Silicon science and advanced micro-device engineering I: selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Stafa-Zurich
Trans Tech Publications
2011
|
| Schriftenreihe: | Key engineering materials
v. 459 |
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 |
| Beschreibung: | Includes bibliographical references and indexes Spin and Orbital Magnetic Moment of Pd₃Co Evaluated by X-Ray Magnetic Diffraction Experiment -- Spin Density Distribution of YTiO₃ Observed by X-Ray Magnetic Diffraction -- Magnetic Compton Profile Measurement of Thin Films -- Ferromagnetic Resonance Frequency of Single-Layer Magnetic Metal Films with Lattice Distortion -- Effect of Annealing on Sub-Gap Absorption in Amorphous InGaZnO₄ Films -- Improvement of Crystallization Rate in Post-Annealed Ge₂Sb₂Te₅ Films -- Ionic Conductivity of Polycrystalline Li₂Ge[subscript x]Si[subscript 1-x]O₃ (x = 0.0~1.0) -- Structural Analysis of Rf Sputtered Er Doped Ta₂O₅Films -- Preparation of CaTiO₃:Pr Phosphor by Using CaB₂O₄ as a Flux -- Solvent-Free Synthesis of Siloxanes and their Usage as Potential Cross-Coupling Reagents -- Preparation of Anisotropic Chitosan Hydrogel with Birefringence and Analysis of Gel Formation Process -- - Thermosensitive Micelles Composed of Poly(lactide)-g-Poly(NIPAM-co-HEMA) Graft Copolymers -- Nano-Platelet Structure of Clay Materials Observed by Atomic Force Microscope -- Synthesis and Properties of Fluorescent Biological Molecules Labeled with Novel Silylated Perylene Derivative -- Effect of Organometallic Compounds on the Formation of Carbon Nanostructures by Pulsed Electric Discharge of Fluorine-Containing Organic Liquid between Metal Electrodes -- Control of Methanol Crossover Using a Perforated Metal Sheet for DMFC Application -- A Key Factor for the Actual Application of a Vapor Feed Passive DMFC Operated with High Concentration of Methanol -- Relationship between Dielectric Characteristic by DEP Levitation and Differentiation Activity for Stem Cells -- Application of Micro-Metal Textile for Flexible Dye-Sensitized Solar Cell -- - The Hydrophobicity of Micro Water Pool and the Interfacial Fluidity of PC-Based W/O Microemulsion Droplet Involved with Reactivity of Phospholipase A₂ -- Simple Nanoimprint Lithography with 50 nm Resolution Using Vacuum Packing -- Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays -- Self-Assembled Nanodot Fabrication by Using Diblock Copolymer -- Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block Copolymers -- Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe -- Prototype of Frame-Type Cantilever for Biosensor and Femtogram Detection -- Large Resistance Ratio for High Reliability of Multi-Level Storage in Phase-Change Memory -- Proposed Phase-Change Memory with a Step-Like Channel for High-Performance Multi-State Storage -- - Mach-Zehnder Type Thermo-Optic Switch with Antenna-Coupled Y-Junction Fabricated by Selective Photobleaching of Polysilane Films -- Polarization Control of SOA-Fiber Ring Laser -- Theoretical Analysis of Photonic Band Gaps and Defect Modes of Novel Photonic Crystal Waveguides Consisting of Si-Ion Implanted SiO₂ Using the Finite-Difference Time-Domain Method -- Design and Fabrication of Novel Photonic Crystal Waveguide Consisting of Si-Ion Implanted SiO₂ Layers -- Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films -- Tilt Mechanism for Precision Control of Down-Slope Component of Gravitational Force for Micro Force Generation -- Microforce Material Tester Using Small Pendulum -- Interdigital Ring Coupler Sensor for Parameter Estimation of Moving Objects -- A Design Method for Two-Degree-of-Freedom Multi-Period Repetitive Control Systems -- - A Design Method for Modified PID Control Systems to Attenuate Unknown Disturbances -- A Design Method for Stabilizing Modified Smith Predictors for Multiple-Input/Multiple-Output Time-Delay Plants -- A Novel Thermoelectric System with Conductive Metal Rods and