Gettering and defect engineering in semiconductor technology XIV: selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria
Gespeichert in:
Körperschaft: | |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Durnten-Zuerich
Trans Tech
©2011
|
Schriftenreihe: | Diffusion and defect data
v. 178-179 |
Schlagworte: | |
Online-Zugang: | FAW01 FAW02 |
Beschreibung: | Also called: GADEST 2011 selected papers Includes bibliographical references and indexes The papers contained herein cover the most important and timely issues in the field of "Gettering and Defect Engineering in Semiconductor Technology", ranging from the theoretical analysis of defect problems to practical engineering solutions, with the emphasis on Si-based materials. Apart from the traditional topics of defect and materials engineering, characterization, modeling and simulation, and the co-integration of various material classes, topics such as materials for solar cells and photonics are discussed. Defects in graphene and in nanocrystals and nanowires are also treated, making this a very up-to-date survey of the field. Review from Book News Inc.: Selected papers from a September 2011 meeting deal with fundamental and technological aspects of defects in electronic materials and devices. Papers are organized into 12 sections on areas such as silicon-based and advanced semiconductor materials, nanocrystals and quantum dots, crystalline silicon for solar cells, point defects in Si, defects at interfaces, defect and impurity characterization, gettering and defect engineering, advanced solar cells, silicon-based photonics, and modeling and simulation. Some specific topics addressed include recombination activity of twin boundaries in silicon ribbons, hydrogen decoration of vacancy related complexes in hydrogen implanted silicon, analysis of contaminated oxide-silicon interfaces, and spectroscopic studies of iron and chromium in germanium. Other areas examined include oxygen precipitation studied by X-ray diffraction techniques, structural defect studies of semiconductor crystals with Laue topography, tailoring the electrical properties of undoped GaP, and homogeneous and heterogeneous nucleation of oxygen in S-CZ. Jantsch and Schffler are affiliated with Johannes Kepler University, Austria |
Beschreibung: | xii, 520 pages |
ISBN: | 9783038135159 3038135151 9783037852323 3037852321 |
Internformat
MARC
LEADER | 00000nmm a2200000zcb4500 | ||
---|---|---|---|
001 | BV043774624 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 160920s2011 |||| o||u| ||||||eng d | ||
020 | |a 9783038135159 |9 978-3-03813-515-9 | ||
020 | |a 3038135151 |9 3-03813-515-1 | ||
020 | |a 9783037852323 |9 978-3-03785-232-3 | ||
020 | |a 3037852321 |9 3-03785-232-1 | ||
035 | |a (ZDB-4-EBA)ocn823937707 | ||
035 | |a (OCoLC)823937707 | ||
035 | |a (DE-599)BVBBV043774624 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-1046 |a DE-1047 | ||
082 | 0 | |a 621.38152 |2 23 | |
110 | 2 | |a International Meeting on Gettering and Defect Engineering in Semiconductor Technology < 2011, Loipersdorf, Austria> |e Verfasser |4 aut | |
245 | 1 | 0 | |a Gettering and defect engineering in semiconductor technology XIV |b selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria |c edited by W. Jantsch and F. Schäffler |
246 | 1 | 3 | |a GADEST 2011 selected papers |
264 | 1 | |a Durnten-Zuerich |b Trans Tech |c ©2011 | |
300 | |a xii, 520 pages | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Diffusion and defect data |v v. 178-179 | |
500 | |a Also called: GADEST 2011 selected papers | ||
500 | |a Includes bibliographical references and indexes | ||
500 | |a The papers contained herein cover the most important and timely issues in the field of "Gettering and Defect Engineering in Semiconductor Technology", ranging from the theoretical analysis of defect problems to practical engineering solutions, with the emphasis on Si-based materials. Apart from the traditional topics of defect and materials engineering, characterization, modeling and simulation, and the co-integration of various material classes, topics such as materials for solar cells and photonics are discussed. Defects in graphene and in nanocrystals and nanowires are also treated, making this a very up-to-date survey of the field. Review from Book News Inc.: Selected papers from a September 2011 meeting deal with fundamental and technological aspects of defects in electronic materials and devices. Papers are organized into 12 sections on areas such as silicon-based and advanced semiconductor materials, nanocrystals and quantum dots, crystalline silicon for solar cells, point defects in Si, defects at interfaces, defect and impurity