Holdings: Handbook of vacuum technology

Handbook of vacuum technology:

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Bibliographic Details
Other Authors:	Jousten, Karl 1960- (Editor)
Format:	Electronic eBook
Language:	English
Published:	Weinheim, Germany Wiley-VCH [2016]
Edition:	Second, completely revised and updated edition
Subjects:	Handbooks and manuals Vacuum technology Vacuum technology / Handbooks, manuals, etc Vakuumpumpe Vakuumtechnik Aufsatzsammlung Lehrbuch
Online Access:	FHI01 FRO01 FUBA1 UBG01 UBR01 UBY01 UER01 Volltext Inhaltsverzeichnis
Physical Description:	1 Online-Ressource (XXIV, 1025 Seiten) Illustrationen, Diagramme
ISBN:	9783527688265 9783527688258 9783527688241 9783527688234
DOI:	10.1002/9783527688265

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adam_text	Titel: Handbook of vacuum technology Autor: Jousten, Karl Jahr: 2016 Contents Preface XXIII 7 The History of Vacuum Science and Vacuum Technology 1 References 16 Further Reading 17 2 Applications and Scope of Vacuum Technology 19 References 27 3 Gas Laws and Kinetic Theory of Gases 29 3.1 Description of the Gas State 29 3.1.1 State Variables 29 3.1.2 Extensive Quantities 33 3.1.3 Equation of State of an Ideal Gas 35 3.1.4 Mixtures of Different Gas Species 37 3.2 Kinetic Theory of Gases 38 3.2.1 Model Conceptions 38 3.2.2 Wall Pressure due to Impacting Particles 39 3.2.3 Maxwell-Boltzmann Velocity Distribution 41 3.2.4 Collision Rate and Effusion 44 3.2.5 Size of Gas Particles and Free Path 45 3.3 Transport Properties of Gases 50 3.3.1 Pressure Dependence 50 3.3.2 Transport of Frictional Forces in Gases and Viscosity 51 3.3.3 Transport of Heat in Gases and Thermal Conductivity 55 3.3.4 Diffusion 63 3.4 Real Gases 65 3.4.1 Equations of State 65 3.4.2 Particle Properties and Gas Behavior 69 3.5 Vapors 75 3.5.1 Saturation Vapor Pressure 75 3.5.2 Evaporation Rate 79 VI \| Contents References 81 Comprehensive general treatments of the subject 82 4 Gas Flow 83 4.1 Types of Flows and Definitions 83 4.1.1 Characterizing Flow, Knudsen Number, and Reynolds Number 83 4.1.2 Gas Flow, Throughput, and Pumping Speed 87 4.1.3 Flow Resistance and Flow Conductance 90 4.1.4 Effective Pumping Speed of a Vacuum Pump 92 4.2 Inviscid Viscous Flow and Gas Dynamics 93 4.2.1 Conservation Laws 93 4.2.2 Gradual Change of Cross-Sectional Area: Isentropic Change of State 95 4.2.3 Critical Flow 98 4.2.4 Choked Flow at Low Outlet Pressure 100 4.2.5 Contraction of Flow into Aperture and Tube 101 4.2.6 Examples of Nozzle Flow 102 4.2.7 Straight and Oblique Compression Shocks 106 4.2.8 Laval Nozzle and Effluent Flow against Counterpressure 108 4.2.9 Flow Around a Corner (Prandtl-Meyer Flow) 111 4.3 Frictional-Viscous Flow through a Tube 114 4.3.1 Laminar and Turbulent Flows through a Tube 114 4.3.2 Airflow through a Tube 118 4.3.3 Air Infiow to a Vessel: Examples 120 4.3.4 Tube at the Inlet of a Pump: Examples 125 4.3.5 Flow through Ducts with Noncircular Cross Sections 128 4.3.6 Influence of Gas Species on Flow 130 4.4 Molecular Flow under High-Vacuum and Ultrahigh-Vacuum Conditions 131 4.4.1 Flow Pattern, Definitions, and Transmission Probability 131 4.4.2 Molecular Flow through an Aperture 135 4.4.3 Molecular Flow through a Tube with Constant Cross-Sectional Area 137 4.4.4 Molecular Flow through a Tube with Circular Cross Section 139 4A.5 Molecular Flow through Tubes with Simple Cross-Sectional Geometry 140 4.4.6 Tube Bend and Tube Elbow 143 4.4.7 Series Connection of Tube and Aperture 145 4.4.8 Series Connection of Components 146 4.4.9 Molecular Flow through Conical Tube with Circular Cross Section (Funnel) 148 4.4.10 Component in the Inlet Line of a Pump 150 4.5 Flow throughout the Entire Pressure Range 151 4.5.1 Flow Ranges 151 4.5.2 Flow