Resonant MEMS: Fundamentals, Implementation, and Application
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of thei...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
John Wiley & Sons, Incorporated
2015
|
| Ausgabe: | 1st ed |
| Schriftenreihe: | Advanced Micro and Nanosystems Ser
|
| Schlagworte: | |
| Zusammenfassung: | Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems |
| Beschreibung: | Description based on publisher supplied metadata and other sources |
| Beschreibung: | 1 online resource (512 pages) |
| ISBN: | 9783527676354 9783527335459 |
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Datensatz im Suchindex
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| author | Fedder, Gary K. |
| author_facet | Fedder, Gary K. |
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| author_sort | Fedder, Gary K. |
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| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1st ed |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:42:12Z |
| institution | BVB |
| isbn | 9783527676354 9783527335459 |
| language | English |
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| publisher | John Wiley & Sons, Incorporated |
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| series2 | Advanced Micro and Nanosystems Ser |
| spelling | Fedder, Gary K. Verfasser aut Resonant MEMS Fundamentals, Implementation, and Application 1st ed Weinheim John Wiley & Sons, Incorporated 2015 © 2014 1 online resource (512 pages) txt rdacontent c rdamedia cr rdacarrier Advanced Micro and Nanosystems Ser Description based on publisher supplied metadata and other sources Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems Microelectromechanical systems -- Design and construction Microfabrication Resonance Nanoelektromechanik (DE-588)7546434-2 gnd rswk-swf Resonator (DE-588)4131574-1 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content MEMS (DE-588)4824724-8 s Nanoelektromechanik (DE-588)7546434-2 s Resonator (DE-588)4131574-1 s 2\p DE-604 Hierold, Christofer Sonstige oth Korvink, Jan G. Sonstige oth Tabata, Osamu Sonstige oth Brand, Oliver Sonstige oth Dufour, Isabelle Sonstige oth Heinrich, Stephen Sonstige oth Josse, Fabien Sonstige oth Erscheint auch als Druck-Ausgabe Fedder, Gary K . Resonant MEMS : Fundamentals, Implementation, and Application 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Fedder, Gary K. Resonant MEMS Fundamentals, Implementation, and Application Microelectromechanical systems -- Design and construction Microfabrication Resonance Nanoelektromechanik (DE-588)7546434-2 gnd Resonator (DE-588)4131574-1 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)7546434-2 (DE-588)4131574-1 (DE-588)4824724-8 (DE-588)4143413-4 |
| title | Resonant MEMS Fundamentals, Implementation, and Application |
| title_auth | Resonant MEMS Fundamentals, Implementation, and Application |
| title_exact_search | Resonant MEMS Fundamentals, Implementation, and Application |
| title_full | Resonant MEMS Fundamentals, Implementation, and Application |
| title_fullStr | Resonant MEMS Fundamentals, Implementation, and Application |
| title_full_unstemmed | Resonant MEMS Fundamentals, Implementation, and Application |
| title_short | Resonant MEMS |
| title_sort | resonant mems fundamentals implementation and application |
| title_sub | Fundamentals, Implementation, and Application |
| topic | Microelectromechanical systems -- Design and construction Microfabrication Resonance Nanoelektromechanik (DE-588)7546434-2 gnd Resonator (DE-588)4131574-1 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems -- Design and construction Microfabrication Resonance Nanoelektromechanik Resonator MEMS Aufsatzsammlung |
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