Resonant MEMS: fundamentals, implementation and application
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Wiesbaden
Wiley-VCH Verlag & Co. KGaA
[2015]
|
| Schriftenreihe: | Advanced micro and nanosystems
|
| Schlagworte: | |
| Online-Zugang: | FRO01 TUM01 UBG01 Volltext |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9783527676361 3527676368 9783527676354 352767635X 9783527676347 3527676341 9783527676330 3527676333 9783527335459 |
Internformat
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| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / General |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a Microelectromechanical systems / Design and construction |2 fast | |
| 650 | 7 | |a Microfabrication |2 fast | |
| 650 | 7 | |a Resonance |2 fast | |
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| 650 | 4 | |a Microfabrication | |
| 650 | 4 | |a Resonance | |
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| 700 | 1 | |a Heinrich, Stephen M. |e Sonstige |4 oth | |
| 700 | 1 | |a Josse, Fabien |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| author_GND | (DE-588)123279216 |
| building | Verbundindex |
| bvnumber | BV043397763 |
| collection | ZDB-35-WIC |
| contents | Includes bibliographical references and index |
| ctrlnum | (ZDB-35-WIC)ocn908335689 (OCoLC)908335689 (DE-599)BVBBV043397763 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043397763 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:54Z |
| institution | BVB |
| isbn | 9783527676361 3527676368 9783527676354 352767635X 9783527676347 3527676341 9783527676330 3527676333 9783527335459 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028816347 |
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| owner_facet | DE-91 DE-BY-TUM DE-861 |
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| publishDate | 2015 |
| publishDateSearch | 2015 |
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| publisher | Wiley-VCH Verlag & Co. KGaA |
| record_format | marc |
| series2 | Advanced micro and nanosystems |
| spelling | Resonant MEMS fundamentals, implementation and application edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse Wiesbaden Wiley-VCH Verlag & Co. KGaA [2015] 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Online-Ressource Advanced micro and nanosystems Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectromechanical systems / Design and construction fast Microfabrication fast Resonance fast Microelectromechanical systems / Design and construction Microfabrication Resonance Resonator (DE-588)4131574-1 gnd rswk-swf Nanoelektromechanik (DE-588)7546434-2 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content MEMS (DE-588)4824724-8 s Nanoelektromechanik (DE-588)7546434-2 s Resonator (DE-588)4131574-1 s 2\p DE-604 Brand, Oliver 1964- Sonstige (DE-588)123279216 oth Dufour, Isabelle Sonstige oth Heinrich, Stephen M. Sonstige oth Josse, Fabien Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9783527676330 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Resonant MEMS fundamentals, implementation and application Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectromechanical systems / Design and construction fast Microfabrication fast Resonance fast Microelectromechanical systems / Design and construction Microfabrication Resonance Resonator (DE-588)4131574-1 gnd Nanoelektromechanik (DE-588)7546434-2 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4131574-1 (DE-588)7546434-2 (DE-588)4824724-8 (DE-588)4143413-4 |
| title | Resonant MEMS fundamentals, implementation and application |
| title_auth | Resonant MEMS fundamentals, implementation and application |
| title_exact_search | Resonant MEMS fundamentals, implementation and application |
| title_full | Resonant MEMS fundamentals, implementation and application edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse |
| title_fullStr | Resonant MEMS fundamentals, implementation and application edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse |
| title_full_unstemmed | Resonant MEMS fundamentals, implementation and application edited by Oliver Brand, Isabelle Dufour, Stephen M. Heinrich and Fabien Josse |
| title_short | Resonant MEMS |
| title_sort | resonant mems fundamentals implementation and application |
| title_sub | fundamentals, implementation and application |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh TECHNOLOGY & ENGINEERING / Electronics / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh Microelectromechanical systems / Design and construction fast Microfabrication fast Resonance fast Microelectromechanical systems / Design and construction Microfabrication Resonance Resonator (DE-588)4131574-1 gnd Nanoelektromechanik (DE-588)7546434-2 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Digital TECHNOLOGY & ENGINEERING / Electronics / General TECHNOLOGY & ENGINEERING / Electronics / Microelectronics Microelectromechanical systems / Design and construction Microfabrication Resonance Resonator Nanoelektromechanik MEMS Aufsatzsammlung |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9783527676330 |
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