Handbook of vacuum technology:
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH
2016
|
| Ausgabe: | Second, completely revised and updated edition |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Hier auch später erschienene, unveränderte Nachdrucke |
| Beschreibung: | XXIV, 1025 Seiten Illustrationen, Diagramme 1 Beilage |
| ISBN: | 9783527413386 |
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MARC
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| 245 | 1 | 0 | |a Handbook of vacuum technology |c edited by Karl Jousten |
| 250 | |a Second, completely revised and updated edition | ||
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Datensatz im Suchindex
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| adam_text | CONTENTS
PREFACE XXIII
1 THE HISTORY OF VACUUM SCIENCE AND VACUUM TECHNOLOGY 1
REFERENCES 16
FURTHER READING 17
2 APPLICATIONS AND SCOPE OF VACUUM TECHNOLOGY 19
REFERENCES 27
3 GAS LAWS AND KINETIC THEORY OF GASES 29
3.1 DESCRIPTION OF THE GAS STATE 29
3.1.1 STATE VARIABLES 29
3.1.2 EXTENSIVE QUANTITIES 33
3.1.3 EQUATION OF STATE OF AN IDEAL GAS 35
3.1.4 MIXTURES OF DIFFERENT GAS SPECIES 37
3.2 KINETIC THEORY OF GASES 38
3.2.1 MODEL CONCEPTIONS 38
3.2.2 WALL PRESSURE DUE TO IMPACTING PARTICLES 39
3.2.3 MAXWELL-BOLTZMANN VELOCITY DISTRIBUTION 41
3.2.4 COLLISION RATE AND EFFUSION 44
3.2.5 SIZE OF GAS PARTICLES AND FREE PATH 45
3.3 TRANSPORT PROPERTIES OF GASES 50
3.3.1 PRESSURE DEPENDENCE 50
3.3.2 TRANSPORT OF FRICTIONAL FORCES IN GASES AND VISCOSITY 51
3.3.3 TRANSPORT OF HEAT IN GASES AND THERMAL CONDUCTIVITY 55
3.3.4 DIFFUSION 63
3.4 REAL GASES 65
3.4.1 EQUATIONS OF STATE 65
3.4.2 PARTICLE PROPERTIES AND GAS BEHAVIOR 69
3.5 VAPORS 75
3.5.1 SATURATION VAPOR PRESSURE 75
3.5.2 EVAPORATION RATE 79
REFERENCES 81
COMPREHENSIVE GENERAL TREATMENTS OF THE SUBJECT 82
4 GAS FLOW 83
4.1 TYPES OF FLOWS AND DEFINITIONS 83
4.1.1 CHARACTERIZING FLOW, KNUDSEN NUMBER, AND REYNOLDS NUMBER 83
4.1.2 GAS FLOW, THROUGHPUT, AND PUMPING SPEED 87
4.1.3 FLOW RESISTANCE AND FLOW CONDUCTANCE 90
4.1.4 EFFECTIVE PUMPING SPEED OF A VACUUM PUMP 92
4.2 INVISCID VISCOUS FLOW AND GAS DYNAMICS 93
4.2.1 CONSERVATION LAWS 93
4.2.2 GRADUAL CHANGE OF CROSS-SECTIONAL AREA: ISENTROPIC CHANGE OF
STATE 95
4.2.3 CRITICAL FLOW 98
4.2.4 CHOKED FLOW AT LOW OUTLET PRESSURE 100
4.2.5 CONTRACTION OF FLOW INTO APERTURE AND TUBE 101
4.2.6 EXAMPLES OF NOZZLE FLOW 102
4.2.7 STRAIGHT AND OBLIQUE COMPRESSION SHOCKS 106
4.2.8 LAVAL NOZZLE AND EFFLUENT FLOW AGAINST COUNTERPRESSURE 108
4.2.9 FLOW AROUND A CORNER (PRANDTL-MEYER FLOW) 111
4.3 FRICTIONAL-VISCOUS FLOW THROUGH A TUBE 114
4.3.1 LAMINAR AND TURBULENT FLOWS THROUGH A TUBE 114
4.3.2 AIRFLOW THROUGH A TUBE 118
4.3.3 AIR INFLOW TO A VESSEL: EXAMPLES 120
4.3.4 TUBE AT THE INLET OF A PUMP: EXAMPLES 125
4.3.5 FLOW THROUGH DUCTS WITH NONCIRCULAR CROSS SECTIONS 128
4.3.6 INFLUENCE OF GAS SPECIES ON FLOW 130
4.4 MOLECULAR FLOW UNDER HIGH-VACUUM AND ULTRAHIGH-VACUUM
CONDITIONS 131
4.4.1 FLOW PATTERN, DEFINITIONS, AND TRANSMISSION PROBABILITY 131
4.4.2 MOLECULAR FLOW THROUGH AN APERTURE 135
4.4.3 MOLECULAR FLOW THROUGH A TUBE WITH CONSTANT CROSS-SECTIONAL
AREA 137
4.4.4 MOLECULAR FLOW THROUGH A TUBE WITH CIRCULAR CROSS SECTION 139
4.4.5 MOLECULAR FLOW THROUGH TUBES WITH SIMPLE CROSS-SECTIONAL
GEOMETRY 140
4.4.6 TUBE BEND AND TUBE ELBOW 143
4.4.7 SERIES CONNECTION OF TUBE AND APERTURE 145
4.4.8 SERIES CONNECTION OF COMPONENTS 146
4.4.9 MOLECULAR FLOW THROUGH CONICAL TUBE WITH CIRCULAR CROSS SECTION
(FUNNEL) 148
4.4.10 COMPONENT IN THE INLET LINE OF A PUMP 150
4.5 FLOW THROUGHOUT THE ENTIRE PRESSURE RANGE 151
4.5.1 FLOW RANGES 151
4.5.2 FLOW THROUGH A THIN APERTURE WITH CIRCULAR CROSS SECTION 151
4.5.3 FLOW THROUGH A LONG TUBE WITH CIRCULAR CROSS SECTION 154
4.6 FLOW WITH TEMPERATURE DIFFERENCE, THERMAL EFFUSION, AND