characterization, gettering and defect engineering, advanced solar cells, silicon-based photonics, and modeling and simulation. Some specific topics addressed include recombination activity of twin boundaries in silicon ribbons, hydrogen decoration of vacancy related complexes in hydrogen implanted silicon, analysis of contaminated oxide-silicon interfaces, and spectroscopic studies of iron and chromium in germanium. Other areas examined include oxygen precipitation studied by X-ray diffraction techniques, structural defect studies of semiconductor crystals with Laue topography, tailoring the electrical properties of undoped GaP, and homogeneous and heterogeneous nucleation of oxygen in S-CZ. Jantsch and Schffler are affiliated with Johannes Kepler University, Austria | ||
650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Semiconductors |2 bisacsh | |
650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Solid State |2 bisacsh | |
650 | 7 | |a Electrical engineering / Materials |2 fast | |
650 | 7 | |a Getters |2 fast | |
650 | 7 | |a Semiconductors |2 fast | |
650 | 7 | |a Silicon crystals / Defects |2 fast | |
650 | 4 | |a Semiconductors |v Congresses | |
650 | 4 | |a Getters |v Congresses | |
650 | 4 | |a Silicon crystals |x Defects |v Congresses | |
650 | 4 | |a Electrical engineering |x Materials |v Congresses | |
655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
700 | 1 | |a Jantsch, W. |d 1946- |e Sonstige |4 oth | |
700 | 1 | |a Schläffer, F.77608L |e Sonstige |4 oth | |
912 | |a ZDB-4-EBA | ||
999 | |a oai:aleph.bib-bvb.de:BVB01-029185684 | ||
966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553229 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553229 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext |
Datensatz im Suchindex
_version_ | 1804176599678976000 |
---|---|
any_adam_object | |
author_corporate | International Meeting on Gettering and Defect Engineering in Semiconductor Technology < 2011, Loipersdorf, Austria> |
author_corporate_role | aut |
author_facet | International Meeting on Gettering and Defect Engineering in Semiconductor Technology < 2011, Loipersdorf, Austria> |
author_sort | International Meeting on Gettering and Defect Engineering in Semiconductor Technology < 2011, Loipersdorf, Austria> |
building | Verbundindex |
bvnumber | BV043774624 |
collection | ZDB-4-EBA |
ctrlnum | (ZDB-4-EBA)ocn823937707 (OCoLC)823937707 (DE-599)BVBBV043774624 |
dewey-full | 621.38152 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.38152 |
dewey-search | 621.38152 |
dewey-sort | 3621.38152 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04375nmm a2200565zcb4500</leader><controlfield tag="001">BV043774624</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">160920s2011 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783038135159</subfield><subfield code="9">978-3-03813-515-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3038135151</subfield><subfield code="9">3-03813-515-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783037852323</subfield><subfield code="9">978-3-03785-232-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3037852321</subfield><subfield code="9">3-03785-232-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-4-EBA)ocn823937707</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)823937707</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043774624</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield><subfield code="2">23</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">International Meeting on Gettering and Defect Engineering in Semiconductor Technology < 2011, Loipersdorf, Austria></subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Gettering and defect engineering in semiconductor technology XIV</subfield><subfield code="b">selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria</subfield><subfield code="c">edited by W. Jantsch and F. Schäffler</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">GADEST 2011 selected papers</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Durnten-Zuerich</subfield><subfield code="b">Trans Tech</subfield><subfield code="c">©2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xii, 520 pages</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Diffusion and defect data</subfield><subfield code="v">v. 178-179</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Also called: GADEST 2011 selected papers</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and indexes</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">The papers contained herein cover the most important and timely issues in the field of "Gettering and Defect Engineering in Semiconductor