through a Thin Aperture with Circular Cross Section 151 Contents VII 4.5.3 Flow through a Long Tube with Circular Cross Section 154 4.6 Flow with Temperature Difference, Thermal Effusion, and Transpiration 158 4.7 Measuring Flow Conductances 162 4.7.1 Necessity of Measurement 162 4.7.2 Measurement of Intrinsic Conductances (Inherent Conductances) 162 4.7.3 Calculation of Reduced Conductance (Assembly Conductance) 164 4.7 A Measuring Reduced Conductances 164 References 166 Further Reading 166 5 Analytical and Numerical Calculations of Rarefied Gas Flows 167 5.1 Main Concepts 167 5.1.1 Knudsen Number and Gas Rarefaction 167 5.1.2 Macroscopic Quantities 168 5.1.3 Velocity Distribution Function 168 5.1.4 Global Equilibrium 169 5.1.5 Local Equilibrium 170 5.1.6 Boltzmann Equation 170 5.1.7 Transport Coefficients 172 5.1.8 Model Equations 174 5.1.9 Gas-Surface Interaction 175 5.2 Methods of Calculations of Gas Flows 178 5.2.1 General Remarks 178 5.2.2 Deterministic Methods 178 5.2.3 Probabilistic Methods 179 5.3 Velocity Slip and Temperature Jump Phenomena 181 5.3.1 Viscous Slip Coefficient 182 5.3.2 Thermal Slip Coefficient 183 5.3.3 Temperature Jump Coefficient 184 5.4 Momentum and Heat Transfer Through Rarefied Gases 185 5.4.1 Planar Couette Flow 186 5.4.2 Cylindrical Couette Flow 189 5 A3 Heat Transfer between Two Plates 193 5.4.4 Heat Transfer between Two Coaxial Cylinders 195 5.5 Flows Through Long Pipes 199 5.5.1 Definitions 199 5.5.2 Free Molecular Regime 201 5.5.3 Slip Flow Regime 202 5.5.4 Transitional Regime 203 5.5.5 Arbitrary Pressure and Temperature Drops 208 5.5.6 Variable Cross Section 214 5.5.7 Thermomolecular Pressure Ratio 216 5.6 Flow Through an Orifice 218 5.7 Modeling of Holweck Pump 221 VIII Contents 5.8 Appendix A 223 5.8.1 Tables 223 References 225 6 Sorption and Diffusion 229 6.1 Sorption Phenomena and the Consequences, Definitions, and Terminology 229 6.2 Adsorption and Desorption Kinetics 234 6.2.1 Adsorption Rate 234 6.2.2 Desorption Rate 235 6.2.3 Hobson Model of a Pump-down Curve 238 6.2.4 Monolayer Adsorption Isotherms 242 6.2.5 Multilayer Adsorption and Brunauer-Emmett-Teller (BET) Isotherm 244 6.2.6 Monolayer Time 246 6.3 Absorption, Diffusion, and Outgassing 247 6.4 Permeation 254 References 256 Further Reading 256 7 Positive Displacement Pumps 259 7.1 Introduction and Overview 259 7.2 Oscillating Positive Displacement Pumps 262 7.2.1 Piston Pumps 262 7.2.2 Diaphragm Pumps 264 7.2.2.1 Design and Principle of Operation 264 7.2.2.2 Pumping Speed and Ultimate Pressure 265 7.2.2.3 Gas Ballast 266 7.2.2.4 Drive Concepts 267 7.2.2.5 Ultimate Pressure 267 7.2.2.6 Influence of Gas Species on Pumping Speed and Ultimate Pressure 269 7.2.2.7 Influence of Rotational Speed on Ultimate Pressure 269 7.2.2.8 Design Principles 269 7.2.2.9 Diaphragm Pumps in Chemical Laboratories 271 7.2.2.10 Diaphragm Pumps as Backing Pumps to Turbomolecular Pumps 272 7.2.2.11 Diaphragm Pumps Combined with Other Types of Vacuum Pumps 275 7.3 Single-Shaft Rotating Positive Displacement Pumps 276 7.3.1 Liquid Ring Vacuum Pumps 276 7.3.1.1 Design and Principle of Operation 277 7.3.1.2 Operating Properties and Dimensioning 278 7.3.1.3 Designs 281 7.3.1.4 Pump Units with Liquid Ring Vacuum Pumps 284 7.3.1.5 Suggestions for Economical Operation 286 7.3.2 Sliding Vane Rotary Pumps 287 7.3.2.1 Operating Principle and Design 288 Contents IX 7.3.2.2 Dry-Running Sliding Vane Rotary Pumps 289 7.3.2.3 Oil-Lubricated Sliding Vane Rotary Pumps 290 7.3.2.4 Once-Through Lubricated Sliding Vane Rotary Pumps 292 7.3.2.5 Operating Behavior and Recommendations 293 7.3.2.6 Characteristic Curves and Ratings 295 7.3.3 Rotary Plunger Pumps 296 7.3.3.1 Principle of Operation and Technical Design 296 7.3.3.2 A Comparison of Sliding