TRANSPIRATION 158
4.7 MEASURING FLOW CONDUCTANCES 162
4.7.1 NECESSITY OF MEASUREMENT 162
4.7.2 MEASUREMENT OF INTRINSIC CONDUCTANCES (INHERENT CONDUCTANCES) 162
4.7.3 CALCULATION OF REDUCED CONDUCTANCE (ASSEMBLY CONDUCTANCE) 164
4.7.4 MEASURING REDUCED CONDUCTANCES 164
REFERENCES 166
FURTHER READING 166
5 ANALYTICAL AND NUMERICAL CALCULATIONS OF RAREFIED GAS FLOWS 167
5.1 MAIN CONCEPTS 167
5.1.1 KNUDSEN NUMBER AND GAS RAREFACTION 167
5.1.2 MACROSCOPIC QUANTITIES 168
5.1.3 VELOCITY DISTRIBUTION FUNCTION 168
5.1.4 GLOBAL EQUILIBRIUM 169
5.1.5 LOCAL EQUILIBRIUM 170
5.1.6 BOLTZMANN EQUATION 170
5.1.7 TRANSPORT COEFFICIENTS 172
5.1.8 MODEL EQUATIONS 174
5.1.9 GAS-SURFACE INTERACTION 175
5.2 METHODS OF CALCULATIONS OF GAS FLOWS 178
5.2.1 GENERAL REMARKS 178
5.2.2 DETERMINISTIC METHODS 178
5.2.3 PROBABILISTIC METHODS 179
5.3 VELOCITY SLIP AND TEMPERATURE JUMP PHENOMENA 181
5.3.1 VISCOUS SLIP COEFFICIENT 182
5.3.2 THERMAL SLIP COEFFICIENT 183
5.3.3 TEMPERATURE JUMP COEFFICIENT 184
5.4 MOMENTUM AND HEAT TRANSFER THROUGH RAREFIED GASES 185
5.4.1 PLANAR COUETTE FLOW 186
5.4.2 CYLINDRICAL COUETTE FLOW 189
5.4.3 HEAT TRANSFER BETWEEN TWO PLATES 193
5.4.4 HEAT TRANSFER BETWEEN TWO COAXIAL CYLINDERS 195
5.5 FLOWS THROUGH LONG PIPES 199
5.5.1 DEFINITIONS 199
5.5.2 FREE MOLECULAR REGIME 201
5.5.3 SLIP FLOW REGIME 202
5.5.4 TRANSITIONAL REGIME 203
5.5.5 ARBITRARY PRESSURE AND TEMPERATURE DROPS 208
5.5.6 VARIABLE CROSS SECTION 214
5.5.7 THERMOMOLECULAR PRESSURE RATIO 216
5.6 FLOW THROUGH AN ORIFICE 218
5.7 MODELING OF HOLWECK PUMP 221
5.8 APPENDIX A 223
5.8.1 TABLES 223
REFERENCES 225
6 SORPTION AND DIFFUSION 229
6.1 SORPTION PHENOMENA AND THE CONSEQUENCES, DEFINITIONS, AND
TERMINOLOGY 229
6.2 ADSORPTION AND DESORPTION KINETICS 234
6.2.1 ADSORPTION RATE 234
6.2.2 DESORPTION RATE 235
6.2.3 HOBSON MODEL OF A PUMP-DOWN CURVE 238
6.2.4 MONOLAYER ADSORPTION ISOTHERMS
242
6.2.5 MULTILAYER ADSORPTION AND BRUNAUER-EMMETT-TELLER (BET)
ISOTHERM 244
6.2.6 MONOLAYER TIME 246
6.3 ABSORPTION, DIFFUSION, AND OUTGASSING 247
6.4 PERMEATION 254
REFERENCES 256
FURTHER READING 256
7 POSITIVE DISPLACEMENT PUMPS 259
7.1 INTRODUCTION AND OVERVIEW 259
7.2 OSCILLATING POSITIVE DISPLACEMENT PUMPS 262
7.2.1 PISTON PUMPS 262
7.2.2 DIAPHRAGM PUMPS 264
7.2.2.1 DESIGN AND PRINCIPLE OF OPERATION 264
7
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2
.
2.2 PUMPING SPEED AND ULTIMATE PRESSURE 265
7.2.2.3 GAS BALLAST 266
7.2.2.4 DRIVE CONCEPTS 267
7
.
2
.
2.5 ULTIMATE PRESSURE 267
7
.
2
.
2.6 INFLUENCE OF GAS SPECIES ON PUMPING SPEED AND ULTIMATE PRESSURE 269
7.2.2.7 INFLUENCE OF ROTATIONAL SPEED ON ULTIMATE PRESSURE 269
7
.
2
.
2.8 DESIGN PRINCIPLES 269
7.2.2.9 DIAPHRAGM PUMPS IN CHEMICAL LABORATORIES 271
7.2.2.10 DIAPHRAGM PUMPS AS BACKING PUMPS TO TURBOMOLECULAR PUMPS 272
7.2.2.11 DIAPHRAGM PUMPS COMBINED WITH OTHER TYPES OF VACUUM PUMPS 275
7.3 SINGLE-SHAFT ROTATING POSITIVE DISPLACEMENT PUMPS 276
7.3.1 LIQUID RING VACUUM PUMPS 276
7.3.1.1 DESIGN AND PRINCIPLE OF OPERATION 277
7.3.1.2 OPERATING PROPERTIES AND DIMENSIONING 278
7.3.1.3 DESIGNS 281
7.3.1.4 PUMP UNITS WITH LIQUID RING VACUUM PUMPS 284
7.3.1.5 SUGGESTIONS FOR ECONOMICAL OPERATION 286
7.3.2 SLIDING VANE ROTARY PUMPS 287
7.3.2.1 OPERATING PRINCIPLE AND DESIGN 288
73.2.2 DRY-RUNNING SLIDING VANE ROTARY PUMPS 289
7.3.23 OIL-LUBRICATED SLIDING VANE ROTARY PUMPS 290
73.2.4 ONCE-THROUGH LUBRICATED SLIDING VANE ROTARY PUMPS 292
73.2.5 OPERATING BEHAVIOR AND RECOMMENDATIONS 293
73.2.6 CHARACTERISTIC CURVES AND RATINGS 295
7.3.3 ROTARY PLUNGER PUMPS 296
7.33.1 PRINCIPLE OF OPERATION AND TECHNICAL DESIGN 296
733.2 A COMPARISON OF SLIDING VANE ROTARY PUMPS AND ROTARY PLUNGER
PUMPS 300
7.3.4 TROCHOIDAL PUMPS 300
7.3.5 SCROLL PUMPS 302
73.5.1 PRINCIPLE OF COMPRESSION 302
73.5.2 DESIGN 303
7.3.53 APPLICATIONS AND ADVANTAGES 304
