Micro process engineering: fundamentals, devices, fabrication, and applications
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Bibliographic Details
Other Authors: Kockmann, Norbert (Editor)
Format: Electronic eBook
Language:English
Published: Weinheim Wiley-VCH [2013]
Series:Advanced micro & nanosystems 5
Subjects:
Online Access:FHD01
Physical Description:1 Online-Ressource (XXII, 507 Seiten) Illustrationen, Diagramme
ISBN:9783527675050
9783527335008

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!