Low-k nanoporous interdielectrics: materials, thin film fabrications, structures and properties
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hauppauge, N.Y.
Nova Science Publishers
c2010
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| Series: | Nanotechnology science and technology series
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| Subjects: | |
| Item Description: | Includes bibliographical references (p. [51]-61) and index |
| Physical Description: | 67 p. |
| ISBN: | 9781617283185 |
Staff View
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| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Porous materials | |
| 650 | 4 | |a Interconnects (Integrated circuit technology) | |
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| id | DE-604.BV044088571 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:43:20Z |
| institution | BVB |
| isbn | 9781617283185 |
| language | English |
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| physical | 67 p. |
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| publishDate | 2010 |
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| publisher | Nova Science Publishers |
| record_format | marc |
| series2 | Nanotechnology science and technology series |
| spelling | Ree, Moonhor Verfasser aut Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo Hauppauge, N.Y. Nova Science Publishers c2010 67 p. txt rdacontent c rdamedia cr rdacarrier Nanotechnology science and technology series Includes bibliographical references (p. [51]-61) and index Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) Yoon, Jinhwan Sonstige oth Heo, Kyuyoung Sonstige oth Erscheint auch als Druck-Ausgabe, Paperback 978-1-61668-749-6 |
| spellingShingle | Ree, Moonhor Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| title | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_auth | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_exact_search | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_full | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| title_fullStr | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| title_full_unstemmed | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| title_short | Low-k nanoporous interdielectrics |
| title_sort | low k nanoporous interdielectrics materials thin film fabrications structures and properties |
| title_sub | materials, thin film fabrications, structures and properties |
| topic | Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| topic_facet | Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| work_keys_str_mv | AT reemoonhor lowknanoporousinterdielectricsmaterialsthinfilmfabricationsstructuresandproperties AT yoonjinhwan lowknanoporousinterdielectricsmaterialsthinfilmfabricationsstructuresandproperties AT heokyuyoung lowknanoporousinterdielectricsmaterialsthinfilmfabricationsstructuresandproperties |