Vane Rotary Pumps and Rotary Plunger Pumps 300 7.3.4 Trochoidal Pumps 300 7.3.5 Scroll Pumps 302 7.3.5.1 Principle of Compression 302 7.3.5.2 Design 303 7.3.5.3 Applications and Advantages 304 7.4 Twin-Spool Rotating Positive Displacement Pumps 305 7.4.1 Screw-Type Pumps 305 7.4.1.1 Operating Principle and Technical Design 305 7.4.1.2 Heat Behavior and Technical Notes 311 7.4.2 Claw Pumps 313 7.4.2.1 Compression Principle 314 7.4.2.2 Comparison with Roots Pumps 317 7.4.2.3 Multistage Claw Pumps and Pump Combinations 317 7.4.2.4 Speed Control 318 7.4.2.5 Fields of Application 319 7.4.3 Roots Pumps 319 7.4.3.1 Principle of Operation 319 7.4.3.2 Technical Setup 320 7.4.3.3 Theoretical Basics 322 7.4.3.4 Effective Gas Flow 322 7.4.3.5 Compression Ratio K0 at Zero Delivery 323 7.4.3.6 Effective Compression Ratio and Volumetrie Efficiency 324 7.4.3.7 Gradation of Pumping Speed between Fore Pump and Roots Pump 325 7.4.3.8 Pumping Speed and Ultimate Pressure 329 7.4.3.9 Installation and Operating Suggestions 331 7.5 Specific Properties of Oil-Sealed Positive Displacement Pumps 331 7.5.1 Pumping Speed and Producible Ultimate Pressure 331 7.5.1.1 Pumping Speed and Ultimate Partial Pressure 332 7.5.1.2 Ultimate Pressure and Oil Selection 332 7.5.2 OilBackflow 336 7.6 Basics of Positive Displacement Pumps 337 7.6.1 Pumping Down Vapors - Gas Ballast 337 7.6.2 Power Requirements 342 7.6.2.1 Isothermal Compression 343 7.6.2.2 Adiabatic Compression 343 X Contents 7.6.2.3 Polytropic Compression 343 7.6.2.4 Compression Power 344 7.7 Operating and Safety Recommendations 345 7.7.1 Installation 345 7.7.2 Starting and Shut Down, Inlet Valves 346 7.7.3 Pump Selection and Operating Recommendations 347 7.7.4 Technical Safety Recommendations 348 7.8 Specific Accessories for Positive Displacement Pumps 350 7.8.1 Sorption Traps 350 7.8.2 Safety Valves 351 7.8.3 Oil Filter and Oil Cleaning 352 7.8.4 Exhaust Filter (Oil-Mist Separator) 353 7.8.5 Dust Filters 355 References 356 Further Reading on Positive Displacement Pumps 359 8 Condensers 361 8.1 Condensation Processes Under Vacuum 361 8.1.1 Fundamentals 361 8.1.2 Condensation of Pure Vapors 363 8.1.3 Condensation of Gas-Vapor Mixtures 366 8.1.4 Coolants 369 8.2 Condenser Designs 370 8.2.1 Surface Condensers for Liquid Condensation 370 8.2.2 Direct Contact Condensers 372 8.2.3 Condensate Discharge 374 8.2.4 Surface Condensers for Solid Condensation 375 8.3 Integrating Condensers into Vacuum Systems 376 8.3.1 Condensers Combined with Vacuum Pumps 376 8.3.2 Control 379 8.4 Calculation Examples 380 References 382 9 Jet and Diffusion Pumps 383 9.1 Introduction and Overview 383 9.2 Liquid Jet Vacuum Pumps 385 9.3 Steam Jet Vacuum Pumps 387 9.3.1 Design and Function 387 9.3.2 Performance Data, Operating Behavior, and Control 389 9.3.3 Multistage Steam Jet Vacuum Pumps 393 9.3.4 Organic Vapors as Driving Pump Fluids 395 9.4 Diffusion Pumps 396 9.4.1 Design and Principle of Operation 396 Contents XI 9.4.2 Pump Fluids 400 9.4.3 Baffles and Vapor Traps 401 9.4.4 Fractionating and Degassing 403 9.4.5 Operating Suggestions 404 9.4.6 Pumping Speed, Critical Backing Pressure, Hybrid Pumps 405 9.4.7 Calculating Performance Characteristics of Diffusion and Vapor Jet Pumps by Using a Simple Pump Model 407 9.5 Diffusion Pumps Versus Vapor Jet Pumps 4i5 References 417 10 Molecular and Turbomolecular Pumps 419 10.1 Introduction 419 10.2 Molecular Pumps 421 10.2.1 Gaede Pump Stage 422 10.2.2 Holweck Pump Stage 426 10.2.3 Siegbahn Pump Stage 427 10.3 Molecular and Regenerative Drag Pump Combination 427 10.3.1 Regenerative Pump Mechanism 428 10.3.2 Pump Design and Applications 429 10.4 Physical Fundamentals of Turbomolecular Pump Stages 430 10.4.1 Pumping Mechanism 430 10.4.2 Pumping Speed and Compression