Plasma processing and processing science:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Washington, D.C.
National Academy Press
1995
|
| Series: | NRL strategic series
|
| Subjects: | |
| Item Description: | Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 |
| Physical Description: | x, 35 p |
| ISBN: | 0309575168 |
Staff View
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| 650 | 4 | |a Plasma engineering | |
| 650 | 4 | |a Semiconductors |x Etching | |
| 650 | 4 | |a Plasma etching | |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
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| id | DE-604.BV044108030 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:43:52Z |
| institution | BVB |
| isbn | 0309575168 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029514875 |
| oclc_num | 58567010 |
| open_access_boolean | |
| physical | x, 35 p |
| psigel | ZDB-30-PAD |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | National Academy Press |
| record_format | marc |
| series2 | NRL strategic series |
| spelling | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council Washington, D.C. National Academy Press 1995 x, 35 p txt rdacontent c rdamedia cr rdacarrier NRL strategic series Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 Plasma engineering Semiconductors Etching Plasma etching Chen, Francis F. 1929- Sonstige (DE-588)17201932X oth National Research Council (U.S.)XXbPanel on Plasma Processing Sonstige oth National Research Council (U.S.)XXbNaval Studies Board Sonstige oth National Research Council (U.S.)XXbCommission on Physical Sciences, Mathematics, and Applications Sonstige oth |
| spellingShingle | Plasma processing and processing science Plasma engineering Semiconductors Etching Plasma etching |
| title | Plasma processing and processing science |
| title_auth | Plasma processing and processing science |
| title_exact_search | Plasma processing and processing science |
| title_full | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_fullStr | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_full_unstemmed | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_short | Plasma processing and processing science |
| title_sort | plasma processing and processing science |
| topic | Plasma engineering Semiconductors Etching Plasma etching |
| topic_facet | Plasma engineering Semiconductors Etching Plasma etching |
| work_keys_str_mv | AT chenfrancisf plasmaprocessingandprocessingscience AT nationalresearchcouncilusxxbpanelonplasmaprocessing plasmaprocessingandprocessingscience AT nationalresearchcouncilusxxbnavalstudiesboard plasmaprocessingandprocessingscience AT nationalresearchcouncilusxxbcommissiononphysicalsciencesmathematicsandapplications plasmaprocessingandprocessingscience |