Optical scattering: measurement and analysis
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentat...
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
[1995]
|
| Edition: | 2nd ed |
| Series: | SPIE Press monograph
PM24 |
| Subjects: | |
| Online Access: | FHD01 Volltext |
| Summary: | As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable |
| Physical Description: | 1 online resource (xiii, 321 pages) illustrations |
| ISBN: | 9780819478443 |
| DOI: | 10.1117/3.203079 |
Staff View
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| id | DE-604.BV044218355 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:46:54Z |
| institution | BVB |
| isbn | 9780819478443 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029624394 |
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| physical | 1 online resource (xiii, 321 pages) illustrations |
| psigel | ZDB-50-SPI |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | SPIE |
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| series2 | SPIE Press monograph |
| spelling | Stover, John C. Verfasser aut Optical scattering measurement and analysis John C. Stover 2nd ed Bellingham, Wash. SPIE [1995] 1 online resource (xiii, 321 pages) illustrations txt rdacontent c rdamedia cr rdacarrier SPIE Press monograph PM24 As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable Light / Scattering Lichtstreuung (DE-588)4167602-6 gnd rswk-swf Lichtstreuung (DE-588)4167602-6 s 1\p DE-604 Erscheint auch als Druck-Ausgabe 978-0-8194-7776-7 https://doi.org/10.1117/3.203079 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Stover, John C. Optical scattering measurement and analysis Light / Scattering Lichtstreuung (DE-588)4167602-6 gnd |
| subject_GND | (DE-588)4167602-6 |
| title | Optical scattering measurement and analysis |
| title_auth | Optical scattering measurement and analysis |
| title_exact_search | Optical scattering measurement and analysis |
| title_full | Optical scattering measurement and analysis John C. Stover |
| title_fullStr | Optical scattering measurement and analysis John C. Stover |
| title_full_unstemmed | Optical scattering measurement and analysis John C. Stover |
| title_short | Optical scattering |
| title_sort | optical scattering measurement and analysis |
| title_sub | measurement and analysis |
| topic | Light / Scattering Lichtstreuung (DE-588)4167602-6 gnd |
| topic_facet | Light / Scattering Lichtstreuung |
| url | https://doi.org/10.1117/3.203079 |
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