Ratio 431 10.4.3 Gaede and Statistical Theory of the Pumping Effect 432 10.4.3.1 Consideration with Gaede 432 10.4.3.2 Statistical Consideration 434 10.4.4 Thermal Balance 436 10.5 Turbomolecular Pumps 439 10.5.1 Design and Function 439 10.5.2 Rotors of Turbomolecular Pumps 441 10.5.2.1 Rotor Design 441 10.5.2.2 Rotor Materials and Mechanical Requirements 442 10.5.3 Safety Requirements 442 10.5.4 Bearing Arrangements for Rotors in Turbomolecular Pumps 443 10.5.4.1 Shaft with Two Ball Bearings 444 10.5.4.2 Shaft With Permanent Magnet Bearing and Ball Bearing 445 10.5.4.3 Magnetic Bearings 445 10.5.5 Drives and Handling 447 10.5.6 Heating and Cooling 448 10.5.7 Special Designs 448 10.6 Performance Characteristics of Turbomolecular Pumps 450 10.6.1 Pumping Speed 450 10.6.2 Compression Ratio, Ultimate Pressure, and Base Pressure 451 10.6.3 Pump-down Times for Vacuum Chambers 452 10.6.4 Pumping of High Gas Throughputs 453 XII Contents 10.7 Operation and Maintenance of Turbomolecular Pumps 455 10.7.1 Backing Pump Selection 455 10.7.2 General Notes 455 10.7.3 Startup 455 10.7.4 Obtaining Base Pressure 456 10.7.5 Operation in Magnetic Fields 456 10.7.6 Venting 456 10.7.7 Maintenance 457 10.8 Applications 457 References 460 11 Sorption Pumps 463 11.1 Introduction 463 11.2 Adsorption Pumps 464 11.2.1 Working Principle 464 11.2.2 Design 466 11.2.3 Ultimate Vacuum and Pumping Speed 468 11.2.3.1 Ultimate Pressure with a Single Adsorption Pump 468 11.2.3.2 Ultimate Pressure with Two or More Adsorption Pumps 46 9 11.2.4 Operating Suggestions 471 11.3 Getter 472 11.3.1 Mode of Operation and Getter Types 472 11.3.2 NEG Pumps 474 11.3.2.1 Fundamentals of Bulk Getters/NEG 474 11.3.2.2 Design of NEG Pumps 478 11.3.2.3 Pumping Speed and Getter Capacity 479 11.3.2.4 Applications of NEG Pumps 481 11.3.2.5 Safety and Operating Recommendations 481 11.3.3 Evaporation/Sublimation Pumps 483 11.3.3.1 Evaporation Materials 483 11.3.3.2 Pumping Speed 484 11.3.3.3 Getter Capacity 486 11.3.3.4 Design of Evaporation Getters 487 11.4 Ion Getter Pumps 493 11.4.1 Working Principle 493 11.4.2 Technical Design (Diode Type) 497 11.4.3 Pumping Speed 498 11.4.4 The Differential Ion Pump 500 11.4.5 Triode Pumps 501 11.4.6 Distributed Ion Pumps 504 11.4.7 Residual Gas Spectrum 504 11.4.8 Operation 505 11.5 Orbitron Pumps 507 References 508 Further Reading 509 Contents XIII 12 Cryotechnology and Cryopumps 511 12.1 Introduction 511 12.2 Methods of Refrigeration 572 12.2.1 Gas Refrigeration Processes 513 12.2.1.1 Stirling Process 515 12.2.1.2 Gifford-McMahon Process 516 12.2.1.3 Pulse Tube Process 518 12.2.2 Cryostat with Liquid Cryogens 519 12.2.3 Measurement of Low Temperatures 520 12.3 Working Principles of Cryopumps 520 12.3.1 Gas Condensation 523 12.3.2 Cryosorpüon 525 12.3.2.1 Solid Adsorbents 526 12.3.2.2 Cryotrapping 530 12.4 Design of Cryopumps 531 12.4.1 Cryotechnological Constructive Parameters 53i 12.4.1.1 Thermal Radiation 531 12.4.1.2 Thermal Conduction 535 12.4.2 Vacuum Technology: Design Parameters 538 12.4.3 Construction Principles 541 12.4.3.1 Bath Cryopumps 541 12.4.3.2 Refrigerator Cryopumps 543 12.5 Characteristics of a Cryopump 547 12.5.1 Starting Pressure 547 12.5.2 Ultimate Pressure 548 12.5.3 Pumping Speed 549 12.5.4 Service Life 550 12.5.5 Capacity (Maximum Gas Intake) 552 12.5.6 Crossover Value 552 12.5.7 Maximum Tolerable pV Flow 552 12.5.8 Resistance to Thermal Radiation 552 12.5.9 Regeneration 552 12.5.10 Performance Comparison 555 12.6 Application Examples 555 12.6.1 Cryopumps with Forced Cooling Using Supercritical Helium 556 12.6.2 Combined Refrigerator/Liquid Cryopumps 558 12.6.3 Cryopumps with Forced Cooling Using Liquid Cryogen 559 12.6.4 Cryopumps in Large Research Applications 560 12.6.5 Cryopumps in Industrial