Atomic and ion collisions in solids and at surfaces: theory, simulation and applications
This 1997 book is an introduction to the application of computer simulation and theory in the study of the interaction of energetic particles (< 1 eV to the MeV range) with solid surfaces. The authors describe methods which are applicable both to hard collisions between nuclear cores of atoms dow...
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Cambridge
Cambridge University Press
1997
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Schlagworte: | |
Online-Zugang: | BSB01 FHN01 URL des Erstveröffentlichers |
Zusammenfassung: | This 1997 book is an introduction to the application of computer simulation and theory in the study of the interaction of energetic particles (< 1 eV to the MeV range) with solid surfaces. The authors describe methods which are applicable both to hard collisions between nuclear cores of atoms down to soft interactions, where chemical effects or long-range forces dominate. In surface science, potential applications include surface atomic structure determination using ion scattering spectroscopy or element analysis using SIMS or other techniques that involve depth profiling. Industrial applications include optical or hard coating deposition, ion implantation in semiconductor device manufacture or nanotechnology. Plasma-sidewall interaction in fusion devices may also be studied using the techniques described. This book will be of interest to graduate students and researchers, both academic and industrial, in surface science, semiconductor engineering, thin-film deposition and particle-surface interactions, in departments of physics, chemistry and electrical engineering |
Beschreibung: | Title from publisher's bibliographic system (viewed on 05 Oct 2015) |
Beschreibung: | 1 online resource (ix, 309 pages) |
ISBN: | 9780511524325 |
DOI: | 10.1017/CBO9780511524325 |
Internformat
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245 | 1 | 0 | |a Atomic and ion collisions in solids and at surfaces |b theory, simulation and applications |c edited by Roger Smith ; [contributors], Roger Smith [and others] |
246 | 1 | 3 | |a Atomic & Ion Collisions in Solids & at Surfaces |
264 | 1 | |a Cambridge |b Cambridge University Press |c 1997 | |
300 | |a 1 online resource (ix, 309 pages) | ||
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337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a Title from publisher's bibliographic system (viewed on 05 Oct 2015) | ||
505 | 8 | 0 | |g 1 |t Introduction |g 2 |t The binary collision |g 3 |t Interatomic potentials |g 4 |t Electronic energy loss models |g 5 |t Transport models |g 6 |t The rest distribution of primary ions in amorphous targets |g 7 |t Binary collision algorithms |g 8 |t Molecular dynamics |g 9 |t Surface topography |
520 | |a This 1997 book is an introduction to the application of computer simulation and theory in the study of the interaction of energetic particles (< 1 eV to the MeV range) with solid surfaces. The authors describe methods which are applicable both to hard collisions between nuclear cores of atoms down to soft interactions, where chemical effects or long-range forces dominate. In surface science, potential applications include surface atomic structure determination using ion scattering spectroscopy or element analysis using SIMS or other techniques that involve depth profiling. Industrial applications include optical or hard coating deposition, ion implantation in semiconductor device manufacture or nanotechnology. Plasma-sidewall interaction in fusion devices may also be studied using the techniques described. This book will be of interest to graduate students and researchers, both academic and industrial, in surface science, semiconductor engineering, thin-film deposition and particle-surface interactions, in departments of physics, chemistry and electrical engineering | ||
650 | 4 | |a Collisions (Nuclear physics) | |
650 | 4 | |a Solids / Surfaces | |
650 | 0 | 7 | |a Festkörperoberfläche |0 (DE-588)4127823-9 |2 gnd |9 rswk-swf |
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700 | 1 | |a Smith, Roger |d 1947- |0 (DE-588)136841708 |4 edt | |
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856 | 4 | 0 | |u https://doi.org/10.1017/CBO9780511524325 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
912 | |a ZDB-20-CBO | ||
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Datensatz im Suchindex
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any_adam_object | |
author2 | Smith, Roger 1947- |
author2_role | edt |
author2_variant | r s rs |
author_GND | (DE-588)136841708 |
author_facet | Smith, Roger 1947- |
building | Verbundindex |
bvnumber | BV043944827 |
classification_rvk | UP 9300 |
collection | ZDB-20-CBO |
contents | Introduction The binary collision Interatomic potentials Electronic energy loss models Transport models The rest distribution of primary ions in amorphous targets Binary collision algorithms Molecular dynamics Surface topography |
ctrlnum | (ZDB-20-CBO)CR9780511524325 (OCoLC)849936211 (DE-599)BVBBV043944827 |
dewey-full | 539.7574 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 539 - Modern physics |
dewey-raw | 539.7574 |
dewey-search | 539.7574 |
dewey-sort | 3539.7574 |