Technology", ranging from the theoretical analysis of defect problems to practical engineering solutions, with the emphasis on Si-based materials. Apart from the traditional topics of defect and materials engineering, characterization, modeling and simulation, and the co-integration of various material classes, topics such as materials for solar cells and photonics are discussed. Defects in graphene and in nanocrystals and nanowires are also treated, making this a very up-to-date survey of the field. Review from Book News Inc.: Selected papers from a September 2011 meeting deal with fundamental and technological aspects of defects in electronic materials and devices. Papers are organized into 12 sections on areas such as silicon-based and advanced semiconductor materials, nanocrystals and quantum dots, crystalline silicon for solar cells, point defects in Si, defects at interfaces, defect and impurity characterization, gettering and defect engineering, advanced solar cells, silicon-based photonics, and modeling and simulation. Some specific topics addressed include recombination activity of twin boundaries in silicon ribbons, hydrogen decoration of vacancy related complexes in hydrogen implanted silicon, analysis of contaminated oxide-silicon interfaces, and spectroscopic studies of iron and chromium in germanium. Other areas examined include oxygen precipitation studied by X-ray diffraction techniques, structural defect studies of semiconductor crystals with Laue topography, tailoring the electrical properties of undoped GaP, and homogeneous and heterogeneous nucleation of oxygen in S-CZ. Jantsch and Schffler are affiliated with Johannes Kepler University, Austria</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Semiconductors</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Solid State</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Electrical engineering / Materials</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Getters</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconductors</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Silicon crystals / Defects</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Getters</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon crystals</subfield><subfield code="x">Defects</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electrical engineering</subfield><subfield code="x">Materials</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Jantsch, W.</subfield><subfield code="d">1946-</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Schläffer, F.77608L</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029185684</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553229</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=553229</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
genre | (DE-588)1071861417 Konferenzschrift gnd-content |
genre_facet | Konferenzschrift |
id | DE-604.BV043774624 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T07:34:45Z |
institution | BVB |
isbn | 9783038135159 3038135151 9783037852323 3037852321 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029185684 |
oclc_num | 823937707 |
open_access_boolean | |
owner | DE-1046 DE-1047 |
owner_facet | DE-1046 DE-1047 |
physical | xii, 520 pages |
psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
publishDate | 2011 |
publishDateSearch | 2011 |
publishDateSort | 2011 |
publisher | Trans Tech |
record_format | marc |
series2 | Diffusion and defect data |
spelling | International Meeting on Gettering and Defect Engineering in Semiconductor Technology < 2011, Loipersdorf, Austria> Verfasser aut Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria edited by W. Jantsch and F. Schäffler GADEST 2011 selected papers Durnten-Zuerich Trans Tech ©2011 xii, 520 pages txt rdacontent c rdamedia cr rdacarrier Diffusion and defect data v. 178-179 Also called: GADEST 2011 selected papers Includes bibliographical references and indexes The papers contained herein cover the most important and timely issues in the field of "Gettering and Defect Engineering in Semiconductor Technology", ranging from the theoretical analysis of defect problems to practical engineering solutions, with the emphasis on Si-based materials. Apart from the traditional topics of defect and materials engineering, characterization, modeling and simulation, and the co-integration of various material classes, topics such as materials for solar cells and photonics are discussed. Defects in graphene and in nanocrystals and nanowires are also treated, making this a very up-to-date survey of the field. Review from Book News Inc.: Selected papers from a September 2011 meeting deal with fundamental