7.4 TWIN-SPOOL ROTATING POSITIVE DISPLACEMENT PUMPS 305
7.4.1 SCREW-TYPE PUMPS 305
7.4.1.1 OPERATING PRINCIPLE AND TECHNICAL DESIGN 305
7.4.1.2 HEAT BEHAVIOR AND TECHNICAL NOTES 311
7.4.2 CLAW PUMPS 313
7.4.2.1 COMPRESSION PRINCIPLE 314
7.4.2.2 COMPARISON WITH ROOTS PUMPS 317
7.4.23 MULTISTAGE CLAW PUMPS AND PUMP COMBINATIONS 317
7A2.4 SPEED CONTROL 318
7.4.2.5 FIELDS OF APPLICATION 319
7.4.3 ROOTS PUMPS 319
7.43.1 PRINCIPLE OF OPERATION 319
7.43.2 TECHNICAL SETUP 320
7.4.33 THEORETICAL BASICS 322
7.43.4 EFFECTIVE GAS FLOW 322
7.43.5 COMPRESSION RATIO K0 AT ZERO DELIVERY 323
7.43.6 EFFECTIVE COMPRESSION RATIO AND VOLUMETRIC EFFICIENCY 324
7.43.7 GRADATION OF PUMPING SPEED BETWEEN FORE PUMP AND ROOTS
PUMP 325
7.43.8 PUMPING SPEED AND ULTIMATE PRESSURE 329
7.43.9 INSTALLATION AND OPERATING SUGGESTIONS 331
7.5 SPECIFIC PROPERTIES OF OIL-SEALED POSITIVE DISPLACEMENT PUMPS 331
7.5.1 PUMPING SPEED AND PRODUCIBLE ULTIMATE PRESSURE 331
7.5.1.1 PUMPING SPEED AND ULTIMATE PARTIAL PRESSURE 332
7.5.1.2 ULTIMATE PRESSURE AND OIL SELECTION 332
7.5.2 OIL BACKFLOW 336
7.6 BASICS OF POSITIVE DISPLACEMENT PUMPS 337
7.6.1 PUMPING DOWN VAPORS - GAS BALLAST 337
7.6.2 POWER REQUIREMENTS 342
7.6.2.1 ISOTHERMAL COMPRESSION 343
7.6.2.2 ADIABATIC COMPRESSION 343
7.6.2.3 POLYTROPIC COMPRESSION 343
7.6.2.4 COMPRESSION POWER 344
7.7 OPERATING AND SAFETY RECOMMENDATIONS 345
7.7.1 INSTALLATION 345
1 J 2 STARTING AND SHUT DOWN, INLET VALVES 346
7.73 PUMP SELECTION AND OPERATING RECOMMENDATIONS 347
7.7.4 TECHNICAL SAFETY RECOMMENDATIONS 348
7.8 SPECIFIC ACCESSORIES FOR POSITIVE DISPLACEMENT
PUMPS 350
7.8.1 SORPTION TRAPS 350
7.8.2 SAFETY VALVES 351
7.8.3 OIL FILTER AND OIL CLEANING 352
7.8.4 EXHAUST FILTER (OIL-MIST SEPARATOR) 353
7.8.5 DUST FILTERS 355
REFERENCES 356
FURTHER READING ON POSITIVE DISPLACEMENT PUMPS 359
8 CONDENSERS 361
8.1 CONDENSATION PROCESSES UNDER VACUUM 361
8.1.1 FUNDAMENTALS 361
8.1.2 CONDENSATION OF PURE VAPORS 363
8.1.3 CONDENSATION OF GAS-VAPOR MIXTURES 366
8.1.4 COOLANTS 369
8.2 CONDENSER DESIGNS 370
8.2.1 SURFACE CONDENSERS FOR LIQUID CONDENSATION 370
8.2.2 DIRECT CONTACT CONDENSERS 372
8.2.3 CONDENSATE DISCHARGE 374
8.2.4 SURFACE CONDENSERS FOR SOLID CONDENSATION 375
8.3 INTEGRATING CONDENSERS INTO VACUUM SYSTEMS 376
8.3.1 CONDENSERS COMBINED WITH VACUUM PUMPS 376
8.3.2 CONTROL 379
8.4 CALCULATION EXAMPLES
380
REFERENCES 382
9 JET AND DIFFUSION PUMPS 383
9.1 INTRODUCTION AND OVERVIEW 383
9.2 LIQUID JET VACUUM PUMPS 385
9.3 STEAM JET VACUUM PUMPS 387
9.3.1 DESIGN AND FUNCTION 387
9.3.2 PERFORMANCE DATA, OPERATING BEHAVIOR, AND CONTROL 389
9.3.3 MULTISTAGE STEAM JET VACUUM PUMPS 393
9.3.4 ORGANIC VAPORS AS DRIVING PUMP FLUIDS 395
9.4 DIFFUSION PUMPS 396
9.4.1 DESIGN AND PRINCIPLE OF OPERATION 396
9.4.2 PUMP FLUIDS 400
9.4.3 BAFFLES AND VAPOR TRAPS 401
9.4.4 FRACTIONATING AND DEGASSING 403
9.4.5 OPERATING SUGGESTIONS 404
9.4.6 PUMPING SPEED, CRITICAL BACKING PRESSURE, HYBRID PUMPS 405
9.4.7 CALCULATING PERFORMANCE CHARACTERISTICS OF DIFFUSION AND VAPOR JET
PUMPS BY USING A SIMPLE PUMP MODEL 407
9.5 DIFFUSION PUMPS VERSUS VAPOR JET PUMPS 415
REFERENCES 417
10 MOLECULAR AND TURBOMOLECULAR PUMPS 419
10.1 INTRODUCTION 419
10.2 MOLECULAR PUMPS 421
10.2.1 GAEDE PUMP STAGE 422
10.2.2 HOLWECK PUMP STAGE 426
10.2.3 SIEGBAHN PUMP STAGE 427
10.3 MOLECULAR AND REGENERATIVE DRAG PUMP COMBINATION 427
10.3.1 REGENERATIVE PUMP MECHANISM 428
10.3.2 PUMP DESIGN AND APPLICATIONS 429
10.4 PHYSICAL FUNDAMENTALS OF TURBOMOLECULAR PUMP STAGES 430
10.4.1 PUMPING MECHANISM 430
10.4.2 PUMPING SPEED AND COMPRESSION RATIO 431
10.4.3 GAEDE AND STATISTICAL THEORY OF THE PUMPING EFFECT 432
10.4.3.1 CONSIDERATION WITH GAEDE 432
10.4.3.2 STATISTICAL CONSIDERATION 434
10.4.4 THERMAL BALANCE 436
10.5 TURBOMOLECULAR PUMPS 439
10.5.1 DESIGN AND FUNCTION 439
10.5.2 ROTORS OF TURBOMOLECULAR PUMPS 441
10.5.2.1 ROTOR DESIGN 441
