Wong, A. K. (2001). Resolution enhancement techniques in optical lithography. SPIE. https://doi.org/10.1117/3.401208
Chicago Style (17th ed.) CitationWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. Bellingham, Wash: SPIE, 2001. https://doi.org/10.1117/3.401208.
MLA (9th ed.) CitationWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2001. https://doi.org/10.1117/3.401208.
Warning: These citations may not always be 100% accurate.