Developments in surface contamination and cleaning: fundamentals and applied aspects
Gespeichert in:
Format: | Elektronisch E-Book |
---|---|
Sprache: | English |
Veröffentlicht: |
Norwich, NY
W. Andrew Pub.
© 2008
|
Schlagworte: | |
Online-Zugang: | FAW01 FUBA1 FLA01 Volltext |
Beschreibung: | Includes bibliographical references and index Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are ̥killer defects̲ today, with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced and profusely illustrated." Excellent reference for a host of technologies and industries ranging from microelectronics to optics to automotive to biomedical." A single source document addressing everything from the sources of contamination to their removal and prevention." Amply referenced and profusely illustrated |
Beschreibung: | 1 Online-Ressource |
ISBN: | 9780815516859 0815516851 9780815515555 0815515553 |
Internformat
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245 | 1 | 0 | |a Developments in surface contamination and cleaning |b fundamentals and applied aspects |c edited by Rajiv Kohli and K.L. Mittal |
264 | 1 | |a Norwich, NY |b W. Andrew Pub. |c © 2008 | |
300 | |a 1 Online-Ressource | ||
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337 | |b c |2 rdamedia | ||
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500 | |a Includes bibliographical references and index | ||
500 | |a Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are ̥killer defects̲ today, with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced and profusely illustrated." Excellent reference for a host of technologies and industries ranging from microelectronics to optics to automotive to biomedical." A single source document addressing everything from the sources of contamination to their removal and prevention." Amply referenced and profusely illustrated | ||
650 | 4 | |a Surfaces (Technologie) / Analyse | |
650 | 4 | |a Surfaces (Technologie) / Inspection | |
650 | 4 | |a Contamination de surface | |
650 | 4 | |a Nettoyage | |
650 | 4 | |a Traitement de surface | |
650 | 7 | |a TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. |2 bisacsh | |
650 | 4 | |a Surfaces (Technology) |x Inspection | |
650 | 4 | |a Surface contamination |x Prevention | |
650 | 4 | |a Particles |x Measurement | |
650 | 4 | |a Cleaning | |
650 | 4 | |a Coatings | |
650 | 4 | |a Dust control | |
650 | 0 | 7 | |a Teilchen |0 (DE-588)4059317-4 |2 gnd |9 rswk-swf |
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650 | 0 | 7 | |a Reinigungsverfahren |0 (DE-588)4391913-3 |2 gnd |9 rswk-swf |
655 | 7 | |8 1\p |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Oberfläche |0 (DE-588)4042907-6 |D s |
689 | 0 | 1 | |a Beschichtung |0 (DE-588)4144863-7 |D s |
689 | 0 | 2 | |a Kontamination |0 (DE-588)4032272-5 |D s |
689 | 0 | 3 | |a Reinigungsverfahren |0 (DE-588)4391913-3 |D s |
689 | 0 | 4 | |a Teilchen |0 (DE-588)4059317-4 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Kohli, Rajiv |d 1947- |e Sonstige |0 (DE-588)1127666622 |4 oth | |
700 | 1 | |a Mittal, K. L. |d 1945- |e Sonstige |0 (DE-588)139321454 |4 oth | |
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Datensatz im Suchindex
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any_adam_object | |
author_GND | (DE-588)1127666622 (DE-588)139321454 |
building | Verbundindex |
bvnumber | BV044384096 |
collection | ZDB-33-ESD ZDB-33-EBS |
ctrlnum | (ZDB-33-ESD)ocn244205335 (OCoLC)244205335 (DE-599)BVBBV044384096 |
dewey-full | 620.44 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.44 |
dewey-search | 620.44 |
dewey-sort | 3620.44 |
dewey-tens | 620 - Engineering and allied operations |
format | Electronic eBook |
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genre_facet | Aufsatzsammlung |
id | DE-604.BV044384096 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T07:51:26Z |
institution | BVB |
isbn | 9780815516859 0815516851 9780815515555 0815515553 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029786317 |
oclc_num | 244205335 |
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physical | 1 Online-Ressource |
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publishDate | 2008 |
publishDateSearch | 2008 |
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publisher | W. Andrew Pub. |
