Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 26-29 May 2015, San Diego, CA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | , |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
AIP Publishing LLC
2015
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| Schriftenreihe: | Journal of vacuum science and technology. B
volume 33, number 6 (november/December 2015) |
| Schlagworte: | |
| Beschreibung: | 1 Band (nicht paginiert) Illustrationen, Diagramme |
| ISBN: | 9780983693376 |
Internformat
MARC
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| 245 | 1 | 0 | |a Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 26-29 May 2015, San Diego, CA |c conference chair: J. Todd Hastings ; program chair: Michael A. Guillorn |
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Datensatz im Suchindex
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| author2 | Hastings, J. Todd Guillorn, Michael A. |
| author2_role | edt edt |
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| author_corporate | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication San Diego, Calif |
| author_corporate_role | aut |
| author_facet | Hastings, J. Todd Guillorn, Michael A. International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication San Diego, Calif |
| author_sort | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication San Diego, Calif |
| building | Verbundindex |
| bvnumber | BV043698329 |
| classification_rvk | UA 1000 |
| ctrlnum | (OCoLC)956335621 (DE-599)BVBBV043698329 |
| discipline | Physik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 2015 San Diego, Calif. Aufsatzsammlung |
| id | DE-604.BV043698329 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:32:49Z |
| institution | BVB |
| institution_GND | (DE-588)1109818629 |
| isbn | 9780983693376 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029110821 |
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| physical | 1 Band (nicht paginiert) Illustrationen, Diagramme |
| publishDate | 2015 |
| publishDateSearch | 2015 |
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| publisher | AIP Publishing LLC |
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| series | Journal of vacuum science and technology. B |
| series2 | Journal of vacuum science and technology. B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 59. 2015 San Diego, Calif. Verfasser (DE-588)1109818629 aut Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA conference chair: J. Todd Hastings ; program chair: Michael A. Guillorn New York AIP Publishing LLC 2015 1 Band (nicht paginiert) Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology. B volume 33, number 6 (november/December 2015) Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanoelektronik (DE-588)4732034-5 gnd rswk-swf Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2015 San Diego, Calif. gnd-content (DE-588)4143413-4 Aufsatzsammlung gnd-content Nanotechnologie (DE-588)4327470-5 s Nanostrukturiertes Material (DE-588)4342626-8 s Nanoelektronik (DE-588)4732034-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Hastings, J. Todd edt Guillorn, Michael A. edt Journal of vacuum science and technology. B volume 33, number 6 (november/December 2015) (DE-604)BV002583087 33,6 |
| spellingShingle | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA Journal of vacuum science and technology. B Nanotechnologie (DE-588)4327470-5 gnd Nanoelektronik (DE-588)4732034-5 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
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| title | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA |
| title_auth | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA |
| title_exact_search | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA |
| title_full | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA conference chair: J. Todd Hastings ; program chair: Michael A. Guillorn |
| title_fullStr | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA conference chair: J. Todd Hastings ; program chair: Michael A. Guillorn |
| title_full_unstemmed | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 26-29 May 2015, San Diego, CA conference chair: J. Todd Hastings ; program chair: Michael A. Guillorn |
| title_short | Papers from the 59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 59th international conference on electron ion and photon beam technology and nanofabrication 26 29 may 2015 san diego ca |
| title_sub | 26-29 May 2015, San Diego, CA |
| topic | Nanotechnologie (DE-588)4327470-5 gnd Nanoelektronik (DE-588)4732034-5 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Teilchenstrahl (DE-588)4165339-7 gnd |
| topic_facet | Nanotechnologie Nanoelektronik Nanostrukturiertes Material Teilchenstrahl Konferenzschrift 2015 San Diego, Calif. Aufsatzsammlung |
| volume_link | (DE-604)BV002583087 |
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