Lithography: main techniques
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
London
ISTE
2011
|
| Subjects: | |
| Item Description: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier Includes bibliographical references and index "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
| Physical Description: | xxv, 377 p. |
| ISBN: | 9781118621233 |
Staff View
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| 500 | |a Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier | ||
| 500 | |a Includes bibliographical references and index | ||
| 500 | |a "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- | ||
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Record in the Search Index
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| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV044174047 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:45:47Z |
| institution | BVB |
| isbn | 9781118621233 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029580892 |
| oclc_num | 830161630 |
| open_access_boolean | |
| physical | xxv, 377 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | ISTE |
| record_format | marc |
| spelling | Lithography main techniques edited by Stefan Landis London ISTE 2011 xxv, 377 p. txt rdacontent c rdamedia cr rdacarrier Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier Includes bibliographical references and index "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Microlithography Landis, Stefan Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 978-1-84821-202-2 Erscheint auch als Druck-Ausgabe, Hardcover 1-84821-202-X |
| spellingShingle | Lithography main techniques Microlithography |
| title | Lithography main techniques |
| title_auth | Lithography main techniques |
| title_exact_search | Lithography main techniques |
| title_full | Lithography main techniques edited by Stefan Landis |
| title_fullStr | Lithography main techniques edited by Stefan Landis |
| title_full_unstemmed | Lithography main techniques edited by Stefan Landis |
| title_short | Lithography |
| title_sort | lithography main techniques |
| title_sub | main techniques |
| topic | Microlithography |
| topic_facet | Microlithography |
| work_keys_str_mv | AT landisstefan lithographymaintechniques |