Plasma processing of materials: scientific opportunities and technological challenges
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C.
National Academy Press
1991
|
| Schlagworte: | |
| Beschreibung: | xii, 75 p. |
| ISBN: | 0309045975 |
Internformat
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| 245 | 1 | 0 | |a Plasma processing of materials |b scientific opportunities and technological challenges |c Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
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| 300 | |a xii, 75 p. | ||
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Datensatz im Suchindex
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| author_corporate | National Research Council (U.S.) Panel on Plasma Processing of Materials |
| author_corporate_role | aut |
| author_facet | National Research Council (U.S.) Panel on Plasma Processing of Materials |
| author_sort | National Research Council (U.S.) Panel on Plasma Processing of Materials |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
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| id | DE-604.BV044107007 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:43:51Z |
| institution | BVB |
| isbn | 0309045975 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029513852 |
| oclc_num | 923262698 |
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| physical | xii, 75 p. |
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| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | National Academy Press |
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| spelling | National Research Council (U.S.) Panel on Plasma Processing of Materials Verfasser aut Plasma processing of materials scientific opportunities and technological challenges Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council Washington, D.C. National Academy Press 1991 xii, 75 p. txt rdacontent c rdamedia cr rdacarrier Plasma engineering Microelectronics Materials Effect of radiation on Surfaces (Technology) |
| spellingShingle | Plasma processing of materials scientific opportunities and technological challenges Plasma engineering Microelectronics Materials Effect of radiation on Surfaces (Technology) |
| title | Plasma processing of materials scientific opportunities and technological challenges |
| title_auth | Plasma processing of materials scientific opportunities and technological challenges |
| title_exact_search | Plasma processing of materials scientific opportunities and technological challenges |
| title_full | Plasma processing of materials scientific opportunities and technological challenges Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_fullStr | Plasma processing of materials scientific opportunities and technological challenges Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_full_unstemmed | Plasma processing of materials scientific opportunities and technological challenges Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_short | Plasma processing of materials |
| title_sort | plasma processing of materials scientific opportunities and technological challenges |
| title_sub | scientific opportunities and technological challenges |
| topic | Plasma engineering Microelectronics Materials Effect of radiation on Surfaces (Technology) |
| topic_facet | Plasma engineering Microelectronics Materials Effect of radiation on Surfaces (Technology) |
| work_keys_str_mv | AT nationalresearchcounciluspanelonplasmaprocessingofmaterials plasmaprocessingofmaterialsscientificopportunitiesandtechnologicalchallenges |