Comprehensive microsystems:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Amsterdam
Elsevier
©2008
|
| Subjects: | |
| Item Description: | Includes bibliographical references and index Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications |
| Physical Description: | 3 volumes |
| ISBN: | 9780444521903 0444521909 9780444521941 0444521941 |
Staff View
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| dewey-tens | 620 - Engineering and allied operations |
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| isbn | 9780444521903 0444521909 9780444521941 0444521941 |
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| physical | 3 volumes |
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| publishDate | 2008 |
| publishDateSearch | 2008 |
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| publisher | Elsevier |
| record_format | marc |
| spelling | Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe Amsterdam Elsevier ©2008 3 volumes txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications Microelectromechanical systems fast Microelectromechanical systems MEMS (DE-588)4824724-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf 1\p (DE-588)4066724-8 Wörterbuch gnd-content MEMS (DE-588)4824724-8 s 2\p DE-604 Mikrosystemtechnik (DE-588)4221617-5 s 3\p DE-604 Gianchandani, Yogesh B. Sonstige oth Tabata, Osamu Sonstige oth Zappe, Hans P. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Comprehensive microsystems Microelectromechanical systems fast Microelectromechanical systems MEMS (DE-588)4824724-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4221617-5 (DE-588)4066724-8 |
| title | Comprehensive microsystems |
| title_auth | Comprehensive microsystems |
| title_exact_search | Comprehensive microsystems |
| title_full | Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe |
| title_fullStr | Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe |
| title_full_unstemmed | Comprehensive microsystems editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe |
| title_short | Comprehensive microsystems |
| title_sort | comprehensive microsystems |
| topic | Microelectromechanical systems fast Microelectromechanical systems MEMS (DE-588)4824724-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Microelectromechanical systems MEMS Mikrosystemtechnik Wörterbuch |
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