APA (7th ed.) Citation

Levinson, H. J. (1999). Lithography process control. SPIE. https://doi.org/10.1117/3.322162

Chicago Style (17th ed.) Citation

Levinson, Harry J. Lithography Process Control. Bellingham, Wash: SPIE, 1999. https://doi.org/10.1117/3.322162.

MLA (9th ed.) Citation

Levinson, Harry J. Lithography Process Control. SPIE, 1999. https://doi.org/10.1117/3.322162.