Facilities 56i 12.6.6 Development Trends for Cryopumps 561 References 562 13 Total Pressure Vacuum Gauges 565 13.1 Introduction 565 13.2 Mechanical Vacuum Gauges 566 XIV Contents 13.2.1 Principle and Classification 566 13.2.2 Corrugated-Diaphragm Vacuum Gauges 567 13.2.3 Capsule Element Vacuum Gauges (Measuring Range 1-100 kPa) 568 13.2.4 Bourdon Tube Vacuum Gauges (Measuring Range 1-100 kPa) 569 13.2.4.1 Quartz Bourdon Tube Vacuum Gauges 570 13.2.5 Diaphragm (Membrane) Vacuum Gauges 571 13.2.5.1 Diaphragm (Membrane) Vacuum Gauges with Mechanical Displays (Measuring Range 0.1-100 kPa) 571 13.2.5.2 Diaphragm (Membrane) Vacuum Gauges with Electrical Converters 572 13.2.5.3 Diaphragm (Membrane) Vacuum Gauges Using the Piezoresistive Principle 574 13.2.5.4 Piezoelectric Vacuum Gauges 575 13.2.5.5 Resonant Diaphragm Vacuum Gauges 575 13.2.5.6 Capacitance Diaphragm Vacuum Gauges 576 13.2.5.7 Thermal Transpiration 580 13.2.6 Pressure Switches and Pressure Controllers 582 13.3 Spinning Rotor Gauges (Gas-Friction Vacuum Gauges) 584 13.3.1 Measuring Setup and Measuring Principle 584 13.3.2 Retarding Effect due to Gas Friction 586 13.3.3 Measuring Procedure 590 13.3.4 Extending the Measuring Range toward Higher Pressures 592 13.3.5 Measuring Uncertainty 592 13.4 Direct Electric Pressure Measuring Transducers 593 13.5 Thermal Conductivity Vacuum Gauges 594 13.5.1 Principle 594 13.5.2 Thermal Conductivity Vacuum Gauges with Constant Wire Temperature 597 13.5.3 Thermal Conductivity Vacuum Gauges with Constant Heating 601 13.5.4 Thermocouple Vacuum Gauges 602 13.5.5 Thermistors 603 13.5.6 Guidelines for Operating Thermal Conductivity Vacuum Gauges 603 13.6 Thermal Mass Flowmeters 604 13.7 Ionization Gauges 607 13.7.1 Principle and Classification 607 13.7.2 History of Ionization Gauges 608 13.7.3 Emitting-Cathode Ionization Gauges (Hot-Cathode Ionization Gauges) 610 13.7.3.1 Measurement Principle 610 13.7.3.2 Design of Emitting-Cathode Ionization Gauges (Hot-Cathode Ionization Gauges) 613 13.7.3.3 Concentric Triode 614 13.7.3.4 Fine-Vacuum Ionization Gauges 614 13.7.3.5 Bayard-Alpert Ionization Gauges 615 13.7.3.6 Extractor Ionization Gauges 620 Contents XV 13.7.3.7 Additional Types of Emitting-Cathode Ionization Gauges 623 13.7.3.8 Operating Suggestions for Emitting-Cathode Ionization Gauges 623 13.7.4 Crossed-Field Ionization Gauges 625 13.7.4.1 Penning Gauges 625 13.7.4.2 Magnetron and Inverted Magnetron 630 13.7.5 Comparison of Both Types of Ionization Gauges 631 13.7.6 General Suggestions 633 13.8 Combined Vacuum Gauges 637 References 639 14 Partial Pressure Vacuum Gauges and Leak Detectors 643 14.1 Introduction 643 14.2 Partial Pressure Analysis by Mass Spectrometry 643 14.2.1 Ion Source Design 648 14.2.1.1 Open Ion Sources (OIS) 649 14.2.1.2 Closed Ion Sources (CIS) 65i 14.2.1.3 Molecular Beam Ion Sources (MBIS) 652 14.2.2 Filament Materials 652 14.2.3 Artifacts in the Mass Spectrum due to the Ion Source 654 14.2.4 Mass Analyzers 655 14.2.4.1 Quadrupole Mass Analyzers 655 14.2.4.2 Miniaturized Quadrupole Mass Analyzers 659 14.2.4.3 Magnetic Sector Analyzers 661 14.2.4.4 Autoresonant Ion Trap Mass Analyzers 664 14.2.5 Ion Detectors 665 14.2.5.1 Faraday Cups 665 14.2.5.2 SEM Detection 666 14.2.5.3 Discrete Dynode Electron Multipliers 667 14.2.5.4 Continuous Dynode Electron Multipliers (CDEM) 668 14.2.5.5 Microchannel Plate Detectors 669 14.2.6 Software for Mass Spectrometer Control 670 14.2.6.1 Analog Scan, Ion Current versus Mass 670 14.2.6.2 Selected Peaks, Ion Current versus Time 671 14.2.6.3 Leak Detection Mode 671 14.2.7 Further Applications of Mass Spectrometers 671 14.3 Partial Pressure Measurement Using Optical Methods 672 14.4 Leak Detectors 675 14.4.1 Basic Principles and Historical Overview 675 14.4.2 