Physics and Technology of Crystalline Oxide Semiconductor CAAC-IGZO: Application to Displays
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Weitere Verfasser: Yamazaki, Shunpei (HerausgeberIn), Tsutsui, Tetsuo (HerausgeberIn)
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: [United Kingdom] Wiley 2016
Ausgabe:1st
Schriftenreihe:Wiley SID series in display technology
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Beschreibung:About the Editors Notes on contributors Series editor's foreword Preface Acknowledgements 1 Introduction 1.1 History of Displays 1.2 Requirement for Displays 1.3 Transistor Technology for Displays 1.3.1 Comparison of Silicon and Oxide Semiconductors 1.3.2 FETs in LCDs 1.3.3 FETs in OLED Displays 1.3.4 Recent CAAC-IGZO FET Technologies 1.3.5 Development of OLED Displays Using CAAC-IGZO 2 Applications of CAAC-IGZO FETs to Displays 2.1 Introduction 2.2 Bottom-gate Top-contact FET 2.2.1 Manufacturing Process for CAAC-IGZO FETs with Channel-etch Type of BGTC Structure 2.2.2 GI Formation 2.2.3 Formation of Buried Channel by Stacked Active Layer IGZO 2.2.4 Baking Treatment of CAAC-IGZO 2.2.5 Damaged Layer ( n -type) Formed by Deposition of S/D Electrodes 2.2.6 Cleaning of the Back Channel 2.2.7 Copper Wiring. - for S/D Electrodes 2.3 Top-gate Self-aligned FET 2.3.1 Fabrication Process of TGSA CAAC-IGZO FETs 2.3.2 Formation of GE/GI Patterns 2.3.3 Formation of S/D Regions 2.3.4 GI Thinning and L Reduction 2.4 Characteristics of CAAC-IGZO FET 2.4.1 Current Drivability 2.4.2 Low Off-state Current 2.4.3 Normally-off I <sub>d</sub>- V <sub>d</sub> Characteristics and Small Threshold-voltage Variation 2.4.4 Saturability of I <sub>d</sub>- V <sub>d</sub> Characteristics 2.4.5 Summary 2.5 Density of States and Device Reliability 2.5.1 Introduction 2.5.2 Measurement of Defect States in IGZO Film 2.5.3 Correlation between Oxygen Vacancies and FET Characteristics 2.5.4 Defect States in Silicon Oxide Film 2.5.5 NBIS Mechanism 2.5.6 Summary 2.6 Oxide Conductor Electrode Process 2.6.1 Introduction 2.6.2 Method of Fabricating Oxide. - Conductor Electrode and Measurements of Its Resistivity 2.6.3 Liquid Crystal Display Device with Oxide Conductor Electrode 2.6.4 Summary 3 Driver Circuit 3.1 Introduction 3.2. - Top Emission, and Color Filter (WTC) Structure 4.3.3 Measures for Crosstalk 4.4 Circuit Design for OLED Displays 4.4.1 Driving OLED Displays 4.4.2 External Compensation 4.4.3
Beschreibung:1 online resource (432 pages)
ISBN:9781119247395
111924739X
9781119247487
1119247489

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