Silicon nanomembranes: fundamental science and applications
Gespeichert in:
| Weitere Verfasser: | , |
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Weinheim
Wiley-VCH Verlag GmbH & Co. KGaA
[2016]
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| Schlagworte: | |
| Online-Zugang: | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-33831-3/ Inhaltsverzeichnis |
| Beschreibung: | XVIII, 347 Seiten Illustrationen, Diagramme (teilweise farbig) |
| ISBN: | 9783527338313 |
Internformat
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| 245 | 1 | 0 | |a Silicon nanomembranes |b fundamental science and applications |c edited by John A. Rogers and Jong-Hyun Ahn |
| 264 | 1 | |a Weinheim |b Wiley-VCH Verlag GmbH & Co. KGaA |c [2016] | |
| 264 | 4 | |c © 2016 | |
| 300 | |a XVIII, 347 Seiten |b Illustrationen, Diagramme (teilweise farbig) | ||
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| 653 | |a Biomedizin | ||
| 653 | |a Components & Devices | ||
| 653 | |a Electrical & Electronics Engineering | ||
| 653 | |a Electronic Materials | ||
| 653 | |a Elektronik | ||
| 653 | |a Elektronische Materialien | ||
| 653 | |a Elektrotechnik u. Elektronik | ||
| 653 | |a Energie | ||
| 653 | |a Energiespeicherung | ||
| 653 | |a Energy | ||
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| 653 | |a Komponenten u. Bauelemente | ||
| 653 | |a Materials Science | ||
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Datensatz im Suchindex
| _version_ | 1804176369718919168 |
|---|---|
| adam_text | CONTENTS
I
1.1
1.2
1
.
2.1
1
.
2.2
1.3
1.3.1
1.3.2
1.3.3
1.4
1.4.1
1.4.2
1.4.3
1.4.4
1.5
1.5.1
1.5.2
1.5.3
1.5.4
1.5.5
1.6
LIST OF CONTRIBUTORS
XIII
PART I MATERIALS AND PROCESSES
1
SYNTHESIS, ASSEMBLY, AND APPLICATIONS OF SEMICONDUCTOR
NANOMEMBRANES
3
ZHENG YAN, KEWANG NAN, AND JOHN A. ROGERS
INTRODUCTION 3
STRATEGIES FOR FORMING SILICON NANOMEMBRANES 4
SELECTIVE ETCHING TO RELEASE NANOMEMBRANES FROM LAYERED
ASSEMBLIES 4
ANISOTROPIC ETCHING TO RELEASE SILICON NANOMEMBRANES FROM BULK
SILICON WAFERS 6
TRANSFER PRINTING FOR DETERMINISTIC ASSEMBLY 7
INTRODUCTION 7
MECHANICS OF TRANSFER PRINTING 9
TRANSFER PRINTING FOR SINGLE- AND MULTILAYER DETERMINISTIC
ASSEMBLY 10
COMPRESSIVE BUCKLING FOR DETERMINISTIC ASSEMBLY 11
INTRODUCTION 11
BUCKLING ON COMPLIANT SUBSTRATES FOR WAVY LAYOUTS 13
PATTERNED ADHESION FOR CONTROLLED, LARGE-SCALE BUCKLING 16