dewey-tens | 530 - Physics |
discipline | Physik |
doi_str_mv | 10.1017/CBO9780511524325 |
format | Electronic eBook |
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id | DE-604.BV043944827 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T07:39:22Z |
institution | BVB |
isbn | 9780511524325 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029353798 |
oclc_num | 849936211 |
open_access_boolean | |
owner | DE-12 DE-92 |
owner_facet | DE-12 DE-92 |
physical | 1 online resource (ix, 309 pages) |
psigel | ZDB-20-CBO ZDB-20-CBO BSB_PDA_CBO ZDB-20-CBO FHN_PDA_CBO |
publishDate | 1997 |
publishDateSearch | 1997 |
publishDateSort | 1997 |
publisher | Cambridge University Press |
record_format | marc |
spelling | Atomic and ion collisions in solids and at surfaces theory, simulation and applications edited by Roger Smith ; [contributors], Roger Smith [and others] Atomic & Ion Collisions in Solids & at Surfaces Cambridge Cambridge University Press 1997 1 online resource (ix, 309 pages) txt rdacontent c rdamedia cr rdacarrier Title from publisher's bibliographic system (viewed on 05 Oct 2015) 1 Introduction 2 The binary collision 3 Interatomic potentials 4 Electronic energy loss models 5 Transport models 6 The rest distribution of primary ions in amorphous targets 7 Binary collision algorithms 8 Molecular dynamics 9 Surface topography This 1997 book is an introduction to the application of computer simulation and theory in the study of the interaction of energetic particles (< 1 eV to the MeV range) with solid surfaces. The authors describe methods which are applicable both to hard collisions between nuclear cores of atoms down to soft interactions, where chemical effects or long-range forces dominate. In surface science, potential applications include surface atomic structure determination using ion scattering spectroscopy or element analysis using SIMS or other techniques that involve depth profiling. Industrial applications include optical or hard coating deposition, ion implantation in semiconductor device manufacture or nanotechnology. Plasma-sidewall interaction in fusion devices may also be studied using the techniques described. This book will be of interest to graduate students and researchers, both academic and industrial, in surface science, semiconductor engineering, thin-film deposition and particle-surface interactions, in departments of physics, chemistry and electrical engineering Collisions (Nuclear physics) Solids / Surfaces Festkörperoberfläche (DE-588)4127823-9 gnd rswk-swf Atomstoß (DE-588)4135380-8 gnd rswk-swf Ionenstoß (DE-588)4162346-0 gnd rswk-swf Festkörperoberfläche (DE-588)4127823-9 s Atomstoß (DE-588)4135380-8 s Ionenstoß (DE-588)4162346-0 s 1\p DE-604 Smith, Roger 1947- (DE-588)136841708 edt Erscheint auch als Druckausgabe 978-0-521-02030-5 Erscheint auch als Druckausgabe 978-0-521-44022-6 https://doi.org/10.1017/CBO9780511524325 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Atomic and ion collisions in solids and at surfaces theory, simulation and applications Introduction The binary collision Interatomic potentials Electronic energy loss models Transport models The rest distribution of primary ions in amorphous targets Binary collision algorithms Molecular dynamics Surface topography Collisions (Nuclear physics) Solids / Surfaces Festkörperoberfläche (DE-588)4127823-9 gnd Atomstoß (DE-588)4135380-8 gnd Ionenstoß (DE-588)4162346-0 gnd |
subject_GND | (DE-588)4127823-9 (DE-588)4135380-8 (DE-588)4162346-0 |
title | Atomic and ion collisions in solids and at surfaces theory, simulation and applications |
title_alt | Atomic & Ion Collisions in Solids & at Surfaces Introduction The binary collision Interatomic potentials Electronic energy loss models Transport models The rest distribution of primary ions in amorphous targets Binary collision algorithms Molecular dynamics Surface topography |
title_auth | Atomic and ion collisions in solids and at surfaces theory, simulation and applications |
title_exact_search | Atomic and ion collisions in solids and at surfaces theory, simulation and applications |
title_full | Atomic and ion collisions in solids and at surfaces theory, simulation and applications edited by Roger Smith ; [contributors], Roger Smith [and others] |
title_fullStr | Atomic and ion collisions in solids and at surfaces theory, simulation and applications edited by Roger Smith ; [contributors], Roger Smith [and others] |
title_full_unstemmed | Atomic and ion collisions in solids and at surfaces theory, simulation and applications edited by Roger Smith ; [contributors], Roger Smith [and others] |
title_short | Atomic and ion collisions in solids and at surfaces |
title_sort | atomic and ion collisions in solids and at surfaces theory simulation and applications |
title_sub | theory, simulation and applications |
topic | Collisions (Nuclear physics) Solids / Surfaces Festkörperoberfläche (DE-588)4127823-9 gnd Atomstoß (DE-588)4135380-8 gnd Ionenstoß (DE-588)4162346-0 gnd |
topic_facet | Collisions (Nuclear physics) Solids / Surfaces Festkörperoberfläche Atomstoß Ionenstoß |
url | https://doi.org/10.1017/CBO9780511524325 |
work_keys_str_mv | AT smithroger atomicandioncollisionsinsolidsandatsurfacestheorysimulationandapplications AT smithroger atomicioncollisionsinsolidsatsurfaces |