10.5.2.2 ROTOR MATERIALS AND MECHANICAL REQUIREMENTS 442
10.5.3 SAFETY REQUIREMENTS 442
10.5.4 BEARING ARRANGEMENTS FOR ROTORS IN TURBOMOLECULAR PUMPS 443
10.5.4.1 SHAFT WITH TWO BALL BEARINGS 444
10.5.4.2 SHAFT WITH PERMANENT MAGNET BEARING AND BALL BEARING 445
10.5.4.3 MAGNETIC BEARINGS 445
10.5.5 DRIVES AND HANDLING 447
10.5.6 HEATING AND COOLING 448
10.5.7 SPECIAL DESIGNS 448
10.6 PERFORMANCE CHARACTERISTICS OF TURBOMOLECULAR PUMPS 450
10.6.1 PUMPING SPEED 450
10.6.2 COMPRESSION RATIO, ULTIMATE PRESSURE, AND BASE PRESSURE 451
10.6.3 PUMP-DOWN TIMES FOR VACUUM CHAMBERS 452
10.6.4 PUMPING OF HIGH GAS THROUGHPUTS 453
10.7 OPERATION AND MAINTENANCE OF TURBOMOLECULAR PUMPS 455
10.7.1 BACKING PUMP SELECTION 455
10.7.2 GENERAL NOTES 455
10.7.3 STARTUP 455
10.7.4 OBTAINING BASE PRESSURE 456
10.7.5 OPERATION IN MAGNETIC FIELDS 456
10.7.6 VENTING 456
10.7.7 MAINTENANCE 457
10.8 APPLICATIONS 457
REFERENCES 460
11 SORPTION PUMPS 463
11.1 INTRODUCTION 463
11.2 ADSORPTION PUMPS 464
11.2.1 WORKING PRINCIPLE 464
11.2.2 DESIGN 466
11.2.3 ULTIMATE VACUUM AND PUMPING SPEED 468
11.2.3.1 ULTIMATE PRESSURE WITH A SINGLE ADSORPTION PUMP 468
11.2.3.2 ULTIMATE PRESSURE WITH TWO OR MORE ADSORPTION PUMPS 469
11.2.4 OPERATING SUGGESTIONS 471
11.3 GETTER 472
11.3.1 MODE OF OPERATION AND GETTER TYPES 472
11.3.2 NEG PUMPS 474
11.3.2.1 FUNDAMENTALS OF BULK GETTERS/NEG 474
11.3.2.2 DESIGN OF NEG PUMPS 478
11.3.2.3 PUMPING SPEED AND GETTER CAPACITY 479
11.3.2.4 APPLICATIONS OF NEG PUMPS 481
11.3.2.5 SAFETY AND OPERATING RECOMMENDATIONS 481
11.3.3 EVAPORATION/SUBLIMATION PUMPS 483
11.3.3.1 EVAPORATION MATERIALS 483
11.3.3.2 PUMPING SPEED 484
11.3.3.3 GETTER CAPACITY 486
11.3.3.4 DESIGN OF EVAPORATION GETTERS 487
11.4 ION GETTER PUMPS 493
11.4.1 WORKING PRINCIPLE 493
11.4.2 TECHNICAL DESIGN (DIODE TYPE) 497
11.4.3 PUMPING SPEED 498
11.4.4 THE DIFFERENTIAL ION PUMP 500
11.4.5 TRIODE PUMPS 501
11.4.6 DISTRIBUTED ION PUMPS 504
11.4.7 RESIDUAL GAS SPECTRUM 504
11.4.8 OPERATION 505
11.5 ORBITRON PUMPS 507
REFERENCES 508
FURTHER READING 509
12 CRYOTECHNOLOGY AND CRYOPUMPS 511
12.1 INTRODUCTION 511
12.2 METHODS OF REFRIGERATION 512
12.2.1 GAS REFRIGERATION PROCESSES 513
12.2.1.1 STIRLING PROCESS 515
12.2.1.2 GIFFORD-MCMAHON PROCESS 516
12.2.1.3 PULSE TUBE PROCESS 518
12.2.2 CRYOSTAT WITH LIQUID CRYOGENS 519
12.2.3 MEASUREMENT OF LOW TEMPERATURES 520
12.3 WORKING PRINCIPLES OF CRYOPUMPS 520
12.3.1 GAS CONDENSATION 523
12.3.2 CRYOSORPTION 525
12.3.2.1 SOLID ADSORBENTS 526
12.3.2.2 CRYOTRAPPING 530
12.4 DESIGN OF CRYOPUMPS 531
12.4.1 CRYOTECHNOLOGICAL CONSTRUCTIVE PARAMETERS 531
12.4.1.1 THERMAL RADIATION 531
12.4.1.2 THERMAL CONDUCTION 535
12.4.2 VACUUM TECHNOLOGY: DESIGN PARAMETERS 538
12.4.3 CONSTRUCTION PRINCIPLES 541
12.4.3.1 BATH CRYOPUMPS 541
12.4.3.2 REFRIGERATOR CRYOPUMPS 543
12.5 CHARACTERISTICS OF A CRYOPUMP 547
12.5.1 STARTING PRESSURE 547
12.5.2 ULTIMATE PRESSURE 548
12.5.3 PUMPING SPEED 549
12.5.4 SERVICE LIFE 550
12.5.5 CAPACITY (MAXIMUM GAS INTAKE) 552
12.5.6 CROSSOVER VALUE 552
12.5.7 MAXIMUM TOLERABLE PV FLOW 552
12.5.8 RESISTANCE TO THERMAL RADIATION 552
12.5.9 REGENERATION 552
12.5.10 PERFORMANCE COMPARISON 555
12.6 APPLICATION EXAMPLES 555
12.6.1 CRYOPUMPS WITH FORCED COOLING USING SUPERCRITICAL HELIUM 556
12.6.2 COMBINED REFRIGERATOR/LIQUID CRYOPUMPS 558
12.6.3 CRYOPUMPS WITH FORCED COOLING USING LIQUID CRYOGEN 559
12.6.4 CRYOPUMPS IN LARGE RESEARCH APPLICATIONS 560
12.6.5 CRYOPUMPS IN INDUSTRIAL FACILITIES 561
12.6.6 DEVELOPMENT TRENDS FOR CRYOPUMPS 561
REFERENCES 562
13 TOTAL PRESSURE VACUUM GAUGES 565
13.1 INTRODUCTION 565
13.2 MECHANICAL VACUUM GAUGES 566
13.2.1 PRINCIPLE AND CLASSIFICATION 566
13.2.2 CORRUGATED-DIAPHRAGM VACUUM GAUGES 567
13.2.3 CAPSULE ELEMENT VACUUM GAUGES (MEASURING RANGE 1-100 KPA) 568
13.2.4 BOURDON TUBE VACUUM GAUGES (MEASURING RANGE 1-100 KPA) 569