DETERMINISTIC ASSEMBLY OF COMPLEX, THREE-DIMENSIONAL
ARCHITECTURES BY COMPRESSIVE BUCKLING 18
FUNCTIONAL DEVICES MADE FROM SILICON NANOMEMBRANES 21
PHYSICALLY TRANSIENT ELECTRONICS 21
INJECTABLE, CELLULAR-SCALE OPTOELECTRONIC DEVICES FOR THE BRAIN 23
THREE-DIMENSIONAL INTEGUMENTARY MEMBRANES FOR SPATIOTEMPORAL
CARDIAC MEASUREMENTS 25
ARTHROPOD EYES INSPIRED DIGITAL CAMERA 27
CEPHALOPOD SKINS INSPIRED OPTOELECTRONIC CAMOUFLAGE SYSTEMS 29
CONCLUSIONS AND OUTLOOK 29
REFERENCES 31
2.1
2.2
2.3
2.4
2.5
3
3.1
3.2
3.3
3.3.1
3.3.2
3.3.3
3.4
3.4.1
3.4.2
3.4.3
3.4.4
3.4.5
3.4.6
3.4.7
3.5
4
4.1
4.2
4.3
4.4
4.4.1
4.4.2
MODELS OF REACTIVE DIFFUSION FOR RESORBABLE ELECTRONICS
37
HUANYU CHENG, YONGGONG HUANG, AND JOHN A. ROGERS
INTRODUCTION 37
HYDROLYSIS OF SILICON NANOMEMBRANES 39
MATERIAL-LEVEL DISSOLUTION 41
DISSOLUTION OF DEVICE WITH LAYERED STRUCTURES 47
DISCUSSION AND CONCLUSION 53
ACKNOWLEDGMENTS 54
REFERENCES 54
PART II APPLICATIONS IN BIO-INTEGRATED AND FLEXIBLE ELECTRONICS
57
TRANSPARENT AND FOLDABLE ELECTRONICS ENABLED BY SI
NANOMEMBRANES
59
HOUKJANG, TANMOY DAS, WONHO LEE, ANDJONG-HYUN AHN
INTRODUCTION 59
FABRICATION 61
CHARACTERIZATION 64
MECHANICAL PROPERTIES OF SI NM IN BENDING AND STRETCHING 65
OPTICAL PROPERTIES 67
PIEZORESISTIVE EFFECT IN SI NM 69
CONFIGURATIONS OF TRANSPARENT AND FOLDABLE ELECTRONIC DEVICES 72
REPRESENTATIVE MATERIALS FOR TRANSPARENT AND FOLDABLE
ELECTRONICS 72
ELECTRICAL AND OPTICAL PROPERTIES OF TRANSPARENT TFTS 73
MODIFICATION OF THE BENDING STIFFNESS WITH SUBSTRATE THICKNESS 75
ELECTROMECHANICAL PROPERTIES OF FOLDABLE TFTS 77
CONTROL OF STIFFNESS BY THINNING OF SI FOR STRETCHABLE ELECTRONIC
DEVICES 78
CONTROL OF STRAIN DISTRIBUTION BY GEOMETRICAL DESIGN 79
MECHANICAL PROPERTIES OF STRETCHABLE INVERTERS 82
CONCLUDING REMARKS 83
REFERENCES 84
HIGH-PERFORMANCE FLEXIBLE ELECTRONIC AND OPTOELECTRONIC DEVICES BY
MECHANICAL EXFOLIATION FROM A BRITTLE SUBSTRATE
89
DAVOOD SHAHRJERDI
INTRODUCTION 89
STEADY-STATE SUBSTRATE CRACKING PARALLEL TO THE INTERFACE IN A
BILAYERS
90
SPALLING-MODE FRACTURE FOR LAYER TRANSFER 92
HIGH-PERFORMANCE FLEXIBLE ELECTRONICS BY CONTROLLED SPALLING 95
ULTRA-LOW-POWER NANOSCALE SILICON INTEGRATED CIRCUITS ON
PLASTIC 95
ELECTRICAL CHARACTERISTICS OF FLEXIBLE DEVICES AND CIRCUITS 100
4.4.3
4.4.4
4.5
5
5.1
5.2
5.2.1
5.2.2
5.3
5.4
5.4.1
5.4.2
5.4.3
5.5
5.5.1
5.5.2
5.5.3
5.6
6
6.1
6.2
6
.
2.1
6
.
