Semiconductor strain metrology: principles and applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
[Saif Zone, Sharjah, U.A.E]
Bentham Science
[2012]
|
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 136 p. |
| ISBN: | 9781608053599 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV044167261 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170217s2012 |||| o||u| ||||||eng d | ||
| 020 | |a 9781608053599 |9 978-1-60805-359-9 | ||
| 035 | |a (ZDB-30-PAD)EBC976639 | ||
| 035 | |a (ZDB-89-EBL)EBL976639 | ||
| 035 | |a (OCoLC)806204694 | ||
| 035 | |a (DE-599)BVBBV044167261 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 621.3815 | |
| 100 | 1 | |a Wong, Terence K. S. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Semiconductor strain metrology |b principles and applications |c Terence K.S. Wong |
| 264 | 1 | |a [Saif Zone, Sharjah, U.A.E] |b Bentham Science |c [2012] | |
| 300 | |a 136 p. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Semiconductors |x Design and construction |x Materials | |
| 650 | 4 | |a Compound semiconductors |x Design and construction |x Materials | |
| 650 | 4 | |a Silicon-on-insulator technology | |
| 912 | |a ZDB-30-PAD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029574106 | ||
Record in the Search Index
| _version_ | 1804177282548367361 |
|---|---|
| any_adam_object | |
| author | Wong, Terence K. S. |
| author_facet | Wong, Terence K. S. |
| author_role | aut |
| author_sort | Wong, Terence K. S. |
| author_variant | t k s w tks tksw |
| building | Verbundindex |
| bvnumber | BV044167261 |
| collection | ZDB-30-PAD |
| ctrlnum | (ZDB-30-PAD)EBC976639 (ZDB-89-EBL)EBL976639 (OCoLC)806204694 (DE-599)BVBBV044167261 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01117nmm a2200337zc 4500</leader><controlfield tag="001">BV044167261</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170217s2012 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781608053599</subfield><subfield code="9">978-1-60805-359-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-30-PAD)EBC976639</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-89-EBL)EBL976639</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)806204694</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044167261</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Wong, Terence K. S.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Semiconductor strain metrology</subfield><subfield code="b">principles and applications</subfield><subfield code="c">Terence K.S. Wong</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">[Saif Zone, Sharjah, U.A.E]</subfield><subfield code="b">Bentham Science</subfield><subfield code="c">[2012]</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">136 p.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Compound semiconductors</subfield><subfield code="x">Design and construction</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon-on-insulator technology</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-30-PAD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029574106</subfield></datafield></record></collection> |
| id | DE-604.BV044167261 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:45:36Z |
| institution | BVB |
| isbn | 9781608053599 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029574106 |
| oclc_num | 806204694 |
| open_access_boolean | |
| physical | 136 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Bentham Science |
| record_format | marc |
| spelling | Wong, Terence K. S. Verfasser aut Semiconductor strain metrology principles and applications Terence K.S. Wong [Saif Zone, Sharjah, U.A.E] Bentham Science [2012] 136 p. txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| spellingShingle | Wong, Terence K. S. Semiconductor strain metrology principles and applications Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| title | Semiconductor strain metrology principles and applications |
| title_auth | Semiconductor strain metrology principles and applications |
| title_exact_search | Semiconductor strain metrology principles and applications |
| title_full | Semiconductor strain metrology principles and applications Terence K.S. Wong |
| title_fullStr | Semiconductor strain metrology principles and applications Terence K.S. Wong |
| title_full_unstemmed | Semiconductor strain metrology principles and applications Terence K.S. Wong |
| title_short | Semiconductor strain metrology |
| title_sort | semiconductor strain metrology principles and applications |
| title_sub | principles and applications |
| topic | Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| topic_facet | Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| work_keys_str_mv | AT wongterenceks semiconductorstrainmetrologyprinciplesandapplications |