Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer International Publishing
2017
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| Schriftenreihe: | SpringerBriefs in Materials
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| Schlagworte: | |
| Online-Zugang: | BTU01 TUM01 Volltext |
| Beschreibung: | 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) |
| ISBN: | 9783319246727 |
| ISSN: | 2192-1091 |
| DOI: | 10.1007/978-3-319-24672-7 |
Internformat
MARC
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| 245 | 1 | 0 | |a Growth and Transport in Nanostructured Materials |b Reactive Transport in PVD, CVD, and ALD |c by Angel Yanguas-Gil |
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Datensatz im Suchindex
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| author | Yanguas-Gil, Angel |
| author_facet | Yanguas-Gil, Angel |
| author_role | aut |
| author_sort | Yanguas-Gil, Angel |
| author_variant | a y g ayg |
| building | Verbundindex |
| bvnumber | BV044206926 |
| classification_tum | CHE 000 |
| collection | ZDB-2-CMS |
| ctrlnum | (OCoLC)968223445 (DE-599)BVBBV044206926 |
| dewey-full | 620.44 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.44 |
| dewey-search | 620.44 |
| dewey-sort | 3620.44 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie |
| doi_str_mv | 10.1007/978-3-319-24672-7 |
| format | Electronic eBook |
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| id | DE-604.BV044206926 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:46:37Z |
| institution | BVB |
| isbn | 9783319246727 |
| issn | 2192-1091 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029613320 |
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| owner_facet | DE-634 DE-91 DE-BY-TUM DE-188 |
| physical | 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) |
| psigel | ZDB-2-CMS ZDB-2-CMS_2017 |
| publishDate | 2017 |
| publishDateSearch | 2017 |
| publishDateSort | 2017 |
| publisher | Springer International Publishing |
| record_format | marc |
| series2 | SpringerBriefs in Materials |
| spelling | Yanguas-Gil, Angel Verfasser aut Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil Cham Springer International Publishing 2017 1 Online-Ressource (XI, 128 p. 57 illus., 20 illus. in color) txt rdacontent c rdamedia cr rdacarrier SpringerBriefs in Materials 2192-1091 Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage Erscheint auch als Druck-Ausgabe 9783319246703 https://doi.org/10.1007/978-3-319-24672-7 Verlag Volltext |
| spellingShingle | Yanguas-Gil, Angel Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage |
| title | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD |
| title_auth | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD |
| title_exact_search | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD |
| title_full | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil |
| title_fullStr | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil |
| title_full_unstemmed | Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD by Angel Yanguas-Gil |
| title_short | Growth and Transport in Nanostructured Materials |
| title_sort | growth and transport in nanostructured materials reactive transport in pvd cvd and ald |
| title_sub | Reactive Transport in PVD, CVD, and ALD |
| topic | Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage |
| topic_facet | Materials science Energy storage Nanochemistry Semiconductors Surfaces (Physics) Interfaces (Physical sciences) Thin films Materials / Surfaces Materials Science Surfaces and Interfaces, Thin Films Surface and Interface Science, Thin Films Energy Storage |
| url | https://doi.org/10.1007/978-3-319-24672-7 |
| work_keys_str_mv | AT yanguasgilangel growthandtransportinnanostructuredmaterialsreactivetransportinpvdcvdandald |