its Effective Seebeck Coefficients -- Architecture of Wideband High-Efficiency Envelope Tracking Power Amplifier for Base Station -- High-Speed Data Transmission Techniques Using Raised Cosine Signaling -- High-Speed Multiple-Valued Data Transmission Based on Time-Domain Pre-Emphasis Techniques Dynamics Simulation of Microbubbles in Ultrasonic Wave Field Considering the Secondary Bjerknes Force This special issue contains the proceedings of a joint meeting of the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), organized by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center, Gunma University, held on the 10th and 11th of December 2009 in Kiryu, Japan. The scope of these proceedings encompasses: "Materials Science," "Chemical Science and Technology," "Nano-Science and Technology," "Photonics Devices and Technology," "Novel Measurement and System Technology," and "Information and Communication Engineering." |
| Beschreibung: | xii, 282 pages : |
| ISBN: | 9783038134817 3038134813 0878492178 9780878492176 |
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| 245 | 1 | 0 | |a Silicon science and advanced micro-device engineering I |b selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |c edited by Osamu Hanaizumi and Masafumi Unno |
| 246 | 1 | 3 | |a 5th International Symposium on Silicon Science |
| 246 | 1 | 3 | |a Fifth International Symposium on Silicon Science |
| 246 | 1 | 3 | |a International Symposium on Silicon Science |
| 246 | 1 | 3 | |a 1st International Conference on Advanced Micro-Device Engineering |
| 246 | 1 | 3 | |a First International Conference on Advanced Micro-Device Engineering |
| 246 | 1 | 3 | |a International Conference on Advanced Micro-Device Engineering |
| 246 | 1 | 3 | |a ISSS & AMDE 2009 |
| 246 | 1 | 3 | |a ISSS 2009 |
| 246 | 1 | 3 | |a AMDE 2009 |
| 264 | 1 | |a Stafa-Zurich |b Trans Tech Publications |c 2011 | |
| 300 | |a xii, 282 pages : | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Key engineering materials |v v. 459 | |
| 500 | |a Includes bibliographical references and indexes | ||
| 500 | |a Spin and Orbital Magnetic Moment of Pd₃Co Evaluated by X-Ray Magnetic Diffraction Experiment -- Spin Density Distribution of YTiO₃ Observed by X-Ray Magnetic Diffraction -- Magnetic Compton Profile Measurement of Thin Films -- Ferromagnetic Resonance Frequency of Single-Layer Magnetic Metal Films with Lattice Distortion -- Effect of Annealing on Sub-Gap Absorption in Amorphous InGaZnO₄ Films -- Improvement of Crystallization Rate in Post-Annealed Ge₂Sb₂Te₅ Films -- Ionic Conductivity of Polycrystalline Li₂Ge[subscript x]Si[subscript 1-x]O₃ (x = 0.0~1.0) -- Structural Analysis of Rf Sputtered Er Doped Ta₂O₅Films -- Preparation of CaTiO₃:Pr Phosphor by Using CaB₂O₄ as a Flux -- Solvent-Free Synthesis of Siloxanes and their Usage as Potential Cross-Coupling Reagents -- Preparation of Anisotropic Chitosan Hydrogel with Birefringence and Analysis of Gel Formation Process -- | ||
| 500 | |a - Thermosensitive Micelles Composed of Poly(lactide)-g-Poly(NIPAM-co-HEMA) Graft Copolymers -- Nano-Platelet Structure of Clay Materials Observed by Atomic Force Microscope -- Synthesis and Properties of Fluorescent Biological Molecules Labeled with Novel Silylated Perylene Derivative -- Effect of Organometallic Compounds on the Formation of Carbon Nanostructures by Pulsed Electric Discharge of Fluorine-Containing Organic Liquid between Metal Electrodes -- Control of Methanol Crossover Using a Perforated Metal Sheet for DMFC Application -- A Key Factor for the Actual Application of a Vapor Feed Passive DMFC Operated with High Concentration of Methanol -- Relationship between Dielectric Characteristic by DEP Levitation and Differentiation Activity for Stem Cells -- Application of Micro-Metal Textile for Flexible Dye-Sensitized Solar Cell -- | ||
