Beam processing technologies:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
San Diego, Calif.
Academic Press
© 1989
|
| Schriftenreihe: | VLSI electronics
v. 21 |
| Schlagworte: | |
| Online-Zugang: | FAW01 Volltext |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xii, 546 pages |
| ISBN: | 9780122341212 012234121X 9781483217857 148321785X |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV044387676 | ||
| 003 | DE-604 | ||
| 005 | 20180201 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170630s1989 |||| o||u| ||||||eng d | ||
| 020 | |a 9780122341212 |9 978-0-12-234121-2 | ||
| 020 | |a 012234121X |9 0-12-234121-X | ||
| 020 | |a 9781483217857 |9 978-1-4832-1785-7 | ||
| 020 | |a 148321785X |9 1-4832-1785-X | ||
| 035 | |a (ZDB-33-ESD)ocn714902537 | ||
| 035 | |a (OCoLC)714902537 | ||
| 035 | |a (DE-599)BVBBV044387676 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 | ||
| 082 | 0 | |a 621.395 | |
| 245 | 1 | 0 | |a Beam processing technologies |c edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| 264 | 1 | |a San Diego, Calif. |b Academic Press |c © 1989 | |
| 300 | |a xii, 546 pages | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a VLSI electronics |v v. 21 | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a Electron beams |2 fast | |
| 650 | 7 | |a Integrated circuits / Very large scale integration |2 fast | |
| 650 | 7 | |a Ion bombardment |2 fast | |
| 650 | 7 | |a Molecular beam epitaxy |2 fast | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration | |
| 650 | 4 | |a Electron beams | |
| 650 | 4 | |a Ion bombardment | |
| 650 | 4 | |a Molecular beam epitaxy | |
| 700 | 1 | |a Einspruch, Norman G. |e Sonstige |0 (DE-588)1051485282 |4 oth | |
| 700 | 1 | |a Cohen, Simon S. |e Sonstige |4 oth | |
| 700 | 1 | |a Singh, Raj N. |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/bookseries/07367031/21 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029789897 | ||
| 966 | e | |u http://www.sciencedirect.com/science/bookseries/07367031/21 |l FAW01 |p ZDB-33-ESD |q FAW_PDA_ESD |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804177656948719616 |
|---|---|
| any_adam_object | |
| author_GND | (DE-588)1051485282 |
| building | Verbundindex |
| bvnumber | BV044387676 |
| collection | ZDB-33-ESD |
| ctrlnum | (ZDB-33-ESD)ocn714902537 (OCoLC)714902537 (DE-599)BVBBV044387676 |
| dewey-full | 621.395 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.395 |
| dewey-search | 621.395 |
| dewey-sort | 3621.395 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01879nmm a2200505zcb4500</leader><controlfield tag="001">BV044387676</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180201 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170630s1989 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780122341212</subfield><subfield code="9">978-0-12-234121-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">012234121X</subfield><subfield code="9">0-12-234121-X</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781483217857</subfield><subfield code="9">978-1-4832-1785-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">148321785X</subfield><subfield code="9">1-4832-1785-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn714902537</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)714902537</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044387676</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.395</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Beam processing technologies</subfield><subfield code="c">edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">San Diego, Calif.</subfield><subfield code="b">Academic Press</subfield><subfield code="c">© 1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xii, 546 pages</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">VLSI electronics</subfield><subfield code="v">v. 21</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Electron beams</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Integrated circuits / Very large scale integration</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ion bombardment</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Molecular beam epitaxy</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Mechanical</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Very large scale integration</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electron beams</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion bombardment</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Molecular beam epitaxy</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Einspruch, Norman G.</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)1051485282</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cohen, Simon S.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Singh, Raj N.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/bookseries/07367031/21</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029789897</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/bookseries/07367031/21</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV044387676 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:51:33Z |
| institution | BVB |
| isbn | 9780122341212 012234121X 9781483217857 148321785X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029789897 |
| oclc_num | 714902537 |
| open_access_boolean | |
| owner | DE-1046 |
| owner_facet | DE-1046 |
| physical | xii, 546 pages |
| psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Academic Press |
| record_format | marc |
| series2 | VLSI electronics |
| spelling | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh San Diego, Calif. Academic Press © 1989 xii, 546 pages txt rdacontent c rdamedia cr rdacarrier VLSI electronics v. 21 Includes bibliographical references and index Electron beams fast Integrated circuits / Very large scale integration fast Ion bombardment fast Molecular beam epitaxy fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Electron beams Ion bombardment Molecular beam epitaxy Einspruch, Norman G. Sonstige (DE-588)1051485282 oth Cohen, Simon S. Sonstige oth Singh, Raj N. Sonstige oth http://www.sciencedirect.com/science/bookseries/07367031/21 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Beam processing technologies Electron beams fast Integrated circuits / Very large scale integration fast Ion bombardment fast Molecular beam epitaxy fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Electron beams Ion bombardment Molecular beam epitaxy |
| title | Beam processing technologies |
| title_auth | Beam processing technologies |
| title_exact_search | Beam processing technologies |
| title_full | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| title_fullStr | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| title_full_unstemmed | Beam processing technologies edited by Norman G. Einspruch, S.S. Cohen, Raj N. Singh |
| title_short | Beam processing technologies |
| title_sort | beam processing technologies |
| topic | Electron beams fast Integrated circuits / Very large scale integration fast Ion bombardment fast Molecular beam epitaxy fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Electron beams Ion bombardment Molecular beam epitaxy |
| topic_facet | Electron beams Integrated circuits / Very large scale integration Ion bombardment Molecular beam epitaxy TECHNOLOGY & ENGINEERING / Mechanical Integrated circuits Very large scale integration |
| url | http://www.sciencedirect.com/science/bookseries/07367031/21 |
| work_keys_str_mv | AT einspruchnormang beamprocessingtechnologies AT cohensimons beamprocessingtechnologies AT singhrajn beamprocessingtechnologies |