Sputtering materials for VLSI and thin film devices:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford ; Boston
William Andrew Publishing
2014
|
| Ausgabe: | First edition |
| Schlagworte: | |
| Beschreibung: | Description based on print version record |
| Beschreibung: | 1 online resource (614 pages) illustrations |
| ISBN: | 9780815519874 9780815515937 |
Internformat
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| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Flat panel displays |x Materials | |
| 650 | 4 | |a Sputtering (Physics) | |
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Datensatz im Suchindex
| _version_ | 1804177093376868352 |
|---|---|
| any_adam_object | |
| author | Sarkar, Jaydeep |
| author_facet | Sarkar, Jaydeep |
| author_role | aut |
| author_sort | Sarkar, Jaydeep |
| author_variant | j s js |
| building | Verbundindex |
| bvnumber | BV044064658 |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | First edition |
| format | Electronic eBook |
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| id | DE-604.BV044064658 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:42:36Z |
| institution | BVB |
| isbn | 9780815519874 9780815515937 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029471503 |
| oclc_num | 862812805 |
| open_access_boolean | |
| physical | 1 online resource (614 pages) illustrations |
| psigel | ZDB-30-PAD |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | William Andrew Publishing |
| record_format | marc |
| spelling | Sarkar, Jaydeep Verfasser aut Sputtering materials for VLSI and thin film devices by Jaydeep Sarkar First edition Oxford ; Boston William Andrew Publishing 2014 1 online resource (614 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Description based on print version record Microelectronics Materials Flat panel displays Materials Sputtering (Physics) Erscheint auch als Druck-Ausgabe Sarkar, Jaydeep Sputtering materials for VLSI and thin film devices |
| spellingShingle | Sarkar, Jaydeep Sputtering materials for VLSI and thin film devices Microelectronics Materials Flat panel displays Materials Sputtering (Physics) |
| title | Sputtering materials for VLSI and thin film devices |
| title_auth | Sputtering materials for VLSI and thin film devices |
| title_exact_search | Sputtering materials for VLSI and thin film devices |
| title_full | Sputtering materials for VLSI and thin film devices by Jaydeep Sarkar |
| title_fullStr | Sputtering materials for VLSI and thin film devices by Jaydeep Sarkar |
| title_full_unstemmed | Sputtering materials for VLSI and thin film devices by Jaydeep Sarkar |
| title_short | Sputtering materials for VLSI and thin film devices |
| title_sort | sputtering materials for vlsi and thin film devices |
| topic | Microelectronics Materials Flat panel displays Materials Sputtering (Physics) |
| topic_facet | Microelectronics Materials Flat panel displays Materials Sputtering (Physics) |
| work_keys_str_mv | AT sarkarjaydeep sputteringmaterialsforvlsiandthinfilmdevices |