Physics of radio-frequency plasmas:
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics,...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge University Press
2011
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| Schlagworte: | |
| Online-Zugang: | BSB01 FHN01 URL des Erstveröffentlichers |
| Zusammenfassung: | Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations |
| Beschreibung: | Title from publisher's bibliographic system (viewed on 05 Oct 2015) |
| Beschreibung: | 1 online resource (viii, 385 pages) |
| ISBN: | 9780511974342 |
| DOI: | 10.1017/CBO9780511974342 |
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| 245 | 1 | 0 | |a Physics of radio-frequency plasmas |c Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University |
| 264 | 1 | |a Cambridge |b Cambridge University Press |c 2011 | |
| 300 | |a 1 online resource (viii, 385 pages) | ||
| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Title from publisher's bibliographic system (viewed on 05 Oct 2015) | ||
| 505 | 8 | |a Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index | |
| 520 | |a Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations | ||
| 650 | 4 | |a Low temperature plasmas | |
| 650 | 4 | |a Radio frequency | |
| 650 | 0 | 7 | |a Plasmaphysik |0 (DE-588)4046259-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Hochfrequenzplasma |0 (DE-588)4498170-3 |2 gnd |9 rswk-swf |
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| 650 | 0 | 7 | |a Plasma |0 (DE-588)4046249-3 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Plasmaphysik |0 (DE-588)4046259-6 |D s |
| 689 | 0 | 1 | |a Hochfrequenzplasma |0 (DE-588)4498170-3 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 689 | 1 | 0 | |a Plasma |0 (DE-588)4046249-3 |D s |
| 689 | 1 | 1 | |a Hochfrequenzheizung |0 (DE-588)4290572-2 |D s |
| 689 | 1 | |8 2\p |5 DE-604 | |
| 700 | 1 | |a Braithwaite, Nicholas |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 978-0-521-76300-4 |
| 856 | 4 | 0 | |u https://doi.org/10.1017/CBO9780511974342 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
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Datensatz im Suchindex
| _version_ | 1804176887219486720 |
|---|---|
| any_adam_object | |
| author | Chabert, Pascal 1969- |
| author_facet | Chabert, Pascal 1969- |
| author_role | aut |
| author_sort | Chabert, Pascal 1969- |
| author_variant | p c pc |
| building | Verbundindex |
| bvnumber | BV043943387 |
| classification_rvk | UR 8000 |
| collection | ZDB-20-CBO |
| contents | Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index |
| ctrlnum | (ZDB-20-CBO)CR9780511974342 (OCoLC)874166829 (DE-599)BVBBV043943387 |
| dewey-full | 621.044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.044 |
| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| doi_str_mv | 10.1017/CBO9780511974342 |
| format | Electronic eBook |
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| id | DE-604.BV043943387 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:39:19Z |
| institution | BVB |
| isbn | 9780511974342 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029352357 |
| oclc_num | 874166829 |
| open_access_boolean | |
| owner | DE-12 DE-92 |
| owner_facet | DE-12 DE-92 |
| physical | 1 online resource (viii, 385 pages) |
| psigel | ZDB-20-CBO ZDB-20-CBO BSB_PDA_CBO ZDB-20-CBO FHN_PDA_CBO |
| publishDate | 2011 |
| publishDateSearch | 2011 |
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| publisher | Cambridge University Press |
| record_format | marc |
| spelling | Chabert, Pascal 1969- Verfasser aut Physics of radio-frequency plasmas Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University Cambridge Cambridge University Press 2011 1 online resource (viii, 385 pages) txt rdacontent c rdamedia cr rdacarrier Title from publisher's bibliographic system (viewed on 05 Oct 2015) Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations Low temperature plasmas Radio frequency Plasmaphysik (DE-588)4046259-6 gnd rswk-swf Hochfrequenzplasma (DE-588)4498170-3 gnd rswk-swf Hochfrequenzheizung (DE-588)4290572-2 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Plasmaphysik (DE-588)4046259-6 s Hochfrequenzplasma (DE-588)4498170-3 s 1\p DE-604 Plasma (DE-588)4046249-3 s Hochfrequenzheizung (DE-588)4290572-2 s 2\p DE-604 Braithwaite, Nicholas Sonstige oth Erscheint auch als Druckausgabe 978-0-521-76300-4 https://doi.org/10.1017/CBO9780511974342 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Chabert, Pascal 1969- Physics of radio-frequency plasmas Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index Low temperature plasmas Radio frequency Plasmaphysik (DE-588)4046259-6 gnd Hochfrequenzplasma (DE-588)4498170-3 gnd Hochfrequenzheizung (DE-588)4290572-2 gnd Plasma (DE-588)4046249-3 gnd |
| subject_GND | (DE-588)4046259-6 (DE-588)4498170-3 (DE-588)4290572-2 (DE-588)4046249-3 |
| title | Physics of radio-frequency plasmas |
| title_auth | Physics of radio-frequency plasmas |
| title_exact_search | Physics of radio-frequency plasmas |
| title_full | Physics of radio-frequency plasmas Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University |
| title_fullStr | Physics of radio-frequency plasmas Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University |
| title_full_unstemmed | Physics of radio-frequency plasmas Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University |
| title_short | Physics of radio-frequency plasmas |
| title_sort | physics of radio frequency plasmas |
| topic | Low temperature plasmas Radio frequency Plasmaphysik (DE-588)4046259-6 gnd Hochfrequenzplasma (DE-588)4498170-3 gnd Hochfrequenzheizung (DE-588)4290572-2 gnd Plasma (DE-588)4046249-3 gnd |
| topic_facet | Low temperature plasmas Radio frequency Plasmaphysik Hochfrequenzplasma Hochfrequenzheizung Plasma |
| url | https://doi.org/10.1017/CBO9780511974342 |
| work_keys_str_mv | AT chabertpascal physicsofradiofrequencyplasmas AT braithwaitenicholas physicsofradiofrequencyplasmas |