Principles of lithography:
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken p...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
2005
|
| Ausgabe: | 2nd edition |
| Schriftenreihe: | SPIE Press monograph
PM146 |
| Schlagworte: | |
| Online-Zugang: | FHD01 Volltext |
| Zusammenfassung: | Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus |
| Beschreibung: | 1 online resource (xii, 423 pages) illustrations |
| ISBN: | 9780819478832 |
| DOI: | 10.1117/3.601520 |
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| 520 | |a Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus | ||
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Datensatz im Suchindex
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| any_adam_object | |
| author | Levinson, Harry J. |
| author_facet | Levinson, Harry J. |
| author_role | aut |
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| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1117/3.601520 |
| edition | 2nd edition |
| format | Electronic eBook |
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| id | DE-604.BV044221263 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:46:59Z |
| institution | BVB |
| isbn | 9780819478832 |
| language | English |
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| oclc_num | 812322470 |
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| owner | DE-1050 |
| owner_facet | DE-1050 |
| physical | 1 online resource (xii, 423 pages) illustrations |
| psigel | ZDB-50-SPI |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | SPIE |
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| series2 | SPIE Press monograph |
| spelling | Levinson, Harry J. Verfasser aut Principles of lithography Harry J. Levinson 2nd edition Bellingham, Wash. SPIE 2005 1 online resource (xii, 423 pages) illustrations txt rdacontent c rdamedia cr rdacarrier SPIE Press monograph PM146 Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus Microlithography Integrated circuits / Design and construction Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s 1\p DE-604 Erscheint auch als Druck-Ausgabe 978-0-8194-5660-1 https://doi.org/10.1117/3.601520 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Levinson, Harry J. Principles of lithography Microlithography Integrated circuits / Design and construction Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 |
| title | Principles of lithography |
| title_auth | Principles of lithography |
| title_exact_search | Principles of lithography |
| title_full | Principles of lithography Harry J. Levinson |
| title_fullStr | Principles of lithography Harry J. Levinson |
| title_full_unstemmed | Principles of lithography Harry J. Levinson |
| title_short | Principles of lithography |
| title_sort | principles of lithography |
| topic | Microlithography Integrated circuits / Design and construction Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Microlithography Integrated circuits / Design and construction Lithografie Halbleitertechnologie |
| url | https://doi.org/10.1117/3.601520 |
| work_keys_str_mv | AT levinsonharryj principlesoflithography |