Measurement technology for micro-nanometer devices:
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Singapore
Wiley
2017
|
| Schlagworte: | |
| Beschreibung: | xii, 329 Seiten Illustrationen, Diagramme |
| ISBN: | 9781118717967 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV043992570 | ||
| 003 | DE-604 | ||
| 005 | 20171204 | ||
| 007 | t | ||
| 008 | 170111s2017 si a||| |||| 00||| eng d | ||
| 010 | |a 015026167 | ||
| 020 | |a 9781118717967 |9 978-1-118-71796-7 | ||
| 035 | |a (OCoLC)974842213 | ||
| 035 | |a (DE-599)BVBBV043992570 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 044 | |a si |c SG | ||
| 049 | |a DE-703 |a DE-29T |a DE-83 | ||
| 050 | 0 | |a TA418.9.N35 | |
| 082 | 0 | |a 681/.2 |2 23 | |
| 084 | |a UH 6200 |0 (DE-625)145743: |2 rvk | ||
| 084 | |a UQ 8010 |0 (DE-625)146585: |2 rvk | ||
| 084 | |a ZM 7605 |0 (DE-625)157122: |2 rvk | ||
| 084 | |a ZN 3750 |0 (DE-625)157334: |2 rvk | ||
| 084 | |a ZQ 3950 |0 (DE-625)158090: |2 rvk | ||
| 100 | 1 | |a Zhang, Wendong |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Measurement technology for micro-nanometer devices |c Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| 264 | 1 | |a Singapore |b Wiley |c 2017 | |
| 300 | |a xii, 329 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Microtechnology |x Measurement | |
| 650 | 4 | |a Nanotechnology |x Measurement | |
| 650 | 4 | |a Microelectromechanical devices |x Testing | |
| 650 | 4 | |a Physical measurements | |
| 650 | 0 | 7 | |a Messung |0 (DE-588)4038852-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanometerbereich |0 (DE-588)4327473-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Messung |0 (DE-588)4038852-9 |D s |
| 689 | 0 | 1 | |a Nanometerbereich |0 (DE-588)4327473-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 1 | 1 | |a Messung |0 (DE-588)4038852-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Chou, Xiujian |e Verfasser |4 aut | |
| 700 | 1 | |a Shi, Tielin |e Verfasser |4 aut | |
| 700 | 1 | |a Ma, Zongmin |e Verfasser |4 aut | |
| 700 | 1 | |a Bao, Haifei |e Verfasser |4 aut | |
| 700 | 1 | |a Chen, Jing |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029400749 | ||
Datensatz im Suchindex
| _version_ | 1804176967873855488 |
|---|---|
| any_adam_object | |
| author | Zhang, Wendong Chou, Xiujian Shi, Tielin Ma, Zongmin Bao, Haifei Chen, Jing |
| author_facet | Zhang, Wendong Chou, Xiujian Shi, Tielin Ma, Zongmin Bao, Haifei Chen, Jing |
| author_role | aut aut aut aut aut aut |
| author_sort | Zhang, Wendong |
| author_variant | w z wz x c xc t s ts z m zm h b hb j c jc |
| building | Verbundindex |
| bvnumber | BV043992570 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.9.N35 |
| callnumber-search | TA418.9.N35 |
| callnumber-sort | TA 3418.9 N35 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UH 6200 UQ 8010 ZM 7605 ZN 3750 ZQ 3950 |
| ctrlnum | (OCoLC)974842213 (DE-599)BVBBV043992570 |
| dewey-full | 681/.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681/.2 |
| dewey-search | 681/.2 |
| dewey-sort | 3681 12 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Physik Handwerk und Gewerbe / Verschiedene Technologien Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02000nam a2200577 c 4500</leader><controlfield tag="001">BV043992570</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20171204 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">170111s2017 si a||| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">015026167</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781118717967</subfield><subfield code="9">978-1-118-71796-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)974842213</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043992570</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">si</subfield><subfield code="c">SG</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA418.9.N35</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">681/.2</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6200</subfield><subfield code="0">(DE-625)145743:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UQ 8010</subfield><subfield code="0">(DE-625)146585:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZM 7605</subfield><subfield code="0">(DE-625)157122:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3750</subfield><subfield code="0">(DE-625)157334:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZQ 3950</subfield><subfield