and technological aspects of defects in electronic materials and devices. Papers are organized into 12 sections on areas such as silicon-based and advanced semiconductor materials, nanocrystals and quantum dots, crystalline silicon for solar cells, point defects in Si, defects at interfaces, defect and impurity characterization, gettering and defect engineering, advanced solar cells, silicon-based photonics, and modeling and simulation. Some specific topics addressed include recombination activity of twin boundaries in silicon ribbons, hydrogen decoration of vacancy related complexes in hydrogen implanted silicon, analysis of contaminated oxide-silicon interfaces, and spectroscopic studies of iron and chromium in germanium. Other areas examined include oxygen precipitation studied by X-ray diffraction techniques, structural defect studies of semiconductor crystals with Laue topography, tailoring the electrical properties of undoped GaP, and homogeneous and heterogeneous nucleation of oxygen in S-CZ. Jantsch and Schffler are affiliated with Johannes Kepler University, Austria TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Electrical engineering / Materials fast Getters fast Semiconductors fast Silicon crystals / Defects fast Semiconductors Congresses Getters Congresses Silicon crystals Defects Congresses Electrical engineering Materials Congresses (DE-588)1071861417 Konferenzschrift gnd-content Jantsch, W. 1946- Sonstige oth Schläffer, F.77608L Sonstige oth |
spellingShingle | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Electrical engineering / Materials fast Getters fast Semiconductors fast Silicon crystals / Defects fast Semiconductors Congresses Getters Congresses Silicon crystals Defects Congresses Electrical engineering Materials Congresses |
subject_GND | (DE-588)1071861417 |
title | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria |
title_alt | GADEST 2011 selected papers |
title_auth | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria |
title_exact_search | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria |
title_full | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria edited by W. Jantsch and F. Schäffler |
title_fullStr | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria edited by W. Jantsch and F. Schäffler |
title_full_unstemmed | Gettering and defect engineering in semiconductor technology XIV selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria edited by W. Jantsch and F. Schäffler |
title_short | Gettering and defect engineering in semiconductor technology XIV |
title_sort | gettering and defect engineering in semiconductor technology xiv selected papers from the xivth international biannual meeting on gettering and defect engineering in semiconductor technology gadest2011 september 25 30 2011 loipersdorf furstenfeld austria |
title_sub | selected papers from the XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor [Technology], (GADEST2011) September 25-30, 2011, Loipersdorf (Fürstenfeld), Austria |
topic | TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Electrical engineering / Materials fast Getters fast Semiconductors fast Silicon crystals / Defects fast Semiconductors Congresses Getters Congresses Silicon crystals Defects Congresses Electrical engineering Materials Congresses |
topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Semiconductors TECHNOLOGY & ENGINEERING / Electronics / Solid State Electrical engineering / Materials Getters Semiconductors Silicon crystals / Defects Semiconductors Congresses Getters Congresses Silicon crystals Defects Congresses Electrical engineering Materials Congresses Konferenzschrift |
work_keys_str_mv | AT internationalmeetingongetteringanddefectengineeringinsemiconductortechnology2011loipersdorfaustria getteringanddefectengineeringinsemiconductortechnologyxivselectedpapersfromthexivthinternationalbiannualmeetingongetteringanddefectengineeringinsemiconductortechnologygadest2011september25302011loipersdorffurstenfeldaustria AT jantschw getteringanddefectengineeringinsemiconductortechnologyxivselectedpapersfromthexivthinternationalbiannualmeetingongetteringanddefectengineeringinsemiconductortechnologygadest2011september25302011loipersdorffurstenfeldaustria AT schlafferf77608l getteringanddefectengineeringinsemiconductortechnologyxivselectedpapersfromthexivthinternationalbiannualmeetingongetteringanddefectengineeringinsemiconductortechnologygadest2011september25302011loipersdorffurstenfeldaustria AT internationalmeetingongetteringanddefectengineeringinsemiconductortechnology2011loipersdorfaustria gadest2011selectedpapers AT jantschw gadest2011selectedpapers AT schlafferf77608l gadest2011selectedpapers |