| 500 | |a - The Hydrophobicity of Micro Water Pool and the Interfacial Fluidity of PC-Based W/O Microemulsion Droplet Involved with Reactivity of Phospholipase A₂ -- Simple Nanoimprint Lithography with 50 nm Resolution Using Vacuum Packing -- Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays -- Self-Assembled Nanodot Fabrication by Using Diblock Copolymer -- Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block Copolymers -- Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe -- Prototype of Frame-Type Cantilever for Biosensor and Femtogram Detection -- Large Resistance Ratio for High Reliability of Multi-Level Storage in Phase-Change Memory -- Proposed Phase-Change Memory with a Step-Like Channel for High-Performance Multi-State Storage -- | ||
| 500 | |a - Mach-Zehnder Type Thermo-Optic Switch with Antenna-Coupled Y-Junction Fabricated by Selective Photobleaching of Polysilane Films -- Polarization Control of SOA-Fiber Ring Laser -- Theoretical Analysis of Photonic Band Gaps and Defect Modes of Novel Photonic Crystal Waveguides Consisting of Si-Ion Implanted SiO₂ Using the Finite-Difference Time-Domain Method -- Design and Fabrication of Novel Photonic Crystal Waveguide Consisting of Si-Ion Implanted SiO₂ Layers -- Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films -- Tilt Mechanism for Precision Control of Down-Slope Component of Gravitational Force for Micro Force Generation -- Microforce Material Tester Using Small Pendulum -- Interdigital Ring Coupler Sensor for Parameter Estimation of Moving Objects -- A Design Method for Two-Degree-of-Freedom Multi-Period Repetitive Control Systems -- | ||
| 500 | |a - A Design Method for Modified PID Control Systems to Attenuate Unknown Disturbances -- A Design Method for Stabilizing Modified Smith Predictors for Multiple-Input/Multiple-Output Time-Delay Plants -- A Novel Thermoelectric System with Conductive Metal Rods and its Effective Seebeck Coefficients -- Architecture of Wideband High-Efficiency Envelope Tracking Power Amplifier for Base Station -- High-Speed Data Transmission Techniques Using Raised Cosine Signaling -- High-Speed Multiple-Valued Data Transmission Based on Time-Domain Pre-Emphasis Techniques Dynamics Simulation of Microbubbles in Ultrasonic Wave Field Considering the Secondary Bjerknes Force | ||
| 500 | |a This special issue contains the proceedings of a joint meeting of the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), organized by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center, Gunma University, held on the 10th and 11th of December 2009 in Kiryu, Japan. The scope of these proceedings encompasses: "Materials Science," "Chemical Science and Technology," "Nano-Science and Technology," "Photonics Devices and Technology," "Novel Measurement and System Technology," and "Information and Communication Engineering." | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a Microelectronics |2 fast | |
| 650 | 7 | |a Nanostructures |2 fast | |
| 650 | 7 | |a Silicon |2 fast | |
| 650 | 4 | |a Silicon |v Congresses | |
| 650 | 4 | |a Nanostructures |v Congresses | |
| 650 | 4 | |a Microelectronics |v Congresses | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Hanaizumi, Osamu |e Sonstige |4 oth | |
| 700 | 1 | |a Unno, Masafumi |e Sonstige |4 oth | |
| 710 | 2 | |a Gunma DaigakuXXbInternational Education and Research Center for Silicon Science |e Sonstige |4 oth | |
| 710 | 2 | |a Gunma DaigakuXXbAdvanced Technology Research Center |e Sonstige |4 oth | |
| 710 | 2 | |a International Conference on Advanced Micro-Device Engineering < 2009, Kiryū-shi, Japan> |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_corporate | International Symposium on Silicon Science < 2009, Kiryū-shi, Japan> |
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| author_facet | International Symposium on Silicon Science < 2009, Kiryū-shi, Japan> |
| author_sort | International Symposium on Silicon Science < 2009, Kiryū-shi, Japan> |