13.2.4.1 QUARTZ BOURDON TUBE VACUUM GAUGES 570
13.2.5 DIAPHRAGM (MEMBRANE) VACUUM GAUGES 571
13.2.5.1 DIAPHRAGM (MEMBRANE) VACUUM GAUGES WITH MECHANICAL DISPLAYS
(MEASURING RANGE 0.1-100 KPA) 571
13.2.5.2 DIAPHRAGM (MEMBRANE) VACUUM GAUGES WITH ELECTRICAL
CONVERTERS 572
13.2.5.3 DIAPHRAGM (MEMBRANE) VACUUM GAUGES USING THE PIEZORESISTIVE
PRINCIPLE 574
13.2.5.4 PIEZOELECTRIC VACUUM GAUGES 575
13.2.5.5 RESONANT DIAPHRAGM VACUUM GAUGES 575
13.2.5.6 CAPACITANCE DIAPHRAGM VACUUM GAUGES 576
13.2.5.7 THERMAL TRANSPIRATION 580
13.2.6 PRESSURE SWITCHES AND PRESSURE CONTROLLERS 582
13.3 SPINNING ROTOR GAUGES (GAS-FRICTION VACUUM GAUGES) 584
13.3.1 MEASURING SETUP AND MEASURING PRINCIPLE 584
13.3.2 RETARDING EFFECT DUE TO GAS FRICTION 586
13.3.3 MEASURING PROCEDURE 590
13.3.4 EXTENDING THE MEASURING RANGE TOWARD HIGHER PRESSURES 592
13.3.5 MEASURING UNCERTAINTY 592
13.4 DIRECT ELECTRIC PRESSURE MEASURING TRANSDUCERS 593
13.5 THERMAL CONDUCTIVITY VACUUM GAUGES 594
13.5.1 PRINCIPLE 594
13.5.2 THERMAL CONDUCTIVITY VACUUM GAUGES WITH CONSTANT WIRE
TEMPERATURE 597
13.5.3 THERMAL CONDUCTIVITY VACUUM GAUGES WITH CONSTANT HEATING 601
13.5.4 THERMOCOUPLE VACUUM GAUGES 602
13.5.5 THERMISTORS 603
13.5.6 GUIDELINES FOR OPERATING THERMAL CONDUCTIVITY VACUUM GAUGES 603
13.6 THERMAL MASS FLOWMETERS 604
13.7 IONIZATION GAUGES 607
13.7.1 PRINCIPLE AND CLASSIFICATION 607
13.7.2 HISTORY OF IONIZATION GAUGES 608
13.7.3 EMITTING-CATHODE IONIZATION GAUGES (HOT-CATHODE IONIZATION
GAUGES) 610
13.7.3.1 MEASUREMENT PRINCIPLE 610
13.7.3.2 DESIGN OF EMITTING-CATHODE IONIZATION GAUGES (HOT-CATHODE
IONIZATION
GAUGES) 613
13.7.3.3 CONCENTRIC TRIODE 614
13.7.3.4 FINE-VACUUM IONIZATION GAUGES 614
13.7.3.5 BAYARD-ALPERT IONIZATION GAUGES 615
13.7.3.6 EXTRACTOR IONIZATION GAUGES 620
13.7.3.7 ADDITIONAL TYPES OF EMITTING-CATHODE IONIZATION GAUGES 623
13.7.3.8 OPERATING SUGGESTIONS FOR EMITTING-CATHODE IONIZATION GAUGES
623
13.7.4 CROSSED-FIELD IONIZATION GAUGES 625
13.7.4.1 PENNING GAUGES 625
13.7.4.2 MAGNETRON AND INVERTED MAGNETRON 630
13.7.5 COMPARISON OF BOTH TYPES OF IONIZATION GAUGES 631
13.7.6 GENERAL SUGGESTIONS 633
13.8 COMBINED VACUUM GAUGES 637
REFERENCES 639
14 PARTIAL PRESSURE VACUUM GAUGES AND LEAK DETECTORS 643
14.1 INTRODUCTION 643
14.2 PARTIAL PRESSURE ANALYSIS BY MASS SPECTROMETRY 643
14.2.1 ION SOURCE DESIGN 648
14.2.1.1 OPEN ION SOURCES (OIS) 649
14.2.1.2 CLOSED ION SOURCES (CIS) 651
14.2.1.3 MOLECULAR BEAM ION SOURCES (MBIS) 652
14.2.2 FILAMENT MATERIALS 652
14.2.3 ARTIFACTS IN THE MASS SPECTRUM DUE TO THE ION SOURCE 654
14.2.4 MASS ANALYZERS 655
14.2.4.1 QUADRUPOLE MASS ANALYZERS 655
14.2.4.2 MINIATURIZED QUADRUPOLE MASS ANALYZERS 659
14.2.4.3 MAGNETIC SECTOR ANALYZERS 661
14.2.4.4 AUTORESONANT ION TRAP MASS ANALYZERS 664
14.2.5 ION DETECTORS 665
14.2.5.1 FARADAY CUPS 665
14.2.5.2 SEM DETECTION 666
14.2.5.3 DISCRETE DYNODE ELECTRON MULTIPLIERS 667
14.2.5.4 CONTINUOUS DYNODE ELECTRON MULTIPLIERS (CDEM) 668
14.2.5.5 MICROCHANNEL PLATE DETECTORS 669
14.2.6 SOFTWARE FOR MASS SPECTROMETER CONTROL 670
14.2.6.1 ANALOG SCAN, ION CURRENT VERSUS MASS 670
14.2.6.2 SELECTED PEAKS, ION CURRENT VERSUS TIME 671
14.2.6.3 LEAK DETECTION MODE 671
14.2.7 FURTHER APPLICATIONS OF MASS SPECTROMETERS 671
14.3 PARTIAL PRESSURE MEASUREMENT USING OPTICAL METHODS 672
14.4 LEAK DETECTORS 675
14.4.1 BASIC PRINCIPLES AND HISTORICAL OVERVIEW 675
14.4.2 HELIUM LEAK DETECTORS 675
14.4.2.1 REQUIREMENTS AND GENERAL FUNCTIONS OF VACUUM LEAK DETECTION 675
14.4.2.2 HELIUM SECTOR FIELD MASS SPECTROMETERS 676
14.4.2.3 INLET PRESSURE OF HELIUM LEAK DETECTORS 677
14.4.2.4 TIME RESPONSE OF HELIUM LEAK DETECTORS 678
14.4.2.5 OPERATING PRINCIPLES OF HELIUM LEAK DETECTORS 679
14.4.2.6 SNIFFING DEVICES FOR HELIUM LEAK DETECTORS 683
14.4.2.7 APPLICATIONS OF MASS SPECTROMETER HELIUM LEAK DETECTORS 684
