Low-k nanoporous interdielectrics: materials, thin film fabrications, structures and properties
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Hauppauge, N.Y.
Nova Science Publishers
c2010
|
| Schriftenreihe: | Nanotechnology science and technology series
|
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references (p. [51]-61) and index |
| Beschreibung: | 67 p. |
| ISBN: | 9781617283185 |
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| 100 | 1 | |a Ree, Moonhor |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Low-k nanoporous interdielectrics |b materials, thin film fabrications, structures and properties |c Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| 264 | 1 | |a Hauppauge, N.Y. |b Nova Science Publishers |c c2010 | |
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| 500 | |a Includes bibliographical references (p. [51]-61) and index | ||
| 650 | 4 | |a Dielectric films | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Porous materials | |
| 650 | 4 | |a Interconnects (Integrated circuit technology) | |
| 700 | 1 | |a Yoon, Jinhwan |e Sonstige |4 oth | |
| 700 | 1 | |a Heo, Kyuyoung |e Sonstige |4 oth | |
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| author | Ree, Moonhor |
| author_facet | Ree, Moonhor |
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| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV044088571 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:43:20Z |
| institution | BVB |
| isbn | 9781617283185 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029495416 |
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| physical | 67 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Nova Science Publishers |
| record_format | marc |
| series2 | Nanotechnology science and technology series |
| spelling | Ree, Moonhor Verfasser aut Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo Hauppauge, N.Y. Nova Science Publishers c2010 67 p. txt rdacontent c rdamedia cr rdacarrier Nanotechnology science and technology series Includes bibliographical references (p. [51]-61) and index Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) Yoon, Jinhwan Sonstige oth Heo, Kyuyoung Sonstige oth Erscheint auch als Druck-Ausgabe, Paperback 978-1-61668-749-6 |
| spellingShingle | Ree, Moonhor Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| title | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_auth | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_exact_search | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_full | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| title_fullStr | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| title_full_unstemmed | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo |
| title_short | Low-k nanoporous interdielectrics |
| title_sort | low k nanoporous interdielectrics materials thin film fabrications structures and properties |
| title_sub | materials, thin film fabrications, structures and properties |
| topic | Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| topic_facet | Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| work_keys_str_mv | AT reemoonhor lowknanoporousinterdielectricsmaterialsthinfilmfabricationsstructuresandproperties AT yoonjinhwan lowknanoporousinterdielectricsmaterialsthinfilmfabricationsstructuresandproperties AT heokyuyoung lowknanoporousinterdielectricsmaterialsthinfilmfabricationsstructuresandproperties |