Helium Leak Detectors 675 14.4.2.1 Requirements and General Functions of Vacuum Leak Detection 675 14.4.2.2 Helium Sector Field Mass Spectrometers 676 14.4.2.3 Inlet Pressure of Helium Leak Detectors 677 14.4.2.4 Time Response of Helium Leak Detectors 678 14.4.2.5 Operating Principles of Helium Leak Detectors 679 14.4.2.6 Sniffing Devices for Helium Leak Detectors 683 XVI Contents 14.4.2.7 Applications of Mass Spectrometer Helium Leak Detectors 684 14.4.3 Refrigerant Leak Detectors 685 14.4.3.1 Design and Operating Principle 685 14.4.3.2 Applications 687 14.4.4 Reference Leaks 687 14.4.4.1 Permeation Leaks 687 14.4.4.2 Conductance Leaks 688 14.4.4.3 Practical Realization of Reference Leaks 688 14.4.4.4 Calibrating Reference Leaks 689 14.4.5 Measuring Characteristics and Calibration of Leak Detectors 689 14.4.5.1 Leak Detectors as Test Equipment According to ISO 9001 689 14.4.5.2 Calibration Uncertainty 690 14.4.6 Leak Detectors Based on Other Sensor Principles 691 14.4.6.1 Helium Sniffers with Quartz Glass Membrane 691 14.4.6.2 Halogen Leak Detectors with Alkali Ion Sensors 691 14.4.6.3 Halogen Leak Detectors with Infrared Sensors 692 References 692 15 Calibrations and Standards 697 15.1 Introduction 697 15.2 Calibration of Vacuum Gauges 700 15.2.1 Primary Standards 700 15.2.1.1 Liquid Manometers 701 15.2.1.2 Compression Manometer after McLeod 704 15.2.1.3 Piston Gauges and Pressure Balances 707 15.2.1.4 Static Expansion Method 710 15.2.1.5 Continuous Expansion Method 716 15.2.1.6 Other Primary Standards 722 15.2.2 Calibration by Comparison 723 15.2.3 Capacitance Diaphragm Gauges 724 15.2.4 Spinning Rotor Gauges 728 15.2.5 Ionization Gauges 731 15.3 Calibrations of Residual Gas Analyzers 733 15.4 Calibration of Test Leaks 735 15.5 Standards for Determining Characteristics of Vacuum Pumps 738 References 742 16 Materials 747 16.1 Requirements and Overview of Materials 747 16.2 Materials for Vacuum Technology 749 16.2.1 Metals 749 16.2.1.1 The Most Important Metals and Metal Alloys 749 16.2.2 Technical Glass 753 Contents XVII 16.2.2.1 Basics 753 16.2.2.2 Properties of Important Glasses 755 16.2.3 Ceramic Materials 757 16.2.3.1 Basics 757 16.2.3.2 Properties of Important Ceramics 757 16.2.3.3 Ceramics in Vacuum Technology 758 16.2.3.4 Ceramic/Metal Joining Technologies 758 16.2.3.5 Zeolite 758 16.2.4 Plastics 760 16.2.4.1 Basics 760 16.2.4.2 Properties of Major Plastics 760 16.2.5 Vacuum Greases 760 16.2.6 Oils 762 16.2.7 Coolants 763 16.3 Gas Permeability and Gas Emissions of Materials 763 16.3.1 Fundamentals 763 16.3.2 Gas Permeability 763 16.3.2.1 Gas Permeability of Metals 764 16.3.2.2 Gas Permeability of Glasses and Ceramics 764 16.3.2.3 Gas Permeability of Plastics 767 16.3.3 Gas Emissions 768 16.3.3.1 Basics 768 16.3.3.2 Saturation Vapor Pressure 768 16.3.3.3 Surface Desorption, Gas Diffusion from Bulk Material, Reference Values for Gas Emissions 770 16.3.4 Gas Diffusion from Bulk Material 770 16.3.5 Reference Values for Total Gas Emission Rates 774 References 774 Further Reading 775 17 Vacuum Components, Seals, and Joints 777 17.1 Introduction 777 17.2 Vacuum Hygiene 778 17.3 Joining Technologies in Vacuum Technology 781 17.3.1 Permanent Connections 783 17.3.1.1 Welding 784 17.3.1.2 Brazing 786 17.3.1.3 Adhesive Bonding 791 17.3.2 Detachable Connections 793 17.3.2.1 Elastomer-Sealed, Static, Detachable Connections (KF, ISO, and Others) 794 17.3.2.2 Metal-Sealed, Static, Detachable Connections 802 17.4 Components 806 17.4.1 Standard Components and Chambers 806 17.4.2 Mechanical Feedthroughs 813 XVIIIJ Contents 17.4.3 Valves 817 17 .4.4 Electrical Feedthroughs 823 17.4.5 Optical Feedthroughs 829 17.4.6 Heat Supply and Dissipation 833 Abbreviations 839 References 840 18 Operating Vacuum Systems 843 