14.4.3 REFRIGERANT LEAK DETECTORS 685
14.4.3.1 DESIGN AND OPERATING PRINCIPLE 685
14.4.3.2 APPLICATIONS 687
14.4.4 REFERENCE LEAKS 687
14.4.4.1 PERMEATION LEAKS 687
14.4.4.2 CONDUCTANCE LEAKS 688
14.4.4.3 PRACTICAL REALIZATION OF REFERENCE LEAKS 688
14.4.4.4 CALIBRATING REFERENCE LEAKS 689
14.4.5 MEASURING CHARACTERISTICS AND CALIBRATION OF
LEAK DETECTORS 689
14.4.5.1 LEAK DETECTORS AS TEST EQUIPMENT ACCORDING TO ISO 9001 689
14.4.5.2 CALIBRATION UNCERTAINTY 690
14.4.6 LEAK DETECTORS BASED ON OTHER SENSOR PRINCIPLES 691
14.4.6.1 HELIUM SNIFFERS WITH QUARTZ GLASS MEMBRANE 691
14.4.6.2 HALOGEN LEAK DETECTORS WITH ALKALI ION SENSORS 691
14.4.6.3 HALOGEN LEAK DETECTORS WITH INFRARED SENSORS 692
REFERENCES 692
15 CALIBRATIONS AND STANDARDS 697
15.1 INTRODUCTION 697
15.2 CALIBRATION OF VACUUM GAUGES 700
15.2.1 PRIMARY STANDARDS 700
15.2.1.1 LIQUID MANOMETERS 701
15.2.1.2 COMPRESSION MANOMETER AFTER MCLEOD 704
15.2.1.3 PISTON GAUGES AND PRESSURE BALANCES 707
15.2.1.4 STATIC EXPANSION METHOD 710
15.2.1.5 CONTINUOUS EXPANSION METHOD 716
15.2.1.6 OTHER PRIMARY STANDARDS 722
15.2.2 CALIBRATION BY COMPARISON 723
15.2.3 CAPACITANCE DIAPHRAGM GAUGES 724
15.2.4 SPINNING ROTOR GAUGES 728
15.2.5 IONIZATION GAUGES 731
15.3 CALIBRATIONS OF RESIDUAL GAS ANALYZERS 733
15.4 CALIBRATION OF TEST LEAKS 735
15.5 STANDARDS FOR DETERMINING CHARACTERISTICS OF
VACUUM PUMPS 738
REFERENCES 742
16 MATERIALS 747
16.1 REQUIREMENTS AND OVERVIEW OF MATERIALS 747
16.2 MATERIALS FOR VACUUM TECHNOLOGY 749
16.2.1 METALS 749
16.2.1.1 THE MOST IMPORTANT METALS AND METAL ALLOYS 749
16.2.2 TECHNICAL GLASS 753
16.2.2.1 BASICS 753
16.2.2.2 PROPERTIES OF IMPORTANT GLASSES 755
16.2.3 CERAMIC MATERIALS 757
16.2.3.1 BASICS 757
16.2.3.2 PROPERTIES OF IMPORTANT CERAMICS 757
16.2.3.3 CERAMICS IN VACUUM TECHNOLOGY 758
16.2.3.4 CERAMIC/METAL JOINING TECHNOLOGIES 758
16.2.3.5 ZEOLITE 758
16.2.4 PLASTICS 760
16.2.4.1 BASICS 760
16.2.4.2 PROPERTIES OF MAJOR PLASTICS 760
16.2.5 VACUUM GREASES 760
16.2.6 OILS 762
16.2.7 COOLANTS 763
16.3 GAS PERMEABILITY AND GAS EMISSIONS OF MATERIALS 763
16.3.1 FUNDAMENTALS 763
16.3.2 GAS PERMEABILITY 763
16.3.2.1 GAS PERMEABILITY OF METALS 764
16.3.2.2 GAS PERMEABILITY OF GLASSES AND CERAMICS 764
16.3.2.3 GAS PERMEABILITY OF PLASTICS 767
16.3.3 GAS EMISSIONS 768
16.3.3.1 BASICS 768
16.3.3.2 SATURATION VAPOR PRESSURE 768
16.3.3.3 SURFACE DESORPTION, GAS DIFFUSION FROM BULK MATERIAL,
REFERENCE VALUES FOR GAS EMISSIONS 770
16.3.4 GAS DIFFUSION FROM BULK MATERIAL 770
16.3.5 REFERENCE VALUES FOR TOTAL GAS EMISSION RATES 774
REFERENCES 774
FURTHER READING 775
17 VACUUM COMPONENTS, SEALS, AND JOINTS 777
17.1 INTRODUCTION 777
17.2 VACUUM HYGIENE 778
17.3 JOINING TECHNOLOGIES IN VACUUM TECHNOLOGY 781
17.3.1 PERMANENT CONNECTIONS 783
17.3.1.1 WELDING 784
17.3.1.2 BRAZING 786
17.3.1.3 ADHESIVE BONDING 791
17.3.2 DETACHABLE CONNECTIONS 793
17.3.2.1 ELASTOMER-SEALED, STATIC, DETACHABLE CONNECTIONS
(KF, ISO, AND OTHERS) 794
17.3.2.2 METAL-SEALED, STATIC, DETACHABLE CONNECTIONS 802
17.4 COMPONENTS 806
17.4.1 STANDARD COMPONENTS AND CHAMBERS 806
17.4.2 MECHANICAL FEEDTHROUGHS 813
17.4.3 VALVES 817
17.4.4 ELECTRICAL FEEDTHROUGHS 823
17.4.5 OPTICAL FEEDTHROUGHS 829
17.4.6 HEAT SUPPLY AND DISSIPATION 833
ABBREVIATIONS 839
REFERENCES 840
18 OPERATING VACUUM SYSTEMS 843
18.1 ELECTRONIC INTEGRATION OF VACUUM SYSTEMS 843
18.1.1 CONTROL BY MEANS OF PROCESS SENSORS AND AUTOMATED DATA
PROCESSING 843
18.1.1.1 REQUIREMENTS AND APPLICATIONS 843
18.1.2 INTEGRATED SOLUTIONS 845
18.1.2.1 ASCII PROTOCOLS 846
18.1.2.2 STANDARDIZED BUS SYSTEMS 846
18.1.2.3 SENSOR INTEGRATION ACCORDING TO SECS AND HSMS
STANDARDS 847
18.1.2.4 PROCESS-DATA ANALYSIS 849
18.2 CALCULATION OF VACUUM SYSTEMS 851
18.2.1 ANALYTICAL AND NUMERICAL CALCULATION 851
18.2.2 CALCULATION BY ANALOG ELECTRICAL NETWORK 852
18.2.3 ULTIMATE AND WORKING PRESSURE IN VACUUM