2.2
6.3
6.3.1
6.3.2
6.3.3
6.3.4
6.3.5
6.4
6.4.1
EFFECT OF STRAIN ON DEVICE PERFORMANCE 102
VERY-HIGH-EFFICIENCY FLEXIBLE TANDEM SOLAR CELLS 104
FUTURE DIRECTIONS 106
REFERENCES 108
HIGH-SPEED, FLEXIBLE ELECTRONICS BY USE OF SI NANOMEMBRANES
113
YEI HWAN JUNG, JUNG-HUN SEO, WEIDONG ZHOU, AND ZHENQIANG MA
INTRODUCTION 113
FABRICATION OF HIGH-SPEED MOSFETS 114
DOPING PROFILE SETTINGS 114
GENERIC FABRICATION PROCESS 115
DESIGN AND PERFORMANCE OF HIGH-SPEED MOSFET 118
HIGH-SPEED MOSFET USING STRAINED SI NMS 121
SIGE-BASED STRAIN ENGINEERING 121
FABRICATION OF FLEXIBLE STRAINED-CHANNEL RF TFTS 125
DC/RF CHARACTERISTICS OF FLEXIBLE STRAINED-CHANNEL
RF TFTS
126
HIGH-SPEED DIODES AND SWITCHES WITH SI NMS 129
FABRICATION OF FLEXIBLE RF DIODES AND SWITCHES 129
RF CHARACTERISTICS OF FLEXIBLE RF DIODES/SWITCHES 132
ANALYTICAL MODELING OF FLEXIBLE RF DIODES/SWITCHES 134
OUTLOOK TOWARD FUTURE FAST ELECTRONICS 135
REFERENCES 137
FLEXIBLE AND STRETCHABLE BIOINTEGRATED ELECTRONICS USING SILICON
NANOMEMBRANES
143
JAEMIN KIM, MINCHEOL LEE, HYUNGJOON SHIM, AND DAE-HYEONG KIM
INTRODUCTION 143
OVERVIEW OF FLEXIBLE ORGANIC/NW-BASED BIOMEDICAL
DEVICES 144
FLEXIBLE ORGANIC BIOMEDICAL DEVICES 144
FLEXIBLE NW-BASED BIOMEDICAL DEVICES 147
FLEXIBLE/STRETCHABLE SINGLE-CRYSTAL SILICON-BASED BIOMEDICAL
DEVICES 148
FABRICATION PROCESSES OF SI NM ELECTRONICS 148
HUMAN MOTION DETECTORS USING WEARABLE SI NM STRAIN
GAGES 150
ORGAN MOTION DETECTORS USING IMPLANTABLE SI NM STRAIN
GAGES 152
SI NM TEMPERATURE SENSORS FOR PHYSIOLOGICAL MONITORING 154
INTEGRATED ARRAY CONFIGURATION OF SI NM SENSORS 155
ACTIVELY MULTIPLEXED ELECTROPHYSIOLOGY USING SI NM
TRANSISTORS 157
MULTIPLEXED ELECTRODE ARRAY FOR NEURAL ACTIVITY MONITORING 158
6.4.2
6.5
7
7.1
7.2
7.2.1
7.2.2
7.2.3
7.3
7.3.1
7.3.2
7.3.3
7.3.4
7.3.5
7.4
8
8.1
8.2
8.3
8.4
8.5
8.5.1
8.5.2
8.5.3
8.5.4
8.6
8
.
6.1
8
.
6.2
8.7
MULTIPLEXED ELECTRODE ARRAY FOR CARDIAC ELECTROPHYSIOLOGY
MAPPING 160
CONCLUSIONS 161
ACKNOWLEDGMENTS 162
REFERENCES 162
FLEXIBLE SI NANOMEMBRANE SENSOR FOR HUMAN-MACHINE
INTERFACE
169
MIN-SEOKKIM
INTRODUCTION 169
SI NM-BASED TACTILE SENSOR 170
OVERVIEW OF TACTILE SENSING TECHNOLOGIES 170
DESIGN AND FABRICATION OF SI NM-BASED TACTILE SENSOR 172
PERSPECTIVES AND OUTLOOK OF SI -NM-BASED TACTILE SENSOR 181
SI NM-BASED FLEXIBLE SENSOR FOR BIOLOGICAL SIGNAL MONITORING AND
MOTION SENSING OF HUMANS 182
OVERVIEW 182
EPIDERMAL AND WEARABLE DEVICES 183
IMPLANTABLE DEVICES 190
BIODEGRADABLE AND TRANSIENT DEVICES 193
PERSPECTIVES AND OUTLOOK OF WEARABLE, IMPLANTABLE, AND TRANSIENT
ELECTRONICS 195
SUMMARY 197
ACKNOWLEDGMENTS 199
REFERENCES 199
FLEXIBLE AND TRANSPARENT SOLAR CELLS USING SI NANOMEMBRANES
203
JONGSEUNG YOON
INTRODUCTION 203
FABRICATION OF ULTRATHIN MONOCRYSTALLINE SILICON SOLAR CELLS 204
TRANSFER PRINTING OF ULTRATHIN SILICON SOLAR CELLS 208
