Beam technologies for integrated processing: report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C.
National Academy Press
1992
|
| Schlagworte: | |
| Beschreibung: | "NMAB-461." Includes bibliographical references |
| Beschreibung: | xii, 89 p. |
| ISBN: | 0309046351 |
Internformat
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| 110 | 2 | |a National Research Council (U.S.) |b Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Beam technologies for integrated processing |b report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| 264 | 1 | |a Washington, D.C. |b National Academy Press |c 1992 | |
| 300 | |a xii, 89 p. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
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| 500 | |a "NMAB-461." | ||
| 500 | |a Includes bibliographical references | ||
| 650 | 4 | |a Microelectronics industry | |
| 650 | 4 | |a Molecular beams |x Industrial applications | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Plasma-enhanced chemical vapor deposition |x Industrial applications | |
| 912 | |a ZDB-30-PAD | ||
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Datensatz im Suchindex
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| author_corporate | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |
| author_corporate_role | aut |
| author_facet | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |
| author_sort | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |
| building | Verbundindex |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV044106739 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:43:50Z |
| institution | BVB |
| isbn | 0309046351 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029513584 |
| oclc_num | 923260597 |
| open_access_boolean | |
| physical | xii, 89 p. |
| psigel | ZDB-30-PAD |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | National Academy Press |
| record_format | marc |
| spelling | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems Verfasser aut Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council Washington, D.C. National Academy Press 1992 xii, 89 p. txt rdacontent c rdamedia cr rdacarrier "NMAB-461." Includes bibliographical references Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| spellingShingle | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| title | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_auth | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_exact_search | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_fullStr | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full_unstemmed | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_short | Beam technologies for integrated processing |
| title_sort | beam technologies for integrated processing report of the committee on beam technologies opportunities in attaining fully integrated processing systems national materials advisory board commission on engineering and technical systems national research council |
| title_sub | report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| topic | Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| topic_facet | Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| work_keys_str_mv | AT nationalresearchcounciluscommitteeonbeamtechnologiesopportunitiesinattainingfullyintegratedprocessingsystems beamtechnologiesforintegratedprocessingreportofthecommitteeonbeamtechnologiesopportunitiesinattainingfullyintegratedprocessingsystemsnationalmaterialsadvisoryboardcommissiononengineeringandtechnicalsystemsnationalresearchcouncil |