K??ri?inen, T. (2013). Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons (2nd ed.). John Wiley & Sons, Incorporated.
Chicago Style (17th ed.) CitationK??ri?inen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons. 2nd ed. Somerset: John Wiley & Sons, Incorporated, 2013.
MLA (9th ed.) CitationK??ri?inen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applicatons. 2nd ed. John Wiley & Sons, Incorporated, 2013.
Warning: These citations may not always be 100% accurate.