PHOTOVOLTAIC PERFORMANCE OF PRINTED SILICON MICROCELLS 211
UNCONVENTIONAL MODULE DESIGNS OF ULTRATHIN SILICON
MICROCELLS 212
MODULES WITH HIGH DEGREES OF MECHANICAL FLEXIBILITY 212
MODULES WITH DEFINABLE OPTICAL TRANSPARENCY 215
MODULES WITH MICROSCALE CONCENTRATOR OPTICS 216
MODULES WITH A COMPACT SIZE, HIGH VOLTAGE OUTPUTS 217
PHOTON MANAGEMENT FOR ULTRATHIN SILICON MICROCELLS 219
MICROCELLS WITH HEXAGONALLY PERIODIC NANOPOSTS 219
MICROCELLS WITH DENSITY-GRADED SURFACE NANOSTRUCTURES 232
CONCLUSION 233
ACKNOWLEDGMENT 237
REFERENCES 237
9 SILICON NANOMEMBRANES FOR EFFICIENT AND PRECISE MOLECULAR
SEPARATIONS
241
KARL J. P. SMITH, JOSHUA D. WINANS, AND JAMES L MCGRATH
9.1 INTRODUCTION 241
9.2 SEPARATION SCIENCE 241
9.3 SILICON NANOMEMBRANES 246
9.3.1 POROUS NANOCRYSTALLINE SILICON 247
9.3.2 TRACK-ETCHED 248
9.3.3 INTERFEROMETRIC 248
9.3.4 MICROMACHINED 249
9.3.5 BLOCK COPOLYMER 249
9.3.6 DIRECT DRILLING 250
9.4 APPLICATIONS 250
9.4.1 HEMODIALYSIS 250
9.4.2 BIOTECH THERAPEUTICS PREPARATION 251
REFERENCES 253
10 NANOMEMBRANES AS PROTEIN MASS SPECTROMETERS
257
JONGHOO PARK, LLOYD M. SMITH, MARIA ARBULU, THALES V.A.G. DE OLIVEIRA,
AND
ROBERT H. BLICK
10.1 INTRODUCTION 257
10.2 CHEMICAL PERSPECTIVE AND CURRENT LIMITATIONS 258
10.3 PROTEIN MASS SENSORS 260
10.4 NANOMEMBRANE OPERATING BASICS 260
10.5 FIELD-EMISSION MECHANICS 264
10.6 FIELD EMISSION COOLING 267
10.7 SUMMARY 269
ACKNOWLEDGMENTS 269
REFERENCES 269
PART III APPLICATIONS IN THERMOELECTRICS AND OPTICS
271
11 SEMICONDUCTOR NANOMEMBRANES FOR FANO RESONANCE PHOTONIC CRYSTAL
DEVICES
273
WEIDONG ZHOU, ZHENQIANG MA, HONGJUN YANG, DEYIN ZHAO, YI-CHEN SHUAI,
AND JUNG-HUN SEO
11.1 INTRODUCTION 273
11.2 PRINCIPLES OF FANO RESONANCE IN PHOTONIC CRYSTAL SLABS 274
11.3 FANO RESONANCE PHOTONIC CRYSTAL FILTERS 275
11.3.1 SINGLE-LAYER FILTERS 275
11.3.2 DOUBLE-LAYER FANO RESONANCE FILTERS 277
11.3.3 DOUBLE-LAYER FANO RESONANCE FILTERS WITH CONTROLLED LATTICE
DISPLACEMENT 279
11.4 FANO RESONANCE PHOTONIC CRYSTAL MEMBRANE REFLECTORS 282
11.4.1 BROADBAND REFLECTOR DESIGN 283
11.4.2 DIFFERENT CONFIGURATIONS AND BUFFER LAYER DESIGN 284
11.5 FANO RESONANCE PHOTONIC CRYSTAL MEMBRANE LASERS 286
11.6 DESIGN OF MR-VCSELS 286
11.6.1 MR-VCSEL FABRICATION AND CONFIGURATIONS 289
11.6.1.1 EPITAXIAL GROWTH APPROACH 289
11.6.1.2 WAFER BONDING AND CMP TECHNIQUES 290
11.6.1.3 TRANSFER PRINTING TECHNIQUES 290
11.7 FANO RESONANCE PHOTONIC CRYSTAL FIELD LOCALIZATION AND ABSORPTION
ENGINEERING 293
11.7.1 ELECTROMAGNETIC FIELD LOCALIZATION AND ENHANCEMENT IN PHOTONIC
CRYSTAL CAVITIES 293
11.7.2 DEMONSTRATION OF SPECTRAL-SELECTIVE ABSORPTION ENHANCEMENT AND
IR DETECTORS 293
11.7.2.1 CQD INTEGRATED SI-NM FANO FILTERS 295
11.7.2.2 FANO RESONANCE ENHANCED PHOTONIC CRYSTAL INFRARED
PHOTODETECTORS 295
11.8 CONCLUSIONS AND PROSPECTS 296
ACKNOWLEDGMENTS 297
REFERENCES 298
12 ACOUSTIC PHONONS IN ULTRATHIN FREE-STANDING SILICON MEMBRANES
