Micro electro mechanical systems (MEMS): technology, fabrication processes, and applications
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Hauppauge, N.Y.
Nova Science Publishers
©2010
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xii, 301 pages |
| ISBN: | 9781613246986 1613246986 9781608764747 1608764745 |
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| id | DE-604.BV043961364 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:39:49Z |
| institution | BVB |
| isbn | 9781613246986 1613246986 9781608764747 1608764745 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029370069 |
| oclc_num | 831625502 |
| open_access_boolean | |
| owner | DE-1047 DE-1046 |
| owner_facet | DE-1047 DE-1046 |
| physical | xii, 301 pages |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Nova Science Publishers |
| record_format | marc |
| spelling | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications editors, Britt Ekwall and Mikkel Cronquist Hauppauge, N.Y. Nova Science Publishers ©2010 xii, 301 pages txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Microelectromechanical systems Ekwall, Britt Sonstige oth Cronquist, Mikkel Sonstige oth |
| spellingShingle | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Microelectromechanical systems |
| title | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications |
| title_auth | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications |
| title_exact_search | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications |
| title_full | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications editors, Britt Ekwall and Mikkel Cronquist |
| title_fullStr | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications editors, Britt Ekwall and Mikkel Cronquist |
| title_full_unstemmed | Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications editors, Britt Ekwall and Mikkel Cronquist |
| title_short | Micro electro mechanical systems (MEMS) |
| title_sort | micro electro mechanical systems mems technology fabrication processes and applications |
| title_sub | technology, fabrication processes, and applications |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Microelectromechanical systems |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems |
| work_keys_str_mv | AT ekwallbritt microelectromechanicalsystemsmemstechnologyfabricationprocessesandapplications AT cronquistmikkel microelectromechanicalsystemsmemstechnologyfabricationprocessesandapplications |