Lithography: main techniques
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
London
ISTE
2011
|
| Schlagworte: | |
| Beschreibung: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier Includes bibliographical references and index "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
| Beschreibung: | xxv, 377 p. |
| ISBN: | 9781118621233 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV044174047 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170217s2011 |||| o||u| ||||||eng d | ||
| 020 | |a 9781118621233 |c Online |9 978-1-118-62123-3 | ||
| 035 | |a (ZDB-30-PAD)EBC1143629 | ||
| 035 | |a (ZDB-89-EBL)EBL1143629 | ||
| 035 | |a (OCoLC)830161630 | ||
| 035 | |a (DE-599)BVBBV044174047 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 621.3815/31 |2 22 | |
| 245 | 1 | 0 | |a Lithography |b main techniques |c edited by Stefan Landis |
| 264 | 1 | |a London |b ISTE |c 2011 | |
| 300 | |a xxv, 377 p. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier | ||
| 500 | |a Includes bibliographical references and index | ||
| 500 | |a "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- | ||
| 650 | 4 | |a Microlithography | |
| 700 | 1 | |a Landis, Stefan |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe, Hardcover |z 978-1-84821-202-2 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe, Hardcover |z 1-84821-202-X |
| 912 | |a ZDB-30-PAD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029580892 | ||
Datensatz im Suchindex
| _version_ | 1804177294104723456 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV044174047 |
| collection | ZDB-30-PAD |
| ctrlnum | (ZDB-30-PAD)EBC1143629 (ZDB-89-EBL)EBL1143629 (OCoLC)830161630 (DE-599)BVBBV044174047 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01603nmm a2200361zc 4500</leader><controlfield tag="001">BV044174047</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170217s2011 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781118621233</subfield><subfield code="c">Online</subfield><subfield code="9">978-1-118-62123-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-30-PAD)EBC1143629</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-89-EBL)EBL1143629</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)830161630</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044174047</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/31</subfield><subfield code="2">22</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Lithography</subfield><subfield code="b">main techniques</subfield><subfield code="c">edited by Stefan Landis</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London</subfield><subfield code="b">ISTE</subfield><subfield code="c">2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xxv, 377 p.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Landis, Stefan</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe, Hardcover</subfield><subfield code="z">978-1-84821-202-2</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe, Hardcover</subfield><subfield code="z">1-84821-202-X</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-30-PAD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029580892</subfield></datafield></record></collection> |
| id | DE-604.BV044174047 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:45:47Z |
| institution | BVB |
| isbn | 9781118621233 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029580892 |
| oclc_num | 830161630 |
| open_access_boolean | |
| physical | xxv, 377 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | ISTE |
| record_format | marc |
| spelling | Lithography main techniques edited by Stefan Landis London ISTE 2011 xxv, 377 p. txt rdacontent c rdamedia cr rdacarrier Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier Includes bibliographical references and index "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Microlithography Landis, Stefan Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 978-1-84821-202-2 Erscheint auch als Druck-Ausgabe, Hardcover 1-84821-202-X |
| spellingShingle | Lithography main techniques Microlithography |
| title | Lithography main techniques |
| title_auth | Lithography main techniques |
| title_exact_search | Lithography main techniques |
| title_full | Lithography main techniques edited by Stefan Landis |
| title_fullStr | Lithography main techniques edited by Stefan Landis |
| title_full_unstemmed | Lithography main techniques edited by Stefan Landis |
| title_short | Lithography |
| title_sort | lithography main techniques |
| title_sub | main techniques |
| topic | Microlithography |
| topic_facet | Microlithography |
| work_keys_str_mv | AT landisstefan lithographymaintechniques |