305
CLIVIA M. SOTOMAYOR TORRES, FRANCESC ALZINA, ANDREY SHCHEPETOV, EMIGDIO
CHAVEZ-ANGEL, JOHN CUFFE, BARTLOMIEJ GRACZYKOWSKI, MIKA PRUNNILA,
JUAN SEBASTIAN REPARAZ, ANDJOUNIAHOPELTO
12.1 INTRODUCTION 305
12.2 FABRICATION OF FREE-STANDING SILICON MEMBRANES 306
12.2.1 CONCEPT AND DESIGN 306
12.2.2 FABRICATION AND STRESS CONTROL 307
12.2.3 STRUCTURAL AND ELECTRICAL CHARACTERIZATION 309
12.3 DISPERSION RELATIONS 310
12.3.1 DISCRETIZATION AND DEVIATION FROM LINEAR BEHAVIOR 310
12.3.2 MEASUREMENTS OF DISPERSION RELATIONS 312
12.4 PHONON TRANSPORT REGIMES 313
12.4.1 PHONON MEAN FREE PATH 313
12.4.2 PHONON LIFETIME 315
12.5 CONTACTLESS THERMAL CONDUCTIVITY MEASUREMENTS 318
12.6 DISCUSSION 320
12.7 CONCLUSIONS 321
ACKNOWLEDGMENTS 322
REFERENCES 322
13 THERMOELECTRIC PERFORMANCE OF SILICON NANOSTRUCTURES
327
JINYAO TANG
13.1 INTRODUCTION 327
13.2 BASICS OF SEEBECK AND PELTIER EFFECT 328
13.3 ENHANCE THERMOELECTRIC PERFORMANCE BY REDUCING THERMAL
CONDUCTIVITY 331
13.3.1 THERMAL CONDUCTIVITY REDUCTION IN SILICON NANOWIRE
333
13.3.2 THERMAL CONDUCTIVITY REDUCTION IN SILICON THIN FILM 334
13.4 ENHANCE THERMOELECTRIC PERFORMANCE BY ENHANCING THERMOELECTRIC
POWER FACTOR 337
13.4.1 ELECTRON-PHONON SCATTERING (PHONON DRAG) 338
13.4.1.1 QUANTUM CONFINEMENT 339
13.4.1.2 FIELD EFFECT CARRIER DOPING 339
13.5
CONCLUSION 340
REFERENCES 341
INDEX
343
|
| any_adam_object | 1 |
| author2 | Rogers, John A. 1967- Ahn, Jong-Hyun |
| author2_role | edt edt |
| author2_variant | j a r ja jar j h a jha |
| author_GND | (DE-588)1104966468 (DE-588)1105689433 |
| author_facet | Rogers, John A. 1967- Ahn, Jong-Hyun |
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| ctrlnum | (OCoLC)953130895 (DE-599)DNB1080812814 |
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| dewey-ones | 540 - Chemistry and allied sciences |
| dewey-raw | 540 |
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| dewey-tens | 540 - Chemistry and allied sciences |
| discipline | Chemie / Pharmazie Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV043633970 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:31:06Z |
| institution | BVB |
| institution_GND | (DE-588)16179388-5 |
| isbn | 9783527338313 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029047940 |
| oclc_num | 953130895 |
| open_access_boolean | |
| owner | DE-11 DE-29T DE-634 DE-703 DE-573 |
| owner_facet | DE-11 DE-29T DE-634 DE-703 DE-573 |
| physical | XVIII, 347 Seiten Illustrationen, Diagramme (teilweise farbig) |
| publishDate | 2016 |
| publishDateSearch | 2016 |
| publishDateSort | 2016 |
| publisher | Wiley-VCH Verlag GmbH & Co. KGaA |
| record_format | marc |
