Optical scattering: measurement and analysis

As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentat...

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Bibliographische Detailangaben
1. Verfasser: Stover, John C. (VerfasserIn)
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Bellingham, Wash. SPIE [1995]
Ausgabe:2nd ed
Schriftenreihe:SPIE Press monograph PM24
Schlagworte:
Online-Zugang:FHD01
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Zusammenfassung:As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable
Beschreibung:1 online resource (xiii, 321 pages) illustrations
ISBN:9780819478443
DOI:10.1117/3.203079

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