SYSTEMS 854
18.2.3.1 ULTIMATE PRESSURE 854
18.2.3.2 OPERATING PRESSURE 855
18.3 PRESSURE CONTROL 859
18.4 TECHNIQUES FOR OPERATING LOW-VACUUM SYSTEMS 860
18.4.1 OVERVIEW 860
18.4.2 ASSEMBLY OF LOW-VACUUM SYSTEMS 861
18.4.3 PUMPS: TYPES AND PUMPING SPEEDS 862
18.4.4 LOW-VACUUM PUMP STANDS 862
18.4.5 LOW-VACUUM PRESSURE MEASUREMENT 864
18.4.6 PRESSURE AND PUMP-DOWN TIMES IN LOW VACUUM 864
18.4.7 VENTING 869
18.5 TECHNIQUES FOR OPERATING FINE-VACUUM
SYSTEMS 870
18.5.1 OVERVIEW 870
18.5.2 ASSEMBLY OF FINE-VACUUM SYSTEMS 870
18.5.3 PUMPS: TYPES AND PUMPING SPEEDS 871
18.5.4 PRESSURE MEASUREMENT 871
18.5.5 PUMP-DOWN TIME AND ULTIMATE PRESSURE 872
18.5.6 VENTING 877
18.5.7 FINE-VACUUM PUMP STANDS 877
18.6 TECHNIQUES FOR OPERATING HIGH-VACUUM SYSTEMS 879
18.6.1 PUMPS: TYPES AND PUMPING SPEEDS 879
18.6.2 CLEANING OF VACUUM GAUGES 880
18.6.3 HIGH-VACUUM PUMP STANDS 882
18.6.3.1 HIGH-VACUUM PUMP STANDS WITH DIFFUSION PUMPS 882
18.6.3.2 HIGH-VACUUM PUMP STANDS WITH
TURBOMOLECULAR PUMPS 889
18.6.3.3 FULLY AUTOMATIC HIGH-VACUUM PUMP STANDS 890
18.6.4 PUMP-DOWN TIME AND VENTING 891
18.7 TECHNIQUES FOR OPERATING ULTRAHIGH-VACUUM
SYSTEMS 892
18.7.1 OVERVIEW 892
18.7.2 OPERATING GUIDELINES FOR UHV PUMPS 893
18.7.2.1 ADSORPTION PUMPS 894
18.7.2.2 ION GETTER PUMPS 894
18.7.2.3 TITANIUM EVAPORATION PUMPS 895
18.7.2.4 TURBOMOLECULAR PUMPS 896
18.7.2.5 CRYOPUMPS 896
18.7.2.6 BULK GETTER (NEG) PUMPS 896
18.7.3 PRESSURE MEASUREMENT 897
18.7.4 PUMP-DOWN TIMES, ULTIMATE PRESSURE, AND EVACUATING
PROCEDURES 897
18.7.5 VENTING 898
18.7.6 ULTRAHIGH-VACUUM SYSTEMS 898
18.7.7 ULTRAHIGH-VACUUM (UHV) COMPONENTS 898
18.7.8 ULTRAHIGH-VACUUM (UHV) PUMP STANDS 899
18.7.8.1 LARGE ULTRAHIGH-VACUUM (UHV) FACILITIES 901
REFERENCES 904
19 METHODS OF LEAK DETECTION 907
19.1 OVERVIEW 907
19.1.1 VACUUM LEAK DETECTION 907
19.1.2 OVERPRESSURE LEAK DETECTION 908
19.1.3 TRACER-GAS DISTRIBUTION IN THE ATMOSPHERE IN FRONT
OF A LEAK 909
19.1.4 MEASUREMENT RESULTS WITH THE SNIFFING
METHOD 910
19.1.5 TRACER-GAS SPECIES 911
19.1.5.1 HELIUM 911
19.1.5.2 NOBLE GASES OTHER THAN HELIUM 911
19.1.5.3 HYDROGEN H2 911
19.1.5.4 METHANE CH4 912
19.1.5.5 CARBON DIOXIDE C 0 2 912
19.1.5.6 SULFUR HEXAFLUORIDE SF6 912
19.2 PROPERTIES OF LEAKS 912
19.2.1 LEAK RATE, UNITS 912
19.2.2 TYPES OF LEAKS 913
19.2.2.1 PROPERTIES OF PORE-LIKE LEAKS 914
19.2.2.2 PERMEATION LEAKS 916
19.2.2.3 VIRTUAL LEAKS IN VACUUM VESSELS 917
19.2.2.4 LIQUID LEAKS 917
19.3 OVERVIEW OF LEAK-DETECTION METHODS
(SEE ALSO DIN EN 1779) 918
19.3.1 GENERAL GUIDELINES FOR TIGHTNESS TESTING 918
19.3.2 METHODS WITHOUT TRACER GAS (PRESSURE TESTING) 919
19.3.2.1 INTRODUCTION 919
19.3.2.2 PRESSURE LOSS MEASUREMENT 920
19.3.2.3 PRESSURE RISE MEASUREMENT 920
19.3.2.4 ADDITIONAL METHODS 922
19.3.3 TRACER-GAS METHODS WITHOUT HELIUM 922
19.3.3.1 BASICS 922
19.3.3.2 VACUUM LEAK DETECTION WITH NON-HELIUM TRACER
GAS 923
19.3.3.3 OVERPRESSURE LEAK DETECTION WITH TRACER GASES OTHER
THAN HELIUM 924
19.4 LEAK DETECTION USING HELIUM LEAK DETECTORS 925
19.4.1 PROPERTIES OF HELIUM LEAK DETECTORS 925
19.4.2 TESTING OF COMPONENTS 926
19.4.2.1 TESTING PROCEDURE, INTEGRAL TESTING 926
19.4.2.2 PROCEDURE FOR LEAK LOCALIZATION 927
19.4.3 TESTING OF VACUUM SYSTEMS 929
19.4.3.1 GENERAL CONSIDERATIONS FOR PARTIAL FLOW
OPERATION 930
19.4.3.2 POINTS ON SYSTEMS FOR CONNECTING LEAK DETECTORS 931
19.4.3.3 DETECTION LIMIT AND RESPONSE TIME 933
19.4.4 OVERPRESSURE (SNIFFING) LEAK DETECTION WITH A HELIUM LEAK
DETECTOR 934
19.4.4.1 INTEGRAL PROCEDURE (TOTAL OR PARTIAL) 935
19.4.4.2 LEAK LOCALIZATION WITH A SNIFFER 936
19.5 LEAK DETECTION WITH OTHER TRACER GASES 936
19.5.1 BASICS 936
19.5.2 SNIFFING LEAK DETECTION ON REFRIGERATORS AND AIR
CONDITIONERS 936
19.6 INDUSTRIAL TIGHTNESS TESTING OF MASS-PRODUCTION
COMPONENTS 937
19.6.1 BASICS 937
19.6.2 INDUSTRIAL TESTING OF SERIES COMPONENTS 937