18.1 Electronic Integration of Vacuum Systems 843 18.1.1 Control by Means of Process Sensors and Automated Data Processing 843 18.1.1.1 Requirements and Applications 843 18.1.2 Integrated Solutions 845 18.1.2.1 ASCII Protocols 846 18.1.2.2 Standardized Bus Systems 846 18.1.2.3 Sensor Integration According to SECS and HSMS Standards 847 18.1.2.4 Process-Data Analysis 849 18.2 Calculation of Vacuum Systems 85i 18.2.1 Analytical and Numerical Calculation 85i 18.2.2 Calculation by Analog Electrical Network 852 18.2.3 Ultimate and Working Pressure in Vacuum Systems 854 18.2.3.1 Ultimate Pressure 854 18.2.3.2 Operating Pressure 855 18.3 Pressure Control 859 18.4 Techniques for Operating Low-Vacuum Systems 860 18.4.1 Overview 860 18.4.2 Assembly of Low-Vacuum Systems 861 18.4.3 Pumps: Types and Pumping Speeds 862 18.4.4 Low-Vacuum Pump Stands 862 18.4.5 Low-Vacuum Pressure Measurement 864 18.4.6 Pressure and Pump-Down Times in Low Vacuum 864 18.4.7 Venting 869 18.5 Techniques for Operating Fine-Vacuum Systems 870 18.5.1 Overview 870 18.5.2 Assembly of Fine-Vacuum Systems 870 18.5.3 Pumps: Types and Pumping Speeds 871 18.5.4 Pressure Measurement 871 18.5.5 Pump-Down Time and Ultimate Pressure 872 18.5.6 Venting 877 18.5.7 Fine-vacuum Pump Stands 877 18.6 Techniques for Operating High-Vacuum Systems 879 18.6.1 Pumps: Types and Pumping Speeds 879 Contents XIX 18.6.2 Cleaning of Vacuum Gauges 880 18.6.3 High-Vacuum Pump Stands 882 18.6.3.1 High-Vacuum Pump Stands with Diffusion Pumps 882 18.6.3.2 High-Vacuum Pump Stands with Turbomolecular Pumps 889 18.6.3.3 Fully Automatic High-Vacuum Pump Stands 890 18.6.4 Pump-Down Time and Venting 89i 18.7 Techniques for Operating Ultrahigh-Vacuum Systems 892 18.7.1 Overview 892 18.7.2 Operating Guidelines for UHV Pumps 893 18.7.2.1 Adsorption Pumps 894 18.7.2.2 Ion Getter Pumps 894 18.7.2.3 Titanium Evaporation Pumps 895 18.7.2.4 Turbomolecular Pumps 896 18.7.2.5 Cryopumps 896 18.7.2.6 Bulk Getter (NEG) Pumps 896 18.7.3 Pressure Measurement 897 18.7.4 Pump-Down Times, Ultimate Pressure, and Evacuating Procedures 897 18.7.5 Venting 898 18.7.6 Ultrahigh-Vacuum Systems 898 18.7.7 Ultrahigh-Vacuum (UHV) Components 898 18.7.8 Ultrahigh-Vacuum (UHV) Pump Stands 899 18.7.8.1 Large Ultrahigh-Vacuum (UHV) Facilities 901 References 904 19 Methods of Leak Detection 907 19.1 Overview 907 19.1.1 Vacuum Leak Detection 907 19.1.2 Overpressure Leak Detection 908 19.1.3 Tracer-Gas Distribution in the Atmosphere in Front ofaLeak 909 19.1.4 Measurement Results with the Sniffing Method 910 19.1.5 Tracer-Gas Species 911 19.1.5.1 Helium 911 19.1.5.2 Noble Gases Other Than Helium 911 19.1.5.3 Hydrogen H2 911 19.1.5.4 Methane CH4 912 19.1.5.5 Carbon Dioxide C02 912 19.1.5.6 Sulfur Hexafluoride SF6 912 19.2 Properties of Leaks 912 19.2.1 Leak Rate, Units 912 19.2.2 Types of Leaks 913 XXI Contents 19.2.2.1 Properties of Pore-Iike Leaks 914 19.2.2.2 Permeation Leaks 916 19.2.2.3 Virtual Leaks in Vacuum Vessels 917 19.2.2.4 Liquid Leaks 917 19.3 Overview of Leak-Detection Methods (See Also DIN EN 1779) 918 19.3.1 General Guidelines for Tightness Testing 918 19.3.2 Methods without Tracer Gas (Pressure Testing) 919 19.3.2.1 Introduction 9i9 19.3.2.2 Pressure Loss Measurement 920 19.3.2.3 Pressure Rise Measurement 920 19.3.2.4 Additional Methods 922 19.3.3 Tracer-Gas Methods without Helium 922 19.3.3.1 Basics 922 19.3.3.2 Vacuum Leak Detection with Non-helium Tracer Gas 923 19.3.3.3 Overpressure Leak Detection with Tracer Gases Other Than Helium 924 19.4 Leak Detection Using Helium Leak Detectors 925 19.4.1 Properties of Helium Leak Detectors 925 19.4.2 Testing of Components 926 19.4.2.1 Testing Procedure, Integral Testing 926 19.4.2.2 Procedure for Leak Localization 927 19.4.3 Testing of Vacuum Systems 