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spelling | Developments in surface contamination and cleaning fundamentals and applied aspects edited by Rajiv Kohli and K.L. Mittal Norwich, NY W. Andrew Pub. © 2008 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are ̥killer defects̲ today, with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced and profusely illustrated." Excellent reference for a host of technologies and industries ranging from microelectronics to optics to automotive to biomedical." A single source document addressing everything from the sources of contamination to their removal and prevention." Amply referenced and profusely illustrated Surfaces (Technologie) / Analyse Surfaces (Technologie) / Inspection Contamination de surface Nettoyage Traitement de surface TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Surfaces (Technology) Inspection Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control Teilchen (DE-588)4059317-4 gnd rswk-swf Beschichtung (DE-588)4144863-7 gnd rswk-swf Kontamination (DE-588)4032272-5 gnd rswk-swf Oberfläche (DE-588)4042907-6 gnd rswk-swf Reinigungsverfahren (DE-588)4391913-3 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Oberfläche (DE-588)4042907-6 s Beschichtung (DE-588)4144863-7 s Kontamination (DE-588)4032272-5 s Reinigungsverfahren (DE-588)4391913-3 s Teilchen (DE-588)4059317-4 s DE-604 Kohli, Rajiv 1947- Sonstige (DE-588)1127666622 oth Mittal, K. L. 1945- Sonstige (DE-588)139321454 oth http://www.sciencedirect.com/science/book/9780815515555 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Developments in surface contamination and cleaning fundamentals and applied aspects Surfaces (Technologie) / Analyse Surfaces (Technologie) / Inspection Contamination de surface Nettoyage Traitement de surface TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Surfaces (Technology) Inspection Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control Teilchen (DE-588)4059317-4 gnd Beschichtung (DE-588)4144863-7 gnd Kontamination (DE-588)4032272-5 gnd Oberfläche (DE-588)4042907-6 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
subject_GND | (DE-588)4059317-4 (DE-588)4144863-7 (DE-588)4032272-5 (DE-588)4042907-6 (DE-588)4391913-3 (DE-588)4143413-4 |
title | Developments in surface contamination and cleaning fundamentals and applied aspects |
title_auth | Developments in surface contamination and cleaning fundamentals and applied aspects |
title_exact_search | Developments in surface contamination and cleaning fundamentals and applied aspects |
title_full | Developments in surface contamination and cleaning fundamentals and applied aspects edited by Rajiv Kohli and K.L. Mittal |
title_fullStr | Developments in surface contamination and cleaning fundamentals and applied aspects edited by Rajiv Kohli and K.L. Mittal |
title_full_unstemmed | Developments in surface contamination and cleaning fundamentals and applied aspects edited by Rajiv Kohli and K.L. Mittal |
title_short | Developments in surface contamination and cleaning |
title_sort | developments in surface contamination and cleaning fundamentals and applied aspects |
title_sub | fundamentals and applied aspects |
topic | Surfaces (Technologie) / Analyse Surfaces (Technologie) / Inspection Contamination de surface Nettoyage Traitement de surface TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Surfaces (Technology) Inspection Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control Teilchen (DE-588)4059317-4 gnd Beschichtung (DE-588)4144863-7 gnd Kontamination (DE-588)4032272-5 gnd Oberfläche (DE-588)4042907-6 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
topic_facet | Surfaces (Technologie) / Analyse Surfaces (Technologie) / Inspection Contamination de surface Nettoyage Traitement de surface TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Surfaces (Technology) Inspection Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control Teilchen Beschichtung Kontamination Oberfläche Reinigungsverfahren Aufsatzsammlung |
url | http://www.sciencedirect.com/science/book/9780815515555 |
work_keys_str_mv | AT kohlirajiv developmentsinsurfacecontaminationandcleaningfundamentalsandappliedaspects AT mittalkl developmentsinsurfacecontaminationandcleaningfundamentalsandappliedaspects |