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| bvnumber | BV043774330 |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV043774330 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:34:44Z |
| institution | BVB |
| isbn | 9783038134817 3038134813 0878492178 9780878492176 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029185390 |
| oclc_num | 815479009 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | xii, 282 pages : |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Trans Tech Publications |
| record_format | marc |
| series2 | Key engineering materials |
| spelling | International Symposium on Silicon Science < 2009, Kiryū-shi, Japan> Verfasser aut Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 ISSS 2009 AMDE 2009 Stafa-Zurich Trans Tech Publications 2011 xii, 282 pages : txt rdacontent c rdamedia cr rdacarrier Key engineering materials v. 459 Includes bibliographical references and indexes Spin and Orbital Magnetic Moment of Pd₃Co Evaluated by X-Ray Magnetic Diffraction Experiment -- Spin Density Distribution of YTiO₃ Observed by X-Ray Magnetic Diffraction -- Magnetic Compton Profile Measurement of Thin Films -- Ferromagnetic Resonance Frequency of Single-Layer Magnetic Metal Films with Lattice Distortion -- Effect of Annealing on Sub-Gap Absorption in Amorphous InGaZnO₄ Films -- Improvement of Crystallization Rate in Post-Annealed Ge₂Sb₂Te₅ Films -- Ionic Conductivity of Polycrystalline Li₂Ge[subscript x]Si[subscript 1-x]O₃ (x = 0.0~1.0) -- Structural Analysis of Rf Sputtered Er Doped Ta₂O₅Films -- Preparation of CaTiO₃:Pr Phosphor by Using CaB₂O₄ as a Flux -- Solvent-Free Synthesis of Siloxanes and their Usage as Potential Cross-Coupling Reagents -- Preparation of Anisotropic Chitosan Hydrogel with Birefringence and Analysis of Gel Formation Process -- - Thermosensitive Micelles Composed of Poly(lactide)-g-Poly(NIPAM-co-HEMA) Graft Copolymers -- Nano-Platelet Structure of Clay Materials Observed by Atomic Force Microscope -- Synthesis and Properties of Fluorescent Biological Molecules Labeled with Novel Silylated Perylene Derivative -- Effect of Organometallic Compounds on the Formation of Carbon Nanostructures by Pulsed Electric Discharge of Fluorine-Containing Organic Liquid between Metal Electrodes -- Control of Methanol Crossover Using a Perforated Metal Sheet for DMFC Application -- A Key Factor for the Actual Application of a Vapor Feed Passive DMFC Operated with High Concentration of Methanol -- Relationship between Dielectric Characteristic by DEP Levitation and Differentiation Activity for Stem Cells -- Application of Micro-Metal Textile for Flexible Dye-Sensitized Solar Cell -- - The Hydrophobicity of Micro Water Pool and the Interfacial Fluidity of PC-Based W/O Microemulsion Droplet Involved with Reactivity of Phospholipase A₂ -- Simple Nanoimprint Lithography with 50 nm Resolution Using Vacuum Packing -- Fabrication of Nanometer Sized Si Dot Arrays Using Ar Ion Milling with Calixarene Resist Dot Arrays -- Self-Assembled Nanodot Fabrication by Using Diblock Copolymer -- Guide Pattern for Long-Range-Order Nanofabrication of Self-Assembled Block Copolymers -- Prototype of Illumination-Collection Mode Scanning Near-Field Optical Microscopy and Raman Spectroscopy with Gold Inner-Coated Aperture-Less Pyramidal Probe -- Prototype of Frame-Type Cantilever for Biosensor and Femtogram Detection -- Large Resistance Ratio for High Reliability of Multi-Level Storage in Phase-Change Memory -- Proposed Phase-Change Memory with a Step-Like Channel for High-Performance Multi-State Storage -- - Mach-Zehnder Type Thermo-Optic Switch with Antenna-Coupled Y-Junction Fabricated by Selective Photobleaching of Polysilane Films -- Polarization Control of SOA-Fiber Ring Laser -- Theoretical Analysis of Photonic Band Gaps and Defect Modes of Novel Photonic Crystal Waveguides Consisting of Si-Ion Implanted SiO₂ Using the Finite-Difference Time-Domain Method -- Design and Fabrication of Novel