Papers from the 13th International Symposium on Sputtering and Plasma Processes:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
2016
|
| Schriftenreihe: | Journal of vacuum science & technology
Volume 34, Number 2 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschriftenheftes |
| Beschreibung: | Seiten 020601-1 - 02D108-4 Illustrationen |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV044271997 | ||
| 003 | DE-604 | ||
| 005 | 20170426 | ||
| 007 | t | ||
| 008 | 170413s2016 a||| |||| 10||| eng d | ||
| 035 | |a (OCoLC)992531790 | ||
| 035 | |a (DE-599)BVBBV044271997 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 111 | 2 | |a International Symposium on Sputtering and Plasma Processes |n 13. |d 2015 |c Kyoto |j Verfasser |0 (DE-588)1129877132 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| 264 | 1 | |a New York |b American Institute of Physics |c 2016 | |
| 300 | |a Seiten 020601-1 - 02D108-4 |b Illustrationen | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology |v Volume 34, Number 2 | |
| 500 | |a Einzelaufnahme eines Zeitschriftenheftes | ||
| 650 | 0 | 7 | |a Plasmaphysik |0 (DE-588)4046259-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | 1 | |a Plasmaphysik |0 (DE-588)4046259-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029676586 | ||
Datensatz im Suchindex
| _version_ | 1804177456424288256 |
|---|---|
| any_adam_object | |
| author_corporate | International Symposium on Sputtering and Plasma Processes Kyoto |
| author_corporate_role | aut |
| author_facet | International Symposium on Sputtering and Plasma Processes Kyoto |
| author_sort | International Symposium on Sputtering and Plasma Processes Kyoto |
| building | Verbundindex |
| bvnumber | BV044271997 |
| ctrlnum | (OCoLC)992531790 (DE-599)BVBBV044271997 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01309nam a2200349 cb4500</leader><controlfield tag="001">BV044271997</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170426 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">170413s2016 a||| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)992531790</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044271997</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Symposium on Sputtering and Plasma Processes</subfield><subfield code="n">13.</subfield><subfield code="d">2015</subfield><subfield code="c">Kyoto</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)1129877132</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 13th International Symposium on Sputtering and Plasma Processes</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Institute of Physics</subfield><subfield code="c">2016</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Seiten 020601-1 - 02D108-4</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology</subfield><subfield code="v">Volume 34, Number 2</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschriftenheftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Plasmaphysik</subfield><subfield code="0">(DE-588)4046259-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029676586</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Aufsatzsammlung Konferenzschrift |
| id | DE-604.BV044271997 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:48:22Z |
| institution | BVB |
| institution_GND | (DE-588)1129877132 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029676586 |
| oclc_num | 992531790 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | Seiten 020601-1 - 02D108-4 Illustrationen |
| publishDate | 2016 |
| publishDateSearch | 2016 |
| publishDateSort | 2016 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology |
| spelling | International Symposium on Sputtering and Plasma Processes 13. 2015 Kyoto Verfasser (DE-588)1129877132 aut Papers from the 13th International Symposium on Sputtering and Plasma Processes New York American Institute of Physics 2016 Seiten 020601-1 - 02D108-4 Illustrationen txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology Volume 34, Number 2 Einzelaufnahme eines Zeitschriftenheftes Plasmaphysik (DE-588)4046259-6 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content (DE-588)1071861417 Konferenzschrift gnd-content Sputtern (DE-588)4182614-0 s Plasmaphysik (DE-588)4046259-6 s DE-604 |
| spellingShingle | Papers from the 13th International Symposium on Sputtering and Plasma Processes Plasmaphysik (DE-588)4046259-6 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)4182614-0 (DE-588)4143413-4 (DE-588)1071861417 |
| title | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_auth | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_exact_search | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_full | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_fullStr | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_full_unstemmed | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_short | Papers from the 13th International Symposium on Sputtering and Plasma Processes |
| title_sort | papers from the 13th international symposium on sputtering and plasma processes |
| topic | Plasmaphysik (DE-588)4046259-6 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Plasmaphysik Sputtern Aufsatzsammlung Konferenzschrift |
| work_keys_str_mv | AT internationalsymposiumonsputteringandplasmaprocesseskyoto papersfromthe13thinternationalsymposiumonsputteringandplasmaprocesses |