An introduction to microelectromechanical systems engineering:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston
Artech House
2004
|
| Ausgabe: | 2nd ed |
| Schriftenreihe: | Microelectromechanical systems series
|
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xx, 282 p. |
| ISBN: | 1580535917 1580535909 |
Internformat
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| 100 | 1 | |a Maluf, Nadim |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a An introduction to microelectromechanical systems engineering |c Nadim Maluf, Kirt Williams |
| 250 | |a 2nd ed | ||
| 264 | 1 | |a Boston |b Artech House |c 2004 | |
| 300 | |a xx, 282 p. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Microelectromechanical systems series | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microtechnology | |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1804177122144550913 |
|---|---|
| any_adam_object | |
| author | Maluf, Nadim |
| author_facet | Maluf, Nadim |
| author_role | aut |
| author_sort | Maluf, Nadim |
| author_variant | n m nm |
| building | Verbundindex |
| bvnumber | BV044080345 |
| collection | ZDB-30-PAD |
| ctrlnum | (ZDB-30-PAD)EBC227665 (ZDB-89-EBL)EBL227665 (OCoLC)56123929 (DE-599)BVBBV044080345 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2nd ed |
| format | Electronic eBook |
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| id | DE-604.BV044080345 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:43:03Z |
| institution | BVB |
| isbn | 1580535917 1580535909 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029487190 |
| oclc_num | 56123929 |
| open_access_boolean | |
| physical | xx, 282 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Artech House |
| record_format | marc |
| series2 | Microelectromechanical systems series |
| spelling | Maluf, Nadim Verfasser aut An introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams 2nd ed Boston Artech House 2004 xx, 282 p. txt rdacontent c rdamedia cr rdacarrier Microelectromechanical systems series Includes bibliographical references and index Microelectromechanical systems Microtechnology Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s 1\p DE-604 MEMS (DE-588)4824724-8 s 2\p DE-604 Williams, Kirt Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Maluf, Nadim An introduction to microelectromechanical systems engineering Microelectromechanical systems Microtechnology Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4205811-9 (DE-588)4824724-8 |
| title | An introduction to microelectromechanical systems engineering |
| title_auth | An introduction to microelectromechanical systems engineering |
| title_exact_search | An introduction to microelectromechanical systems engineering |
| title_full | An introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams |
| title_fullStr | An introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams |
| title_full_unstemmed | An introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams |
| title_short | An introduction to microelectromechanical systems engineering |
| title_sort | an introduction to microelectromechanical systems engineering |
| topic | Microelectromechanical systems Microtechnology Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems Microtechnology Mikroelektronik Mikromechanik MEMS |
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