code="0">(DE-625)158090:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Zhang, Wendong</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Measurement technology for micro-nanometer devices</subfield><subfield code="c">Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Singapore</subfield><subfield code="b">Wiley</subfield><subfield code="c">2017</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xii, 329 Seiten</subfield><subfield code="b">Illustrationen, Diagramme</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microtechnology</subfield><subfield code="x">Measurement</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanotechnology</subfield><subfield code="x">Measurement</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical devices</subfield><subfield code="x">Testing</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Physical measurements</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Messung</subfield><subfield code="0">(DE-588)4038852-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanometerbereich</subfield><subfield code="0">(DE-588)4327473-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Messung</subfield><subfield code="0">(DE-588)4038852-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Nanometerbereich</subfield><subfield code="0">(DE-588)4327473-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Messung</subfield><subfield code="0">(DE-588)4038852-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Chou, Xiujian</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shi, Tielin</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ma, Zongmin</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Bao, Haifei</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Chen, Jing</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029400749</subfield></datafield></record></collection> |
| id | DE-604.BV043992570 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:40:36Z |
| institution | BVB |
| isbn | 9781118717967 |
| language | English |
| lccn | 015026167 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029400749 |
| oclc_num | 974842213 |
| open_access_boolean | |
| owner | DE-703 DE-29T DE-83 |
| owner_facet | DE-703 DE-29T DE-83 |
| physical | xii, 329 Seiten Illustrationen, Diagramme |
| publishDate | 2017 |
| publishDateSearch | 2017 |
| publishDateSort | 2017 |
| publisher | Wiley |
| record_format | marc |
| spelling | Zhang, Wendong Verfasser aut Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue Singapore Wiley 2017 xii, 329 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung (DE-588)4038852-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Nanometerbereich (DE-588)4327473-0 gnd rswk-swf Messung (DE-588)4038852-9 s Nanometerbereich (DE-588)4327473-0 s DE-604 MEMS (DE-588)4824724-8 s Chou, Xiujian Verfasser aut Shi, Tielin Verfasser aut Ma, Zongmin Verfasser aut Bao, Haifei Verfasser aut Chen, Jing Verfasser aut |
| spellingShingle | Zhang, Wendong Chou, Xiujian Shi, Tielin Ma, Zongmin Bao, Haifei Chen, Jing Measurement technology for micro-nanometer devices Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung (DE-588)4038852-9 gnd MEMS (DE-588)4824724-8 gnd Nanometerbereich (DE-588)4327473-0 gnd |
| subject_GND | (DE-588)4038852-9 (DE-588)4824724-8 (DE-588)4327473-0 |
| title | Measurement technology for micro-nanometer devices |
| title_auth | Measurement technology for micro-nanometer devices |
| title_exact_search | Measurement technology for micro-nanometer devices |
| title_full | Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| title_fullStr | Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| title_full_unstemmed | Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue |
| title_short | Measurement technology for micro-nanometer devices |
| title_sort | measurement technology for micro nanometer devices |
| topic | Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung (DE-588)4038852-9 gnd MEMS (DE-588)4824724-8 gnd Nanometerbereich (DE-588)4327473-0 gnd |
| topic_facet | Microtechnology Measurement Nanotechnology Measurement Microelectromechanical devices Testing Physical measurements Messung MEMS Nanometerbereich |
| work_keys_str_mv | AT zhangwendong measurementtechnologyformicronanometerdevices AT chouxiujian measurementtechnologyformicronanometerdevices AT shitielin measurementtechnologyformicronanometerdevices AT mazongmin measurementtechnologyformicronanometerdevices AT baohaifei measurementtechnologyformicronanometerdevices AT chenjing measurementtechnologyformicronanometerdevices |