929 19.4.3.1 General Considerations for Partial Flow Operation 930 19.4.3.2 Points on Systems for Connecting Leak Detectors 931 19.4.3.3 Detection Limit and Response Time 933 19.4.4 Overpressure (Sniffing) Leak Detection with a Helium Leak Detector 934 19.4.4.1 Integral Procedure (Total or Partial) 935 19.4.4.2 Leak Localization with a Sniffer 936 19.5 Leak Detection with Other Tracer Gases 936 19.5.1 Basics 936 19.5.2 Sniffing Leak Detection on Refrigerators and Air Conditioners 936 19.6 Industrial Tightness Testing of Mass-Production Components 937 19.6.1 Basics 937 19.6.2 Industrial Testing of Series Components 937 19.6.2.1 Envelope Testing Method for Vacuum Components (Method AI in EN 1779) 938 19.6.2.2 Vacuum Chamber Method for Overpressure Components (Method B6 in EN 1779) 938 Contents XXI 19.6.2.3 Testing of Hermetically Sealed Components by Means of Bombing (Method B5 in EN 1779) 940 19.6.2.4 Testing of Food Packaging in Flexible Test Chambers 941 References 942 Further Reading 942 Appendix 943 Index J003 Directory of Products and Suppliers 1023
any_adam_object	1
author2	Jousten, Karl 1960-
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author2_variant	k j kj
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author_facet	Jousten, Karl 1960-
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dewey-ones	621 - Applied physics
dewey-raw	621.5/5
dewey-search	621.5/5
dewey-sort	3621.5 15
dewey-tens	620 - Engineering and allied operations
discipline	Maschinenbau / Maschinenwesen Physik
doi_str_mv	10.1002/9783527688265
edition	Second, completely revised and updated edition
format	Electronic eBook
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spelling	Jousten, Karl 1960- (DE-588)132075555 edt Handbook of vacuum technology edited by Karl Jousten Second, completely revised and updated edition Weinheim, Germany Wiley-VCH [2016] © 2016 1 Online-Ressource (XXIV, 1025 Seiten) Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Handbooks and manuals fast Vacuum technology fast Vacuum technology / Handbooks, manuals, etc Vakuumpumpe (DE-588)4127061-7 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content 2\p (DE-588)4123623-3 Lehrbuch gnd-content Vakuumtechnik (DE-588)4062270-8 s DE-604 Vakuumpumpe (DE-588)4127061-7 s Erscheint auch als Druck-Ausgabe 978-3-527-41338-6 https://doi.org/10.1002/9783527688265 Verlag URL des Erstveröffentlichers Volltext HBZ Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029180659&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Handbook of vacuum technology Handbooks and manuals fast Vacuum technology fast Vacuum technology / Handbooks, manuals, etc Vakuumpumpe (DE-588)4127061-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd
subject_GND	(DE-588)4127061-7 (DE-588)4062270-8 (DE-588)4143413-4 (DE-588)4123623-3
title	Handbook of vacuum technology
title_auth	Handbook of vacuum technology
title_exact_search	Handbook of vacuum technology
title_full	Handbook of vacuum technology edited by Karl Jousten
title_fullStr	Handbook of vacuum technology edited by Karl Jousten
title_full_unstemmed	Handbook of vacuum technology edited by Karl Jousten
title_short	Handbook of vacuum technology
title_sort	handbook of vacuum technology
topic	Handbooks and manuals fast Vacuum technology fast Vacuum technology / Handbooks, manuals, etc Vakuumpumpe (DE-588)4127061-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd
topic_facet	Handbooks and manuals Vacuum technology Vacuum technology / Handbooks, manuals, etc Vakuumpumpe Vakuumtechnik Aufsatzsammlung Lehrbuch
url	https://doi.org/10.1002/9783527688265 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029180659&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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