Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Cham
Springer International Publishing
2017
|
| Series: | SpringerBriefs in Materials
|
| Subjects: | |
| Online Access: | BTU01 TUM01 Volltext |
| Physical Description: | 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) |
| ISBN: | 9783319246727 |
| ISSN: | 2192-1091 |
| DOI: | 10.1007/978-3-319-24672-7 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV044206926 | ||
| 003 | DE-604 | ||
| 005 | 20170315 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170302s2017 |||| o||u| ||||||eng d | ||
| 020 | |a 9783319246727 |c Online |9 978-3-319-24672-7 | ||
| 024 | 7 | |a 10.1007/978-3-319-24672-7 |2 doi | |
| 035 | |a (OCoLC)968223445 | ||
| 035 | |a (DE-599)BVBBV044206926 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-634 |a DE-91 |a DE-188 | ||
| 082 | 0 | |a 620.44 |2 23 | |
| 084 | |a CHE 000 |2 stub | ||
| 100 | 1 | |a Yanguas-Gil, Angel |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Growth and Transport in Nanostructured Materials |b Reactive Transport in PVD, CVD, and ALD |c by Angel Yanguas-Gil |
| 264 | 1 | |a Cham |b Springer International Publishing |c 2017 | |
| 300 | |a 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a SpringerBriefs in Materials |x 2192-1091 | |
| 650 | 4 | |a Materials science | |
| 650 | 4 | |a Energy storage | |
| 650 | 4 | |a Nanochemistry | |
| 650 | 4 | |a Semiconductors | |
| 650 | 4 | |a Surfaces (Physics) | |
| 650 | 4 | |a Interfaces (Physical sciences) | |
| 650 | 4 | |a Thin films | |
| 650 | 4 | |a Materials / Surfaces | |
| 650 | 4 | |a Materials Science | |
| 650 | 4 | |a Surfaces and Interfaces, Thin Films | |
| 650 | 4 | |a Surface and Interface Science, Thin Films | |
| 650 | 4 | |a Energy Storage | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 9783319246703 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-319-24672-7 |x Verlag |3 Volltext |
| 912 | |a ZDB-2-CMS | ||
| 940 | 1 | |q ZDB-2-CMS_2017 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029613320 | ||
| 966 | e | |u https://doi.org/10.1007/978-3-319-24672-7 |l BTU01 |p ZDB-2-CMS |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-319-24672-7 |l TUM01 |p ZDB-2-CMS |x Verlag |3 Volltext | |
Record in the Search Index
| _version_ | 1804177346177007616 |
|---|---|
| any_adam_object | |
| author | Yanguas-Gil, Angel |
| author_facet | Yanguas-Gil, Angel |
| author_role | aut |
| author_sort | Yanguas-Gil, Angel |
| author_variant | a y g ayg |
| building | Verbundindex |
| bvnumber | BV044206926 |
| classification_tum | CHE 000 |
| collection | ZDB-2-CMS |
| ctrlnum | (OCoLC)968223445 (DE-599)BVBBV044206926 |
| dewey-full | 620.44 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.44 |
| dewey-search | 620.44 |
| dewey-sort | 3620.44 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie |
| doi_str_mv | 10.1007/978-3-319-24672-7 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01854nmm a2200517zc 4500</leader><controlfield tag="001">BV044206926</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170315 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170302s2017 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783319246727</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-319-24672-7</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-319-24672-7</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)968223445</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044206926</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.44</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">CHE 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Yanguas-Gil, Angel</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Growth and Transport in Nanostructured Materials</subfield><subfield code="b">Reactive Transport in PVD, CVD, and ALD</subfield><subfield code="c">by Angel Yanguas-Gil</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cham</subfield><subfield code="b">Springer International Publishing</subfield><subfield code="c">2017</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">SpringerBriefs in Materials</subfield><subfield code="x">2192-1091</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials science</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Energy storage</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanochemistry</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces (Physics)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Interfaces (Physical sciences)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials / Surfaces</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials Science</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces and Interfaces, Thin Films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surface and Interface Science, Thin Films</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Energy Storage</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">9783319246703</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-319-24672-7</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-CMS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-CMS_2017</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029613320</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-319-24672-7</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-319-24672-7</subfield><subfield code="l">TUM01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV044206926 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:46:37Z |
| institution | BVB |
| isbn | 9783319246727 |
| issn | 2192-1091 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029613320 |
| oclc_num | 968223445 |
| open_access_boolean | |
| owner | DE-634 DE-91 DE-BY-TUM DE-188 |
| owner_facet | DE-634 DE-91 DE-BY-TUM DE-188 |
| physical | 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) |
| psigel | ZDB-2-CMS ZDB-2-CMS_2017 |
| publishDate | 2017 |
| publishDateSearch | 2017 |
| publishDateSort | 2017 |
| publisher | Springer International Publishing |
| record_format | marc |
| series2 | SpringerBriefs in Materials |
| spelling | Yanguas-Gil, Angel Verfasser aut Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil Cham Springer International Publishing 2017 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) txt rdacontent c rdamedia cr rdacarrier SpringerBriefs in Materials 2192-1091 Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage Erscheint auch als Druck-Ausgabe 9783319246703 https://doi.org/10.1007/978-3-319-24672-7 Verlag Volltext |
| spellingShingle | Yanguas-Gil, Angel Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage |
| title | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD |
| title_auth | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD |
| title_exact_search | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD |
| title_full | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil |
| title_fullStr | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil |
| title_full_unstemmed | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil |
| title_short | Growth and Transport in Nanostructured Materials |
| title_sort | growth and transport in nanostructured materials reactive transport in pvd cvd and ald |
| title_sub | Reactive Transport in PVD, CVD, and ALD |
| topic | Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage |
| topic_facet | Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage |
| url | https://doi.org/10.1007/978-3-319-24672-7 |
| work_keys_str_mv | AT yanguasgilangel growthandtransportinnanostructuredmaterialsreactivetransportinpvdcvdandald |