Inertial MEMS: principles and practice
A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge University Press
2011
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| Schlagworte: | |
| Online-Zugang: | BSB01 FHN01 Volltext |
| Zusammenfassung: | A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area |
| Beschreibung: | Title from publisher's bibliographic system (viewed on 05 Oct 2015) |
| Beschreibung: | 1 online resource (xiv, 475 pages) |
| ISBN: | 9780511933899 |
| DOI: | 10.1017/CBO9780511933899 |
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| 505 | 8 | |a Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index | |
| 520 | |a A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area | ||
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| author | Kempe, Volker |
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| contents | Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index |
| ctrlnum | (ZDB-20-CBO)CR9780511933899 (OCoLC)837924086 (DE-599)BVBBV043943917 |
| dewey-full | 629.04/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 629 - Other branches of engineering |
| dewey-raw | 629.04/5 |
| dewey-search | 629.04/5 |
| dewey-sort | 3629.04 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik Verkehr / Transport |
| doi_str_mv | 10.1017/CBO9780511933899 |
| format | Electronic eBook |
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| isbn | 9780511933899 |
| language | English |
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| spelling | Kempe, Volker Verfasser aut Inertial MEMS principles and practice Volker Kempe Cambridge Cambridge University Press 2011 1 online resource (xiv, 475 pages) txt rdacontent c rdamedia cr rdacarrier Title from publisher's bibliographic system (viewed on 05 Oct 2015) Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area Microelectromechanical systems Inertial navigation systems BioMEMS. MEMS (DE-588)4824724-8 gnd rswk-swf Beschleunigungssensor (DE-588)4144872-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Beschleunigungssensor (DE-588)4144872-8 s 1\p DE-604 Erscheint auch als Druckausgabe 978-0-521-76658-6 https://doi.org/10.1017/CBO9780511933899 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Kempe, Volker Inertial MEMS principles and practice Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index Microelectromechanical systems Inertial navigation systems BioMEMS. MEMS (DE-588)4824724-8 gnd Beschleunigungssensor (DE-588)4144872-8 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4144872-8 |
| title | Inertial MEMS principles and practice |
| title_auth | Inertial MEMS principles and practice |
| title_exact_search | Inertial MEMS principles and practice |
| title_full | Inertial MEMS principles and practice Volker Kempe |
| title_fullStr | Inertial MEMS principles and practice Volker Kempe |
| title_full_unstemmed | Inertial MEMS principles and practice Volker Kempe |
| title_short | Inertial MEMS |
| title_sort | inertial mems principles and practice |
| title_sub | principles and practice |
| topic | Microelectromechanical systems Inertial navigation systems BioMEMS. MEMS (DE-588)4824724-8 gnd Beschleunigungssensor (DE-588)4144872-8 gnd |
| topic_facet | Microelectromechanical systems Inertial navigation systems BioMEMS. MEMS Beschleunigungssensor |
| url | https://doi.org/10.1017/CBO9780511933899 |
| work_keys_str_mv | AT kempevolker inertialmemsprinciplesandpractice |