Reliability of MEMS: testing of materials and devices
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2013
|
| Schriftenreihe: | Advanced micro & nanosystems
|
| Schlagworte: | |
| Beschreibung: | First edition 2007 Includes bibliographical references and index |
| Beschreibung: | xx, 303 p. |
| ISBN: | 9783527335015 |
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| id | DE-604.BV044141837 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:44:54Z |
| institution | BVB |
| isbn | 9783527335015 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029548682 |
| oclc_num | 264717029 |
| open_access_boolean | |
| physical | xx, 303 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley-VCH |
| record_format | marc |
| series2 | Advanced micro & nanosystems |
| spelling | Reliability of MEMS testing of materials and devices edited by Osamu Tabata, Toshiyuki Tsuchiya Weinheim Wiley-VCH 2013 xx, 303 p. txt rdacontent c rdamedia cr rdacarrier Advanced micro & nanosystems First edition 2007 Includes bibliographical references and index Microelectromechanical systems Reliability Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s 1\p DE-604 Mikrosystemtechnik (DE-588)4221617-5 s 2\p DE-604 Tabata, Osamu Sonstige oth Tsuchiya, Toshiyuki Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Reliability of MEMS testing of materials and devices Microelectromechanical systems Reliability Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4327470-5 |
| title | Reliability of MEMS testing of materials and devices |
| title_auth | Reliability of MEMS testing of materials and devices |
| title_exact_search | Reliability of MEMS testing of materials and devices |
| title_full | Reliability of MEMS testing of materials and devices edited by Osamu Tabata, Toshiyuki Tsuchiya |
| title_fullStr | Reliability of MEMS testing of materials and devices edited by Osamu Tabata, Toshiyuki Tsuchiya |
| title_full_unstemmed | Reliability of MEMS testing of materials and devices edited by Osamu Tabata, Toshiyuki Tsuchiya |
| title_short | Reliability of MEMS |
| title_sort | reliability of mems testing of materials and devices |
| title_sub | testing of materials and devices |
| topic | Microelectromechanical systems Reliability Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Microelectromechanical systems Reliability Mikrosystemtechnik Nanotechnologie |
| work_keys_str_mv | AT tabataosamu reliabilityofmemstestingofmaterialsanddevices AT tsuchiyatoshiyuki reliabilityofmemstestingofmaterialsanddevices |