APA (7th ed.) Citation

Levinson, H. J. (2005). Principles of lithography (2nd edition.). SPIE. https://doi.org/10.1117/3.601520

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. 2nd edition. Bellingham, Wash: SPIE, 2005. https://doi.org/10.1117/3.601520.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. 2nd edition. SPIE, 2005. https://doi.org/10.1117/3.601520.

Warning: These citations may not always be 100% accurate.