Sonstige |4 oth | |
| 700 | 1 | |a Singh, Raj N. |e Sonstige |4 oth | |
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Record in the Search Index
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| dewey-full | 621.395 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.395 |
| dewey-search | 621.395 |
| dewey-sort | 3621.395 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV044387676 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:51:33Z |
| institution | BVB |
| isbn | 9780122341212 012234121X 9781483217857 148321785X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029789897 |
| oclc_num | 714902537 |
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| owner_facet | DE-1046 |
| physical | xii, 546 pages |
| psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Academic Press |
| record_format | marc |
| series2 | VLSI electronics |
| spelling | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh San Diego, Calif. Academic Press © 1989 xii, 546 pages txt rdacontent c rdamedia cr rdacarrier VLSI electronics v. 21 Includes bibliographical references and index Electron beams fast Integrated circuits / Very large scale integration fast Ion bombardment fast Molecular beam epitaxy fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Electron beams Ion bombardment Molecular beam epitaxy Einspruch, Norman G. Sonstige (DE-588)1051485282 oth Cohen, Simon S. Sonstige oth Singh, Raj N. Sonstige oth http://www.sciencedirect.com/science/bookseries/07367031/21 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Beam processing technologies Electron beams fast Integrated circuits / Very large scale integration fast Ion bombardment fast Molecular beam epitaxy fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Electron beams Ion bombardment Molecular beam epitaxy |
| title | Beam processing technologies |
| title_auth | Beam processing technologies |
| title_exact_search | Beam processing technologies |
| title_full | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| title_fullStr | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| title_full_unstemmed | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| title_short | Beam processing technologies |
| title_sort | beam processing technologies |
| topic | Electron beams fast Integrated circuits / Very large scale integration fast Ion bombardment fast Molecular beam epitaxy fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Electron beams Ion bombardment Molecular beam epitaxy |
| topic_facet | Electron beams Integrated circuits / Very large scale integration Ion bombardment Molecular beam epitaxy TECHNOLOGY & ENGINEERING / Mechanical Integrated circuits Very large scale integration |
| url | http://www.sciencedirect.com/science/bookseries/07367031/21 |
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