Special issue on atomic layer deposition, atomic layer etching:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
American Institute of Physics
2016
|
| Schriftenreihe: | Journal of vacuum science & technology
Volume 34, Number 1 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschriftenheftes |
| Beschreibung: | Seiten A13 - 01B103-9 Illustrationen |
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| id | DE-604.BV044271990 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:48:22Z |
| institution | BVB |
| language | English |
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| physical | Seiten A13 - 01B103-9 Illustrationen |
| publishDate | 2016 |
| publishDateSearch | 2016 |
| publishDateSort | 2016 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology |
| spelling | Special issue on atomic layer deposition, atomic layer etching New York American Institute of Physics 2016 Seiten A13 - 01B103-9 Illustrationen txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology Volume 34, Number 1 Einzelaufnahme eines Zeitschriftenheftes Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Atomlagenabscheidung (DE-588)7712127-2 s DE-604 |
| spellingShingle | Special issue on atomic layer deposition, atomic layer etching Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)7712127-2 (DE-588)4143413-4 |
| title | Special issue on atomic layer deposition, atomic layer etching |
| title_auth | Special issue on atomic layer deposition, atomic layer etching |
| title_exact_search | Special issue on atomic layer deposition, atomic layer etching |
| title_full | Special issue on atomic layer deposition, atomic layer etching |
| title_fullStr | Special issue on atomic layer deposition, atomic layer etching |
| title_full_unstemmed | Special issue on atomic layer deposition, atomic layer etching |
| title_short | Special issue on atomic layer deposition, atomic layer etching |
| title_sort | special issue on atomic layer deposition atomic layer etching |
| topic | Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Atomlagenabscheidung Aufsatzsammlung |