Papers from the 18th Workshop on Dielectrics in Microelectronics: 9-11 June 2014, Kinsale Co Cork Ireland
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
AVS through AIP Publishing LLC
[2015]
|
| Schriftenreihe: | Journal of vacuum science & technology. B
volume 33, number 1 (January/February 2015) |
| Schlagworte: | |
| Beschreibung: | circa 70 Seiten Illustrationen, Diagramme |
Internformat
MARC
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| 111 | 2 | |a Workshop on Dielectrics in Microelectronics |n 18. |d 2014 |c Kinsale |j Verfasser |0 (DE-588)1068325534 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 18th Workshop on Dielectrics in Microelectronics |b 9-11 June 2014, Kinsale Co Cork Ireland |c conference chairs: Dr. Paul K. Hurley and Dr. Karim Cherkaoui |
| 264 | 1 | |a New York |b AVS through AIP Publishing LLC |c [2015] | |
| 300 | |a circa 70 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Journal of vacuum science & technology. B |v volume 33, number 1 (January/February 2015) | |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dielektrikum |0 (DE-588)4149716-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2014 |z Kinsale |2 gnd-content | |
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| 689 | 0 | 1 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 0 | 2 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hurley, Paul K. |4 edt | |
| 830 | 0 | |a Journal of vacuum science & technology. B |v volume 33, number 1 (January/February 2015) |w (DE-604)BV002583087 |9 33,1 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029089420 | ||
Datensatz im Suchindex
| _version_ | 1804176440576442368 |
|---|---|
| any_adam_object | |
| author2 | Hurley, Paul K. |
| author2_role | edt |
| author2_variant | p k h pk pkh |
| author_corporate | Workshop on Dielectrics in Microelectronics Kinsale |
| author_corporate_role | aut |
| author_facet | Hurley, Paul K. Workshop on Dielectrics in Microelectronics Kinsale |
| author_sort | Workshop on Dielectrics in Microelectronics Kinsale |
| building | Verbundindex |
| bvnumber | BV043676411 |
| classification_rvk | UA 1000 |
| ctrlnum | (OCoLC)953836233 (DE-599)GBV820132373 |
| discipline | Physik |
| format | Conference Proceeding Book |
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| genre_facet | Aufsatzsammlung Konferenzschrift 2014 Kinsale |
| id | DE-604.BV043676411 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:32:13Z |
| institution | BVB |
| institution_GND | (DE-588)1068325534 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029089420 |
| oclc_num | 953836233 |
| open_access_boolean | |
| owner | DE-384 DE-706 |
| owner_facet | DE-384 DE-706 |
| physical | circa 70 Seiten Illustrationen, Diagramme |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | AVS through AIP Publishing LLC |
| record_format | marc |
| series | Journal of vacuum science & technology. B |
| series2 | Journal of vacuum science & technology. B |
| spelling | Workshop on Dielectrics in Microelectronics 18. 2014 Kinsale Verfasser (DE-588)1068325534 aut Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland conference chairs: Dr. Paul K. Hurley and Dr. Karim Cherkaoui New York AVS through AIP Publishing LLC [2015] circa 70 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology. B volume 33, number 1 (January/February 2015) Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dielektrikum (DE-588)4149716-8 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content (DE-588)1071861417 Konferenzschrift 2014 Kinsale gnd-content Dielektrikum (DE-588)4149716-8 s Dünnschichttechnik (DE-588)4136339-5 s Mikroelektronik (DE-588)4039207-7 s DE-604 Hurley, Paul K. edt Journal of vacuum science & technology. B volume 33, number 1 (January/February 2015) (DE-604)BV002583087 33,1 |
| spellingShingle | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland Journal of vacuum science & technology. B Dünnschichttechnik (DE-588)4136339-5 gnd Dielektrikum (DE-588)4149716-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4149716-8 (DE-588)4039207-7 (DE-588)4143413-4 (DE-588)1071861417 |
| title | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland |
| title_auth | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland |
| title_exact_search | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland |
| title_full | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland conference chairs: Dr. Paul K. Hurley and Dr. Karim Cherkaoui |
| title_fullStr | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland conference chairs: Dr. Paul K. Hurley and Dr. Karim Cherkaoui |
| title_full_unstemmed | Papers from the 18th Workshop on Dielectrics in Microelectronics 9-11 June 2014, Kinsale Co Cork Ireland conference chairs: Dr. Paul K. Hurley and Dr. Karim Cherkaoui |
| title_short | Papers from the 18th Workshop on Dielectrics in Microelectronics |
| title_sort | papers from the 18th workshop on dielectrics in microelectronics 9 11 june 2014 kinsale co cork ireland |
| title_sub | 9-11 June 2014, Kinsale Co Cork Ireland |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Dielektrikum (DE-588)4149716-8 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Dünnschichttechnik Dielektrikum Mikroelektronik Aufsatzsammlung Konferenzschrift 2014 Kinsale |
| volume_link | (DE-604)BV002583087 |
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