Photonic Crystal Waveguide Consisting of Si-Ion Implanted SiO₂ Layers -- Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films -- Tilt Mechanism for Precision Control of Down-Slope Component of Gravitational Force for Micro Force Generation -- Microforce Material Tester Using Small Pendulum -- Interdigital Ring Coupler Sensor for Parameter Estimation of Moving Objects -- A Design Method for Two-Degree-of-Freedom Multi-Period Repetitive Control Systems -- - A Design Method for Modified PID Control Systems to Attenuate Unknown Disturbances -- A Design Method for Stabilizing Modified Smith Predictors for Multiple-Input/Multiple-Output Time-Delay Plants -- A Novel Thermoelectric System with Conductive Metal Rods and its Effective Seebeck Coefficients -- Architecture of Wideband High-Efficiency Envelope Tracking Power Amplifier for Base Station -- High-Speed Data Transmission Techniques Using Raised Cosine Signaling -- High-Speed Multiple-Valued Data Transmission Based on Time-Domain Pre-Emphasis Techniques Dynamics Simulation of Microbubbles in Ultrasonic Wave Field Considering the Secondary Bjerknes Force This special issue contains the proceedings of a joint meeting of the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), organized by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center, Gunma University, held on the 10th and 11th of December 2009 in Kiryu, Japan. The scope of these proceedings encompasses: "Materials Science," "Chemical Science and Technology," "Nano-Science and Technology," "Photonics Devices and Technology," "Novel Measurement and System Technology," and "Information and Communication Engineering." TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectronics fast Nanostructures fast Silicon fast Silicon Congresses Nanostructures Congresses Microelectronics Congresses (DE-588)1071861417 Konferenzschrift gnd-content Hanaizumi, Osamu Sonstige oth Unno, Masafumi Sonstige oth Gunma DaigakuXXbInternational Education and Research Center for Silicon Science Sonstige oth Gunma DaigakuXXbAdvanced Technology Research Center Sonstige oth International Conference on Advanced Micro-Device Engineering < 2009, Kiryū-shi, Japan> Sonstige oth |
| spellingShingle | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectronics fast Nanostructures fast Silicon fast Silicon Congresses Nanostructures Congresses Microelectronics Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| title_alt | 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 ISSS 2009 AMDE 2009 |
| title_auth | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| title_exact_search | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| title_full | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno |
| title_fullStr | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno |
| title_full_unstemmed | Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan edited by Osamu Hanaizumi and Masafumi Unno |
| title_short | Silicon science and advanced micro-device engineering I |
| title_sort | silicon science and advanced micro device engineering i selected peer reviewed papers from the 5th international symposium on silicon science and the 1st international conference on advanced micro device engineering isss amde 2009 was held by the international education and research center for silicon science and the advanced technology research center atec gunma university on 10 and 11 december 2009 in kiryu japan |
| title_sub | selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectronics fast Nanostructures fast Silicon fast Silicon Congresses Nanostructures Congresses Microelectronics Congresses |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Digital TECHNOLOGY & ENGINEERING / Electronics / Microelectronics Microelectronics Nanostructures Silicon Silicon Congresses Nanostructures Congresses Microelectronics Congresses Konferenzschrift |
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