VLSI metallization:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Orlando
Academic Press
1987
|
| Schriftenreihe: | VLSI electronics
v. 15 |
| Schlagworte: | |
| Online-Zugang: | FAW01 URL des Erstveröffentlichers |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | x, 480 pages |
| ISBN: | 0122341155 9780122341151 9781483217819 1483217817 |
Internformat
MARC
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| 008 | 170630s1987 |||| o||u| ||||||eng d | ||
| 020 | |a 0122341155 |c alk. paper |9 0-12-234115-5 | ||
| 020 | |a 9780122341151 |c alk. paper |9 978-0-12-234115-1 | ||
| 020 | |a 9781483217819 |9 978-1-4832-1781-9 | ||
| 020 | |a 1483217817 |9 1-4832-1781-7 | ||
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| 082 | 0 | |a 621.381/73 s |2 19eng | |
| 245 | 1 | 0 | |a VLSI metallization |c edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat |
| 264 | 1 | |a Orlando |b Academic Press |c 1987 | |
| 300 | |a x, 480 pages | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a VLSI electronics |v v. 15 | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a Integrated circuits / Very large scale integration / Design and construction |2 fast | |
| 650 | 7 | |a Metallic films |2 fast | |
| 650 | 7 | |a Metallizing |2 fast | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration |x Design and construction | |
| 650 | 4 | |a Metallic films | |
| 650 | 4 | |a Metallizing | |
| 700 | 1 | |a Einspruch, Norman G. |e Sonstige |0 (DE-588)1051485282 |4 oth | |
| 700 | 1 | |a Cohen, Simon S. |e Sonstige |4 oth | |
| 700 | 1 | |a Gildenblat, Gennady S. |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/bookseries/07367031/15 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
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Datensatz im Suchindex
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| dewey-full | 621.381/73S |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/73 s |
| dewey-search | 621.381/73 s |
| dewey-sort | 3621.381 273 S |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV044387675 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:51:33Z |
| institution | BVB |
| isbn | 0122341155 9780122341151 9781483217819 1483217817 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029789896 |
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| physical | x, 480 pages |
| psigel | ZDB-33-ESD ZDB-33-ESD FAW_PDA_ESD |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Academic Press |
| record_format | marc |
| series2 | VLSI electronics |
| spelling | VLSI metallization edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat Orlando Academic Press 1987 x, 480 pages txt rdacontent c rdamedia cr rdacarrier VLSI electronics v. 15 Includes bibliographical references and index Integrated circuits / Very large scale integration / Design and construction fast Metallic films fast Metallizing fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Design and construction Metallic films Metallizing Einspruch, Norman G. Sonstige (DE-588)1051485282 oth Cohen, Simon S. Sonstige oth Gildenblat, Gennady S. Sonstige oth http://www.sciencedirect.com/science/bookseries/07367031/15 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | VLSI metallization Integrated circuits / Very large scale integration / Design and construction fast Metallic films fast Metallizing fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Design and construction Metallic films Metallizing |
| title | VLSI metallization |
| title_auth | VLSI metallization |
| title_exact_search | VLSI metallization |
| title_full | VLSI metallization edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat |
| title_fullStr | VLSI metallization edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat |
| title_full_unstemmed | VLSI metallization edited by Norman G. Einspruch, Simon S. Cohen, Gennady Sh. Gildenblat |
| title_short | VLSI metallization |
| title_sort | vlsi metallization |
| topic | Integrated circuits / Very large scale integration / Design and construction fast Metallic films fast Metallizing fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits Very large scale integration Design and construction Metallic films Metallizing |
| topic_facet | Integrated circuits / Very large scale integration / Design and construction Metallic films Metallizing TECHNOLOGY & ENGINEERING / Mechanical Integrated circuits Very large scale integration Design and construction |
| url | http://www.sciencedirect.com/science/bookseries/07367031/15 |
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