| spelling | Silicon nanomembranes fundamental science and applications edited by John A. Rogers and Jong-Hyun Ahn Weinheim Wiley-VCH Verlag GmbH & Co. KGaA [2016] © 2016 XVIII, 347 Seiten Illustrationen, Diagramme (teilweise farbig) txt rdacontent n rdamedia nc rdacarrier Membran (DE-588)4038571-1 gnd rswk-swf Siliciumhalbleiter (DE-588)4274465-9 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Nanostruktur (DE-588)4204530-7 gnd rswk-swf Biomedizin Components & Devices Electrical & Electronics Engineering Electronic Materials Elektronik Elektronische Materialien Elektrotechnik u. Elektronik Energie Energiespeicherung Energy Energy Storage Komponenten u. Bauelemente Materials Science Materialwissenschaften Nanomembran Photonik Silizium (DE-588)4143413-4 Aufsatzsammlung gnd-content Silicium (DE-588)4077445-4 s Membran (DE-588)4038571-1 s Nanostruktur (DE-588)4204530-7 s DE-604 Siliciumhalbleiter (DE-588)4274465-9 s Rogers, John A. 1967- (DE-588)1104966468 edt Ahn, Jong-Hyun (DE-588)1105689433 edt Wiley-VCH (DE-588)16179388-5 pbl Erscheint auch als Online-Ausgabe, ePDF 978-3-527-69099-2 Erscheint auch als Online-Ausgabe, ePub 978-3-527-69101-2 Erscheint auch als Online-Ausgabe, Mobi 978-3-527-69102-9 Erscheint auch als Online-Ausgabe, oBook 978-3-527-69100-5 http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-33831-3/ Verlag DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029047940&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Silicon nanomembranes fundamental science and applications Membran (DE-588)4038571-1 gnd Siliciumhalbleiter (DE-588)4274465-9 gnd Silicium (DE-588)4077445-4 gnd Nanostruktur (DE-588)4204530-7 gnd |
| subject_GND | (DE-588)4038571-1 (DE-588)4274465-9 (DE-588)4077445-4 (DE-588)4204530-7 (DE-588)4143413-4 |
| title | Silicon nanomembranes fundamental science and applications |
| title_auth | Silicon nanomembranes fundamental science and applications |
| title_exact_search | Silicon nanomembranes fundamental science and applications |
| title_full | Silicon nanomembranes fundamental science and applications edited by John A. Rogers and Jong-Hyun Ahn |
| title_fullStr | Silicon nanomembranes fundamental science and applications edited by John A. Rogers and Jong-Hyun Ahn |
| title_full_unstemmed | Silicon nanomembranes fundamental science and applications edited by John A. Rogers and Jong-Hyun Ahn |
| title_short | Silicon nanomembranes |
| title_sort | silicon nanomembranes fundamental science and applications |
| title_sub | fundamental science and applications |
| topic | Membran (DE-588)4038571-1 gnd Siliciumhalbleiter (DE-588)4274465-9 gnd Silicium (DE-588)4077445-4 gnd Nanostruktur (DE-588)4204530-7 gnd |
| topic_facet | Membran Siliciumhalbleiter Silicium Nanostruktur Aufsatzsammlung |
| url | http://www.wiley-vch.de/publish/dt/books/ISBN978-3-527-33831-3/ http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029047940&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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