Measurement technology for micro-nanometer devices:
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Singapore
Wiley
2017
|
| Subjects: | |
| Physical Description: | xii, 329 Seiten Illustrationen, Diagramme |
| ISBN: | 9781118717967 |
Staff View
MARC
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| 100 | 1 | |a Zhang, Wendong |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Measurement technology for micro-nanometer devices |c Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| 264 | 1 | |a Singapore |b Wiley |c 2017 | |
| 300 | |a xii, 329 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Microtechnology |x Measurement | |
| 650 | 4 | |a Nanotechnology |x Measurement | |
| 650 | 4 | |a Microelectromechanical devices |x Testing | |
| 650 | 4 | |a Physical measurements | |
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| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanometerbereich |0 (DE-588)4327473-0 |2 gnd |9 rswk-swf |
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| 689 | 1 | 1 | |a Messung |0 (DE-588)4038852-9 |D s |
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| 700 | 1 | |a Chou, Xiujian |e Verfasser |4 aut | |
| 700 | 1 | |a Shi, Tielin |e Verfasser |4 aut | |
| 700 | 1 | |a Ma, Zongmin |e Verfasser |4 aut | |
| 700 | 1 | |a Bao, Haifei |e Verfasser |4 aut | |
| 700 | 1 | |a Chen, Jing |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029400749 | ||
Record in the Search Index
| _version_ | 1804176967873855488 |
|---|---|
| any_adam_object | |
| author | Zhang, Wendong Chou, Xiujian Shi, Tielin Ma, Zongmin Bao, Haifei Chen, Jing |
| author_facet | Zhang, Wendong Chou, Xiujian Shi, Tielin Ma, Zongmin Bao, Haifei Chen, Jing |
| author_role | aut aut aut aut aut aut |
| author_sort | Zhang, Wendong |
| author_variant | w z wz x c xc t s ts z m zm h b hb j c jc |
| building | Verbundindex |
| bvnumber | BV043992570 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.N35 |
| callnumber-search | TA418.9.N35 |
| callnumber-sort | TA 3418.9 N35 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UH 6200 UQ 8010 ZM 7605 ZN 3750 ZQ 3950 |
| ctrlnum | (OCoLC)974842213 (DE-599)BVBBV043992570 |
| dewey-full | 681/.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681/.2 |
| dewey-search | 681/.2 |
| dewey-sort | 3681 12 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Physik Handwerk und Gewerbe / Verschiedene Technologien Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Book |
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| id | DE-604.BV043992570 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:40:36Z |
| institution | BVB |
| isbn | 9781118717967 |
| language | English |
| lccn | 015026167 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029400749 |
| oclc_num | 974842213 |
| open_access_boolean | |
| owner | DE-703 DE-29T DE-83 |
| owner_facet | DE-703 DE-29T DE-83 |
| physical | xii, 329 Seiten Illustrationen, Diagramme |
| publishDate | 2017 |
| publishDateSearch | 2017 |
| publishDateSort | 2017 |
| publisher | Wiley |
| record_format | marc |
| spelling | Zhang, Wendong Verfasser aut Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue Singapore Wiley 2017 xii, 329 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung (DE-588)4038852-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Nanometerbereich (DE-588)4327473-0 gnd rswk-swf Messung (DE-588)4038852-9 s Nanometerbereich (DE-588)4327473-0 s DE-604 MEMS (DE-588)4824724-8 s Chou, Xiujian Verfasser aut Shi, Tielin Verfasser aut Ma, Zongmin Verfasser aut Bao, Haifei Verfasser aut Chen, Jing Verfasser aut |
| spellingShingle | Zhang, Wendong Chou, Xiujian Shi, Tielin Ma, Zongmin Bao, Haifei Chen, Jing Measurement technology for micro-nanometer devices Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung (DE-588)4038852-9 gnd MEMS (DE-588)4824724-8 gnd Nanometerbereich (DE-588)4327473-0 gnd |
| subject_GND | (DE-588)4038852-9 (DE-588)4824724-8 (DE-588)4327473-0 |
| title | Measurement technology for micro-nanometer devices |
| title_auth | Measurement technology for micro-nanometer devices |
| title_exact_search | Measurement technology for micro-nanometer devices |
| title_full | Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| title_fullStr | Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| title_full_unstemmed | Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| title_short | Measurement technology for micro-nanometer devices |
| title_sort | measurement technology for micro nanometer devices |
| topic | Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung (DE-588)4038852-9 gnd MEMS (DE-588)4824724-8 gnd Nanometerbereich (DE-588)4327473-0 gnd |
| topic_facet | Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung MEMS Nanometerbereich |
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