International Symposium on Sputtering and Plasma Processes Kyoto. (2016). Papers from the 13th International Symposium on Sputtering and Plasma Processes. American Institute of Physics.
Chicago-Zitierstil (17. Ausg.)International Symposium on Sputtering and Plasma Processes Kyoto. Papers from the 13th International Symposium on Sputtering and Plasma Processes. New York: American Institute of Physics, 2016.
MLA-Zitierstil (9. Ausg.)International Symposium on Sputtering and Plasma Processes Kyoto. Papers from the 13th International Symposium on Sputtering and Plasma Processes. American Institute of Physics, 2016.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.