19.6.2.1 ENVELOPE TESTING METHOD FOR VACUUM COMPONENTS
(METHOD AL IN EN 1779) 938
19.6.2.2 VACUUM CHAMBER METHOD FOR OVERPRESSURE COMPONENTS
(METHOD B6 IN EN 1779) 938
CONTENTS
XXI
19.6.2.3 TESTING OF HERMETICALLY SEALED COMPONENTS BY MEANS OF BOMBING
(METHOD B5 IN EN 1779) 940
19.6.2.4 TESTING OF FOOD PACKAGING IN FLEXIBLE TEST CHAMBERS 941
REFERENCES 942
FURTHER READING 942
APPENDIX 943
INDEX 1003
DIRECTORY OF PRODUCTS AND SUPPLIERS 1023
|
| any_adam_object | 1 |
| author2 | Jousten, Karl 1960- |
| author2_role | edt |
| author2_variant | k j kj |
| author_GND | (DE-588)132075555 |
| author_facet | Jousten, Karl 1960- |
| building | Verbundindex |
| bvnumber | BV043681944 |
| classification_rvk | UX 1500 ZL 7300 |
| ctrlnum | (OCoLC)956318561 (DE-599)DNB1080812903 |
| dewey-full | 670 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 670 - Manufacturing |
| dewey-raw | 670 |
| dewey-search | 670 |
| dewey-sort | 3670 |
| dewey-tens | 670 - Manufacturing |
| discipline | Maschinenbau / Maschinenwesen Physik Werkstoffwissenschaften / Fertigungstechnik |
| edition | Second, completely revised and updated edition |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV043681944 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:32:22Z |
| institution | BVB |
| institution_GND | (DE-588)16179388-5 |
| isbn | 9783527413386 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029094804 |
| oclc_num | 956318561 |
| open_access_boolean | |
| owner | DE-20 DE-11 DE-83 DE-1050 DE-29T DE-634 DE-355 DE-BY-UBR |
| owner_facet | DE-20 DE-11 DE-83 DE-1050 DE-29T DE-634 DE-355 DE-BY-UBR |
| physical | XXIV, 1025 Seiten Illustrationen, Diagramme 1 Beilage |
| publishDate | 2016 |
| publishDateSearch | 2016 |
| publishDateSort | 2016 |
| publisher | Wiley-VCH |
| record_format | marc |
| spelling | Wutz Handbuch Vakuumtechnik Handbook of vacuum technology edited by Karl Jousten Second, completely revised and updated edition Weinheim Wiley-VCH 2016 XXIV, 1025 Seiten Illustrationen, Diagramme 1 Beilage txt rdacontent n rdamedia nc rdacarrier Hier auch später erschienene, unveränderte Nachdrucke Aus dem Deutschen übersetzt Vakuumpumpe (DE-588)4127061-7 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Vakuumtechnik (DE-588)4062270-8 s DE-604 Vakuumpumpe (DE-588)4127061-7 s Jousten, Karl 1960- (DE-588)132075555 edt Wiley-VCH (DE-588)16179388-5 pbl Beilage Vaccum Gauge Selection Guide Erscheint auch als Online-Ausgabe, ePDF 978-3-527-68825-8 Erscheint auch als Online-Ausgabe, ePub 978-3-527-68824-1 Erscheint auch als Online-Ausgabe, Mobi 978-3-527-68823-4 Erscheint auch als Online-Ausgabe, oBook 978-3-527-68826-5 DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029094804&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Handbook of vacuum technology Vakuumpumpe (DE-588)4127061-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd |
| subject_GND | (DE-588)4127061-7 (DE-588)4062270-8 (DE-588)4143413-4 |
| title | Handbook of vacuum technology |
| title_alt | Wutz Handbuch Vakuumtechnik |
| title_auth | Handbook of vacuum technology |
| title_exact_search | Handbook of vacuum technology |
| title_full | Handbook of vacuum technology edited by Karl Jousten |
| title_fullStr | Handbook of vacuum technology edited by Karl Jousten |
| title_full_unstemmed | Handbook of vacuum technology edited by Karl Jousten |
| title_short | Handbook of vacuum technology |
| title_sort | handbook of vacuum technology |
| topic | Vakuumpumpe (DE-588)4127061-7 gnd Vakuumtechnik (DE-588)4062270-8 gnd |
| topic_facet | Vakuumpumpe Vakuumtechnik Aufsatzsammlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029094804&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | UT wutzhandbuchvakuumtechnik AT joustenkarl handbookofvacuumtechnology AT wileyvch handbookofvacuumtechnology |