Silicon science and advanced micro-device engineering I: selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Stafa-Zurich
Trans Tech Publications
2011
|
| Schlagworte: | |
| Beschreibung: | Paralleltitel: ISSS 2009 Includes bibliographical references and indexes |
| Beschreibung: | xii, 282 p. |
| ISBN: | 9780878492176 9783038134817 |
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| 246 | 1 | 3 | |a Fifth International Symposium on Silicon Science |
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| spelling | International Symposium on Silicon Science < 2009, Kiryū-shi, Japan> Verfasser aut Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 ISSS 2009 AMDE 2009 Stafa-Zurich Trans Tech Publications 2011 xii, 282 p. txt rdacontent c rdamedia cr rdacarrier Paralleltitel: ISSS 2009 Includes bibliographical references and indexes Silicon Congresses Nanostructures Congresses Microelectronics Congresses (DE-588)1071861417 Konferenzschrift gnd-content Hanaizumi, Osamu Sonstige oth Unno, Masafumi Sonstige oth Gunma DaigakuXXbInternational Education and Research Center for Silicon Science Sonstige oth Gunma DaigakuXXbAdvanced Technology Research Center Sonstige oth International Conference on Advanced Micro-Device Engineering < 2009, Kiryū-shi, Japan> Sonstige oth Erscheint auch als Druck-Ausgabe, Paperback 978-0-87849-217-6 Erscheint auch als Druck-Ausgabe, Paperback 0-87849-217-8 |
| spellingShingle | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan Silicon Congresses Nanostructures Congresses Microelectronics Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| title_alt | 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 ISSS 2009 AMDE 2009 |
| title_auth | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| title_exact_search | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| title_full | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno |
| title_fullStr | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno |
| title_full_unstemmed | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno |
| title_short | Silicon science and advanced micro-device engineering I |
| title_sort | silicon science and advanced micro device engineering i selected peer reviewed papers from the 5th international symposium on silicon science and the 1st international conference on advanced micro device engineering isss amde 2009 was held by the international education and research center for silicon science and the advanced technology research center atec gunma university on 10 and 11 december 2009 in kiryu japan |
| title_sub | selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| topic | Silicon Congresses Nanostructures Congresses Microelectronics Congresses |
| topic_facet | Silicon Congresses Nanostructures Congresses Microelectronics Congresses Konferenzschrift |
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